Secure The Stp Pump; Precautions Of Vacuum Piping - Edwards STP-XF803 Series Instruction Manual

2.3.3

Secure the STP pump

2
The STP pump is provided with a high-speed rotor. The worst-case failure may result in a jump in
rotational torque leading to personal injury or peripheral equipment damage.
The method of securing the STP pump will depend on the STP pump model and its installation
requirements. Secure the STP pump to the vacuum equipment as "HOW TO SECURE THE STP
PUMP" in the STP Pump Instruction Manual (B).
The STP pump is a component system when installing to the semiconductor equipment. Consider
the following when installing to the semiconductor equipment.
• Confirm that electric resistance value between the STP pump and vacuum equipment is set to
0.1 Ω or less after securing the STP pump to the vacuum equipment.
2.3.4

Precautions of vacuum piping

DO NOT open the STP pump through the flange to atmospheric air while the STP pump is
running. If atmospheric air flows into the STP pump, it may not function normally.
Depending upon the type of the backing-pump used, atmospheric air may reverse flow into the STP
pump when the backing-pump stops.
Attach a vacuum valve to the middle of the piping between the STP pump outlet port flange and the
backing-pump, and close the vacuum valve when the backing-pump stops.
In order to let the STP pump bring its performance into full play, follow the precautions below:
1. Be careful not to scratch the flange of the STP pump and vacuum equipments. Before installing
the STP pump, check whether or not there are scratches on the surface.
2. Use steel or aluminum tubes with a low gas loss to connect the vacuum equipment to the STP
pump.
3. Take measures for minimizing leakage. It is also necessary to degrease the tubes as regularly as
possible to keep the gas loss as low as possible.
4. There is a recommended backing-pump of pumping speed. (Refer to "TECHNICAL DATA" in the
STP Pump Instruction Manual (B). However, the pressure at the inlet and outlet ports varies with
the flow rate of gas, capacity of the vacuum equipment, length and material of the piping.
MT-00E-2A1-C
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STP Series Turbomolecular Pump
The STP pump is provided with a high-speed rotor. Any internal abnormality/error
may result in a jump in rotational torque leading to personal injury or peripheral
WARNING
equipment damage.
CAUTION