Technical Data; Applicable Pump Specifications - Edwards STP-XA2703 Series Instruction Manual

STP-XA2703/XA3203 Series Turbomolecular Pump
1

TECHNICAL DATA

1.1

Applicable pump specifications

Model Name
STP-XA2703/XA3203 series
*1
Applicable control unit:
Naming convention:
• "C" following a pump model name indicates a corrosion resistant
• "CV" indicates an enhanced corrosion resistant type with TMS
*2
Corrosion resistant:
*3
Temperature Management System: TMS maintains the temperature of the turbomolecular pump by monitoring the
Aug. 08
Specification
Extreme Advanced throughput type
There are different performance specifications between SCU-1500 and SCU-1400.
Refer to Section 1.1.1, "STP pump specifications" for the differences.
STP pump with anti-corrosive treatment.
temperature with the thermistor in the base of the turbomolecular pump, and
performing the TMS valve and base heater ON/OFF control.
1
Applicable Control unit
SCU-1500/SCU-1400
*2
type (e.g. STP-XA2703C).
*3
(e.g. STP-XA3203CV).
Issue 1-b
1
*1