Edwards STP Series Instruction Manual
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Instruction Manual (B)
STP Series Turbomolecular Pumps
STP-603/1003 Series
Pump Specific Information
Model name
STP-603/1003 series
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
Instruction Manual (B):
(This Instruction Manual)
Instruction Manual (C):
Voltage
200 - 240 Va.c.
100 -120 Va.c.
STP pump generic Instruction Manual
STP pump specific information
STP control unit Instruction Manual
Copyright 2016 Edwards Japan Limited. All rights reserved. Printed in Japan.
MT-39E-101-F
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Table of Contents
Related Manuals for Edwards STP Series
Summary of Contents for Edwards STP Series
- Page 1 STP pump consists of the three-volumed Instruction Manuals. Instruction Manual (A): STP pump generic Instruction Manual Instruction Manual (B): STP pump specific information (This Instruction Manual) Instruction Manual (C): STP control unit Instruction Manual Copyright 2016 Edwards Japan Limited. All rights reserved. Printed in Japan.
- Page 2 Note: This declaration covers all product serial numbers from the date this Declaration was signed onwards. Manufacture: June. 2016, Yachiyo Yuji Kato, TMP Technical Senior Manager, Edwards Japan Limited Date and Place June. 2016, Burgess Hill EU representative: Date and Place...
- Page 3 The description of this product consists of the three-volumed Instruction Manuals. Read through each Instruction Manual before operation. The separate volume contents of each description are as follows: Instruction Manual (A) STP pump generic Instruction Manual: Introduction Installation of the STP pump Installation of the STP control unit Operation Safety functions...
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Page 5: Table Of Contents
STP-603/1003 Series Turbomolecular Pump CONTENTS PAGE Section Title Page TECHNICAL DATA Applicable pump specifications 1.1.1 STP pump specifications 1.1.2 Condition for the water-cooling unit External appearance of the STP pump Label affixing positions Accessories HOW TO SECURE THE STP PUMP When securing the inlet port with bolts When securing the inlet port flange with claw clamps When installing the damper in the inlet port flange... - Page 6 STP-603/1003 Series Turbomolecular Pump ILLUSTRATIONS PAGE Figure Title Page STP-603 series: ICF203/VG150 STP-603 series: ISO160/ISO160F STP-1003 series: ICF253/VG200 STP-1003 series: ISO200/ISO200F STP-1003 series: ISO250/ISO250F Label affixing positions for the STP pump Example of securing the STP pump (when securing the inlet port with bolts) Example of securing the STP pump (when securing the inlet port flange with claw clamps) Example of securing the STP pump...
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Page 7: Technical Data
STP-603/1003 Series Turbomolecular Pump TECHNICAL DATA Applicable pump specifications Model Name Specification Applicable Control unit STP-603/1003 series Ultra high-vacuum type SCU-800 Naming convention: "C" following a pump model name indicates a corrosion resistant type (e.g. STP-603C). Corrosion resistant: STP pump with anti-corrosive treatment. MT-39E-101-F Page 1... -
Page 8: Stp Pump Specifications
STP-603/1003 Series Turbomolecular Pump 1.1.1 STP pump specifications The values shown below are typical. They are not guaranteed. Item 603 series 1003 series Flange size Inlet port flange ICF203/VG150/ ICF253/VG200/ISO200/ ISO160/ISO160F ISO200F/ISO250/ISO250F Outlet port flange KF40 KF40 Pumping speed 1000 Compression ratio >10 Ultimate pressure... -
Page 9: Condition For The Water-Cooling Unit
1,300 L/min) is used. When the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. Consult Edwards about conditions. A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure. -
Page 10: External Appearance Of The Stp Pump
STP-603/1003 Series Turbomolecular Pump External appearance of the STP pump Figure 1 - STP-603 series: ICF203/VG150 Item Description Inlet port flange Inlet port flange Height of the purge port (only for corrosion resistant type) Bending dimension of the STP connection cable Screw hole of legs depth 20 Outlet port flange... - Page 11 STP-603/1003 Series Turbomolecular Pump Figure 2 - STP-603 series: ISO160/ISO160F Item Description Inlet port flange Inlet port flange 160F Height of the purge port (only for corrosion resistant type) Bending dimension of the STP connection cable Screw hole of legs depth 20 Outlet port flange STP connector...
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Page 12: Stp-1003 Series: Icf253/Vg200
STP-603/1003 Series Turbomolecular Pump Figure 3 - STP-1003 series: ICF253/VG200 Item Description Inlet port flange Inlet port flange Height of the purge port (only for corrosion resistant type) Bending dimension of the STP connection cable Screw hole of legs depth 20 Outlet port flange STP connector Screw hole for legs... -
Page 13: Stp-1003 Series: Iso200/Iso200F
STP-603/1003 Series Turbomolecular Pump Figure 4 - STP-1003 series: ISO200/ISO200F Item Description Inlet port flange Inlet port flange 200F Height of the purge port (only for corrosion resistant type) Bending dimension of the STP connection cable Screw hole of legs depth 20 Outlet port flange STP connector... -
Page 14: Stp-1003 Series: Iso250/Iso250F
STP-603/1003 Series Turbomolecular Pump Figure 5 - STP-1003 series: ISO250/ISO250F Item Description Inlet port flange Inlet port flange 250F Position of the purge port (only for corrosion resistant type) Bending dimension of the STP connection cable Screw hole of legs depth 20 Outlet port flange STP connector... -
Page 15: Label Affixing Positions
STP-603/1003 Series Turbomolecular Pump Label affixing positions Refer to the Instruction Manual (A) for the details of the labels 1 to 7. Figure 6 - Label affixing positions for the STP pump STP pump installation warning label Heavy product caution label Connector caution label STP pump/control unit caution label Rotational direction instruction label... -
Page 16: Accessories
STP-603/1003 Series Turbomolecular Pump Accessories Item Q’ty Remarks Inlet port cover Outlet port cover STP connector cover Blank flange for purge port KF10 (only for corrosion resistant type) Clamping ring for purge port KF10 (only for corrosion resistant type) O-ring washer for purge port KF10 (only for corrosion resistant type) 4 legs are attached to the STP pump Rubber foot for leg... -
Page 17: How To Secure The Stp Pump
Use a material that has a tensile strength of 600N/mm or more. When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more. Note: When using any securing method other than that specified in this manual, contact Edwards. MT-39E-101-F Page 11... -
Page 18: When Securing The Inlet Port With Bolts
STP-603/1003 Series Turbomolecular Pump When securing the inlet port with bolts Refer to Table 2 for maximum predicted torque in any pump abnormality and for the recommended type of securing bolt for inlet port flange. Secure the inlet port flange with the correct size bolts as specified in the Inlet Port Flange Standard. Secure the base with either the 8 screws for legs or the 8 attached legs. -
Page 19: Example Of Securing The Stp Pump (When Securing The Inlet Port With Bolts)
STP-603/1003 Series Turbomolecular Pump (A) When the base is not secured (B) When the base is secured Recommended fitting bolt for flange Secure the base Figure 7 - Example of securing the STP pump (when securing the inlet port with bolts) MT-39E-101-F Page 13... -
Page 20: When Securing The Inlet Port Flange With Claw Clamps
STP-603/1003 Series Turbomolecular Pump When securing the inlet port flange with claw clamps Refer to Table 2 for rotational torque. When securing the inlet port flange with only the claw clamp, the vacuum equipment cannot withstand the maximum rotational torque generated by the worst-case failure. To make the vacuum equipment withstand abnormal torque, secure the base with either the 8 screws for legs or the 8 attached legs. -
Page 21: When Installing The Damper In The Inlet Port Flange
STP-603/1003 Series Turbomolecular Pump When installing the damper in the inlet port flange CAUTION Use a damper only at the vertically upright position. CAUTION DO NOT remove the bolts and nuts attached to reinforce the damper. Refer to Table 2 for rotational torque. When using a damper, secure the base with either the 8 screws for legs or the 8 attached legs. - Page 22 STP-603/1003 Series Turbomolecular Pump This page intentionally blank. MT-39E-101-F Page 16...
- Page 23 For more information, contact the nearest Service Office. Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8853 International +81-47-458-8853 Facsimile: Domestic 047-458-8048 International +81-47-458-8048 Copyright 2016 Edwards Japan Limited. All rights reserved.