Installation Of The Tms Unit; Connecting The Tms Connection Cable To The Stp Control Unit; Connecting The Pump And Tms Heater, Tms Sensor Cable, Tms Valve - Edwards STP Series Instruction Manual

3.6

Installation of the TMS unit

DO NOT install the TMS unit in places with high temperature, humidity, noise, vibration, or other
DO NOT apply force to the TMS unit and cables during installation and DO NOT bend the cables
Install the STP pump in the enclosure of the end equipment so as not to touch it directly.
3.6.1

Connecting the TMS connection cable to the STP control unit

1. When installing the distribution box, place and secure it near the STP pump (see Figure 11, for
the dimension of the TMS connection cable).
2. Insert the connector X5A of the TMS connection cable into the connector X5 of the STP control
unit. (see the "STP Control Unit Instruction Manual (C)" for the position of the connector X5.)
3.6.2

Connecting the pump and TMS heater, TMS sensor cable, TMS valve

Refer to Figure 10, "Configuration of the STP pump with the TMS" to connect the pump and TMS
heater, TMS sensor cable, TMS valve proceed as follows:
1. Wind the base part of the pump with the TMS heater, and secure the heater with the hooks.
2. Connect the TMS sensor cable to the connector of the temperature sensor in the base of the
pump.
3. Connect the cooling water pipe to the TMS valve. Pay special attention to the port label on the
cooling water valve to connect proper port. Connect the NC side (or OUT side) of the TMS valve
to the STP pump, and COM side (or IN side) of the TMS valve to the equipment.
Use cooling water under the conditions in Section 3.8, "Condition for the TMS unit".
Note: Procure and connect the cooling water pipe and affix the electromagnetic cooling water valve
at your site.
STP-A803/A1303 Series Turbomolecular Pump
CAUTION
unstable environment.
CAUTION
excessively.
CAUTION
3
MT-36E-101-I
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