Edwards STP Series Instruction Manual
Turbomolecular pumps
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MT-21E-AA2-D
Instruction Manual
STP Series Turbomolecular Pumps
TMS Unit for STP-301CVB3
(Second Edition - d)
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.
Read this Manual thoroughly and keep it with
the Turbomolecular Pump Instruction Manual.
September 2021
Copyright 2021 Edwards Japan Limited. All rights reserved. Printed in Japan.
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Summary of Contents for Edwards STP Series
- Page 1 Keep this Manual in a place where you can quickly access it at any time. Read this Manual thoroughly and keep it with the Turbomolecular Pump Instruction Manual. September 2021 Copyright 2021 Edwards Japan Limited. All rights reserved. Printed in Japan.
- Page 2 This page intentionally blank.
- Page 3 Safety Precautions as well as the general safety rules (your country’s laws, regulations, safety standards and so on). If the equipment is used in a manner not specified by Edwards, the protection provided by the equipment may be impaired. Symbols...
- Page 4 TMS Unit INSTRUCTION MANUAL for STP-301CVB3 ◇ The STP pump operates at high temperatures while the baking heater is in operation. NEVER touch the STP pump and its peripheral equipment while the baking heater is in operation. Operators can burn hands. ◇...
- Page 5 No part of this manual may be reproduced in any form by any means without prior written permission from Edwards. Edwards pursues a policy of continuing improvement in design and performance of this product. The right is, therefore, reserved to vary specifications and design without notice.
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Page 6: Limited Warranty
This WARRANTY applies to the customer to whom Edwards has delivered this product. The warranty period is stated in the Edwards Terms and Condition of Supply of Goods and Services, or during the period specified in the agreement made by and between the customer and Edwards. -
Page 7: Table Of Contents
TMS Unit INSTRUCTION MANUAL for STP-301CVB3 TABLE of CONTENTS SAFETY PRECAUTION INTRODUCTION LIMITED WARRANTY 1 Configuration .................. 1-1 2 Name and Function of Each Part ............ 2-1 TMS Control Unit ......................2-1 Remote Input/Output Signal Connector (“INTERFACE” Connector) ...... 2-3 2.1.1 3 Installation .................. - Page 8 TMS Unit INSTRUCTION MANUAL for STP-301CVB3 TABLES Table 2.1 Remote Input/Output Signal Connector ..............2-3 Table 2.2 Rated Contacts for Relays CR3 and 4 ..............2-4 Table 5.1 Recommended Spare Parts ................... 5-1 Table 6.1 Specifications of the TMS Unit ................6-1 Table 6.2 Accessories ......................
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Page 9: Configuration
TMS Unit INSTRUCTION MANUAL for STP-301CVB3 Configuration TMS control unit It controls the TMS heater and the TMS valve. ⚫ TMS heater (for base) It heats the base of the STP pump. ⚫ Controlling the heater stabilizes the STP pump’s temperature. A cable with connector is a standard accessory. - Page 10 This page intentionally blank.
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Page 11: Name And Function Of Each Part
TMS Unit INSTRUCTION MANUAL for STP-301CVB3 Name and Function of Each Part TMS Control Unit (1) "POWER IN" connector (J1) For input power source. (primary side, for TMS heater and TMS valve) ⚫ (2) "HEATER OUT" connector (J2) For TMS heater output. ⚫... -
Page 12: Figure 2.1 Tms Control Unit
TMS Unit INSTRUCTION MANUAL for STP-301CVB3 Figure 2.1 TMS Control Unit... -
Page 13: Remote Input/Output Signal Connector ("Interface" Connector)
TMS Unit INSTRUCTION MANUAL for STP-301CVB3 2.1.1 Remote Input/Output Signal Connector ("INTERFACE" Connector) Use it in accordance with Table 2.1 and Figure 2.3. This connector is of D-Sub 1 type (9-pins, pin type). The screw for connector is No.4-40UNC-2B. Five abbreviations are used in the following table: N.O: Normal Open, N.C: Normal Close,... -
Page 14: Figure 2.3 "Interface" Connector
TMS Unit INSTRUCTION MANUAL for STP-301CVB3 N.O: Normal Open N.C: Normal Close COM: Common "INTERFACE" connector IN： Input Terminal OUT: Output Terminal POWER ON state signal POWER output terminal N.O OUT ALARM state signal ALARM OUT N.O OUT output terminal N.C OUT START IN (0VDC) unused pin... -
Page 15: Installation
TMS Unit INSTRUCTION MANUAL for STP-301CVB3 Installation Read the "STP pump Instruction Manual" for the installation of the STP pump and STP control unit. Operating Environment Install the TMS unit in a place meeting the following requirements: Ambient temperature 0 to 40 °C Ambient relative humidity 30 to 95 % (no dew condensing) Other... -
Page 16: Installation For The Tms Heater
TMS Unit INSTRUCTION MANUAL for STP-301CVB3 3.2.2 Installation for the TMS Heater Wind the base part of the pump with the TMS heater. (See Figure 3.2) ◇ Wind the TMS heater around the surface of the STP pump tightly. If the TMS heater is not wound tightly, the loose parts will overheat. ◇... -
Page 17: Installation For The Tms Valve
TMS Unit INSTRUCTION MANUAL for STP-301CVB3 3.2.3 Installation for the TMS Valve ◇ DO NOT apply excessive force to the cable for TMS valve. ◇ Pay special attention to the port label (IN, NO, NC) on the TMS valve. Cooling water does not flow normally when the TMS valve is not connected to the apprpriate port. -
Page 18: Figure 3.3 Installation For The Tms Valve
TMS Unit INSTRUCTION MANUAL for STP-301CVB3 Figure 3.3 Installation for the TMS Valve... -
Page 19: Installation For The Tms Control Unit
TMS Unit INSTRUCTION MANUAL for STP-301CVB3 Installation for the TMS Control Unit TMS control unit can be install with two screws. Refer to Figure 6.1, "External Appearance of the TMS Control Unit" for the dimensions of installing hole. ◇ Tighten all installing screw. Doing so may result in product damage. ◇... -
Page 20: Cable Connection
TMS Unit INSTRUCTION MANUAL for STP-301CVB3 Cable Connection 3.4.1 Name and Dimensions of Each Cable Power source side pin Remark AC90 to 110 V (single phase) 50/60 Hz Ground Figure 3.4 External Dimensions of TMS Power Cable Figure 3.5 External Dimensions of TMS Sensor Cable 3.4.2 STP Pump and TMS Control Unit Connection See Figure 1.1, "TMS Unit Block Diagram", connect the pump and TMS control unit as... -
Page 21: Operation
TMS Unit INSTRUCTION MANUAL for STP-301CVB3 Operation Operation Start Input control power (15 VDC) to the "INTERFACE" connector of the TMS control unit. (6 pin: 0 VDC, 9 pin: 15 VDC) TMS control unit starts operation. Temperature Control Operation TMS valve and TMS heater is controlled by detected temperature of TMS sensor inside the base of pump. -
Page 22: Operation When Malfunction Occur
TMS Unit INSTRUCTION MANUAL for STP-301CVB3 Operation when malfunction occur ◇ TMS unit does not stop automatically when an abnormality/error is detected. It is recommended to establish a procedure so that equipments can stop when an abnormality/error occurs. High-temperature error It is detected that the temperature is +10°C or higher than the setting value due to a failure of the TMS valve. -
Page 23: Maintenance
TMS Unit INSTRUCTION MANUAL for STP-301CVB3 Maintenance ◇ Stop the STP pump, and remove TMS power cable, before performing maintenance of the TMS control unit (such as fuse replacement). DO NOT touch any place other those specified when performing maintenance or inspecting the TMS control unitl because it could cause shock, malfunction, or short circuit. - Page 24 This page intentionally blank.
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Page 25: Specifications Of The Tms Unit
TMS Unit INSTRUCTION MANUAL for STP-301CVB3 Specifications of the TMS Unit Specifications of the TMS Unit Table 6.1 Specifications of the TMS Unit Item Specification Setting temperature 60 °C Safety High-temperature error 70 °C or more function Low-temperature error 50 °C or lower Ambient temperature range 0 to 40 °C Storage temperature range... -
Page 26: Figure 6.1 External Appearance Of The Tms Control Unit
TMS Unit INSTRUCTION MANUAL for STP-301CVB3 Figure 6.1 External Appearance of the TMS Control Unit... -
Page 27: Specifications Of The Stp Pump
TMS Unit INSTRUCTION MANUAL for STP-301CVB3 Specifications of the STP Pump Specifications of the STP Pump Table 7.1 Specifications of the STP Pump Item Model name Inlet port ISO100 Flange size Outlet port KF40 Cooling water port (external diameter) 1/4 inch TMS setting temperature 60 °C Pumping speed... -
Page 28: Figure 7.1 External Appearance Of The Stp Pump
TMS Unit INSTRUCTION MANUAL for STP-301CVB3 Figure 7.1 External Appearance of the STP Pump... - Page 29 UNIT CONVERSION TABLE Length inch 1.00x10 39.4 0.01 10.0 0.394 1x10 39.4x10 0.10 25.4x10 2.54 25.4 Mass 1.00x10 2.20x10 1x10 2.20 0.454 Pressure kgf/cm Torr 7.50x10 1.02x10 1.36x10 9.81 x 10...
- Page 30 For more information, contact the nearest Service Office. http://www.edwardsvacuum.com/ Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8853 International +81-47-458-8853 Facsimile: Domestic 047-458-8048 International +81-47-458-8048 Copyright 2021 Edwards Japan Limited. All rights reserved.
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