Vacuum Piping Method - Edwards STP-XF803 Series Instruction Manual

Select a backing-pump in accordance with the capacity and starting method (simultaneous
starting, starting after generating roughing vacuum) suitable for the vacuum equipment you use.
5. Connect the STP pump and the backing-pump using stainless steel or aluminum alloy tubing,
flexible tubing, vacuum rubber or Teflon tubing, and other. The following measures can be used
to avoid the transmission of the vibration of the backing-pump to the STP pump and the vacuum
equipment:
• DO NOT place the backing-pump on the same floor as the vacuum equipment.
• Locate the backing-pump on a vibration-proof table. Attain 1/3 or less of the rotational speed of
the backing-pump, when adjusting the inherent frequency of the backing-pump installed on a
vibration-proof table.
• Attach a weight to the piping from the backing-pump, or secure the piping to a rigid, heavy
object free of vibration.
• Use a tube of high flexibility.
6. Depending upon the type of the backing-pump used, oil vapour may contaminate the inside of
the STP pump. Some oil viscosity could cause a malfunction when there is a strong reverse flow
of oil. Take the following measures to ensure the correct flow of oil:
• Attach a vacuum valve to the middle of the piping between the STP pump outlet port flange and
the backing-pump.
• Attach an absorption trap adjacent to the vacuum valve.
2.3.5

Vacuum piping method

1. Attach the inlet port to the high vacuum side.
(Refer to "TECHNICAL DATA" in the STP Pump Instruction Manual (B) for maximum working
pressure).
2. Attach the outlet port to the inlet port flange of the backing-pump (primary side pump).
(Refer to "TECHNICAL DATA" in the STP Pump Instruction Manual (B) for allowable backing
pressure).
Note: Maximum flow for water cooled and TMS unit are applicable under the condition listed in
"TECHNICAL DATA" and "TMS unit" in the STP Pump Instruction Manual (B).
Note: To attain the ultimate pressure, set the pressure at the outlet port flange to 1.3 Pa (10
or less. Refer to "TECHNICAL DATA" in the STP Pump Instruction Manual (B) for the
ultimate pressure.
STP Series Turbomolecular Pump
2
-2
Torr)
MT-00E-2A1-C
Page 25