Operation Principle Of The Stp Pump - Edwards STP-XF803 Series Instruction Manual
Turbomolecular pumps
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Also See for STP-XF803 Series:
- Instruction manual (45 pages) ,
- Instruction manual (37 pages)
Table of Contents
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1.7
Operation principle of the STP pump
The STP series pump is a series of a magnetically-levitated turbomolecular pumps, each with the
following features:
• Oil free
• Low vibration
• High reliability
7
1.
2.
3.
4.
STP Series Turbomolecular Pump
6
Rotor blade
Stator blade
Radial sensor
Radial electromagnet
Figure 10 - Cross sectional view of the STP pump
1
2
3
4
5
5.
Axial sensor
6.
Axial electromagnet
7.
Touch down bearing
1
MT-00E-2A1-C
Page 9
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