Technical Data; Stp Pump Specifications - Edwards STP-iS2207 Series Instruction Manual

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TECHNICAL DATA

2.1

STP pump specifications

The values shown below are typical. They are not guaranteed.
Item
Flange size Inlet port flange
Outlet port flange
Pumping speed N
Ar
H
Compression ratio Ar
H
Ultimate pressure
Allowable backing pressure
Rated speed
Backup rotational speed
Starting time
Stopping time
Noise
Baking temperature
Lubricating oil
Installation position
Cooling method
Mass
*2
Ambient temperature range
Storage temperature range
*1
A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.
*2 Mass is a value of state that the only standard accessory was installed (except the optional accessory).
STP-iS2207 Series Turbomolecular Pump
L/s
2
L/s
L/s
2
2
Pa (Torr)
Pa (Torr)
rpm
*1 rpm
min
min
dB
°C
kg
°C
°C
STP-iS2207 / STP-iS2207C
VG200 / ISO200F VG250 / ISO250F
ICF253
KF40
1,850
1,650
700
1×10 7
2.5×10 2
10 -6 (10 -8 ) [after baking]
200 (1.5)
36,500
Approximately 6,000
≦8
≦9
< 55 (at 36,500 rpm)
<120
Not necessary
Free
Water cooling
45
0 to 40
-25 to 55
ICF305
2,200
2,000
750
MT-89E-001-C
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