Edwards STP-XF813 Series Instruction Manual
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Instruction Manual (A)
STP Series Turbomolecular Pumps
Generic Instruction Manual
D
Applicable Models:
◼ STP-XF813/XF1313 series
STP pump consists of the four-volumed Instruction Manuals.
Instruction Manual (A):
(This Instruction Manual)
Instruction Manual (B):
Instruction Manual (C):
Instruction Manual (D):
STP pump generic Instruction Manual
STP pump specific information
STP control unit Instruction Manual
STC-U eTMS unit for Turbomolecular Pump
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
MT-00E-1C1-D
2023.08
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Table of Contents
Related Manuals for Edwards STP-XF813 Series
Summary of Contents for Edwards STP-XF813 Series
- Page 1 STP pump generic Instruction Manual (This Instruction Manual) Instruction Manual (B): STP pump specific information Instruction Manual (C): STP control unit Instruction Manual Instruction Manual (D): STC-U eTMS unit for Turbomolecular Pump 2023.08 Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
- Page 2 The description of this product consists of the four-volumed Instruction Manuals. Read through each Instruction Manual before operation. The separate volume contents of each description are as follows: Instruction Manual (A) • STP pump generic Instruction Manual: • Introduction • Installation of the STP pump •...
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Page 3: Table Of Contents
STP Series Turbomolecular Pump CONTENTS PAGE Section Title Page INTRODUCTION Scope and definitions Electromagnetic compatibility Limited warranty 1.3.1 Item warranted 1.3.2 Disclaimer 1.3.3 Spare parts Precautions for safe operation of the STP pump 1.4.1 Usable gases Maintenance and inspection precautions Labels Operation principle of the STP pump Temperature management system... -
Page 4: Title Page
STP Series Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page OPERATION Before starting the STP pump 4.1.1 Tuning 4.1.2 Operation of vacuum system Pump operation 4.2.1 LED indication during operation 4.2.2 Starting the STP pump after a safety function operates Gas pumping, cooling and baking the STP pump 4.3.1 Gas pumping... - Page 5 STP Series Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page STORAGE AND DISPOSAL Storage of the STP pump Disposal SERVICE, SPARES AND ACCESSORIES Introduction Service Spares Accessories MT-00E-1C1-D Page iii...
- Page 6 STP Series Turbomolecular Pump ILLUSTRATIONS PAGE Figure Title Page STP pump installation warning label Hot surface warning label Heavy product caution label Connector caution label Caution label TMS heater caution label Rotation instruction label Prohibition of gripping and pulling label Water cooling pipe connection caution label Overhaul enlightenment label Cross sectional view of the STP pump...
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Page 7: Introduction
INTRODUCTION Scope and definitions This manual provides installation, operation and maintenance instructions for the Edwards Turbomolecular Pump (abbreviated to "STP pump" throughout this manual). In this manual, the control unit for the turbomolecular pump is referred to as the "STP control unit". You must use the STP pump as specified in this manual otherwise the protection provided by the equipment may be impaired. -
Page 8: Electromagnetic Compatibility
This WARRANTY applies to the customer to whom Edwards has delivered this product. The warranty period is stated in the Edwards Terms and Condition of Supply of Goods and Services, or during the period specified in the agreement made by and between the customer and Edwards. -
Page 9: Disclaimer
STP Series Turbomolecular Pump 1.3.2 Disclaimer Edwards makes no warranty with respect to any damage occurred due to any of the following during the warranty period: Handling, operation or maintenance other than that specified herein. Failure to follow any of the warnings or cautions enumerated in this manual. -
Page 10: Precautions For Safe Operation Of The Stp Pump
1.4.1 Usable gases Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the following gases, contact Edwards. • Gases including alkaline metals except Li gas. • Gases including Ga, Hg, In, or Sn. • HBr gas. -
Page 11: Maintenance And Inspection Precautions
STP Series Turbomolecular Pump Maintenance and inspection precautions Perform any maintenance or inspection of the STP pump under the condition that no power is applied to the STP pump (refer to SEMI S2 Section 13.2 - type 1), following Section 6, "MAINTENANCE AND INSPECTION". -
Page 12: Heavy Product Caution Label
STP Series Turbomolecular Pump Heavy product caution label This label is affixed to the product with a weight of 18 kg or more. Follow the precautions of Section 2.2, "Unpacking" so as not to cause any accident during handling. Figure 3 - Heavy product caution label Connector caution label This label describes lock of the connector. -
Page 13: Tms Heater Caution Label
STP Series Turbomolecular Pump TMS heater caution label This label instructs operators so as not to remove the TMS heater from the STP pump. (only with TMS unit) Figure 6 - TMS heater caution label Rotational direction instruction label This label describes the rotational direction of the STP pump. The STP pump rotates in this direction. -
Page 14: Water Cooling Pipe Connection Caution Label
STP Series Turbomolecular Pump Water cooling pipe connection caution label This label describes installation of the water cooling pipe. Connect the water cooling pipe according to the precautions. Figure 9 - Water cooling pipe connection caution label 10. Overhaul warning label This label is for regular overhaul. -
Page 15: Operation Principle Of The Stp Pump
STP Series Turbomolecular Pump Operation principle of the STP pump The STP series pump is a series of a magnetically-levitated turbomolecular pumps, each with the following features: • Oil free • Low vibration • High reliability Rotor blade Axial sensor Stator blade Axial electromagnet Radial sensor... -
Page 16: Temperature Management System
STP Series Turbomolecular Pump The STP pump (Figure 11) is configured so that rotor blade (1) and stator blade (2) are aligned alternately in the axial direction. Gas molecules are pumped from the inlet port to the outlet port by the high speed rotation of the rotor. -
Page 17: Name Of The Stp Pump
STP Series Turbomolecular Pump Name of the STP pump 1. Inlet port flange 4. Outlet port flange 2. TMS sensor connector 5. STP connector 3. Cooling water port 6. Purge port Figure 12 - Configuration of the STP pump (typical pump model) MT-00E-1C1-D Page 11... - Page 18 STP Series Turbomolecular Pump Item Description Function Inlet port flange Connected to the vacuum equipment (at the high vacuum side). *1*2 TMS sensor connector A temperature sensor is attached for use with the TMS unit only. Cooling water port Connected to the STP pump cooling water pipe. This port is (water cooling unit) used when water cooling the STP pump or using the TMS unit.
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Page 19: Installation Of The Stp Pump
And, take measures according to MSDS to prevent an accident caused by exhaust gas. CAUTION If the STP pump is to be used in an area with radiation, contact Edwards. CAUTION Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the following gases, contact Edwards: •... - Page 20 • A place free of exposure to radiation. • No discharge of high voltage (more than 500 V) (If more than 500 V is discharged, contact Edwards). • A place at an altitude of 2,000 m or less. • A place indoors.
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Page 21: Installation Area
DO NOT bend the cables excessively and beware of any obstacles when installing the STP pump. In addition, leave enough space to install other cables without bending them excessively. Note: The L-type STP connection cable is also offered. Contact Edwards if necessary. MT-00E-1C1-D Page 15... -
Page 22: Bench
The bolt may not be able to be inserted from the lower side of the inlet port according to the shape of the inlet port flange. Note: When the external appearance of the STP pump is not in the manual, contact Edwards. MT-00E-1C1-D Page 16... -
Page 23: Unpacking
It is recommended to keep the packaging materials, such as the corrugated fiberboard container and cushioning material for possible reuse. If the STP pump is damaged, return it in its original package and contact Edwards or their distributor. WARNING The STP pumps are heavy products. Observe national laws/regulations, safety standards and manufacturers instructions when lifting the STP pump. -
Page 24: Example Of Lifting The Stp Pump (Horizontal Positioning)
STP Series Turbomolecular Pump When installing the STP pump horizontally using a crane or other appropriate, support pump casing, or pump base (see Figure 14). DO NOT apply face on convex parts, such as the outlet port or connectors by ropes. Doing so may the pump to fall, or deform and damage the parts. A crane due to lifting operations should withstand the load of five times or more the weight of the STP pump, and rope should be seven time or more. -
Page 25: Stp Pump With Eyebolts
STP Series Turbomolecular Pump When installing the STP pump to the vacuum equipment in upside-down position, lift the pump via eyebolts by installing eyebolts in leg screw holes (remove rubber legs if attached) or screw holes for attaching legs. (see Figure 16) A crane and eyebolts due to lifting operations should withstand the load of five times or more the weight of the STP pump, and rope should be seven time or more. -
Page 26: How To Install The Stp Pump
STP Series Turbomolecular Pump How to install the STP pump Install the STP pump to the vacuum equipment as shown in Figure 17. WARNING An appropriate enclosure or a barrier which cannot be removed without using a tool should be provided to prevent an operator from accessing the connection cables between the STP pump and its connectors provided. -
Page 27: Installation Of The Stp Pump To The Vacuum Equipment
STP Series Turbomolecular Pump 1. STP control unit 4. STP connection cable 7. Outlet port 8. (Vacuum valve) 2. Power cable 5. (Vacuum equipment) 3. TMS connection cable 6. Inlet port flange 9. (Backing-pump [dry pump, and other]) The STP pump can be installed through the damper (optional accessory). The TMS unit is an optional accessory. -
Page 28: Cleaning The Seal
Foreign materials falling into the STP pump through the splinter shield may result in product damage. Take care not to scratch the flange of the STP pump. Check whether or not there are scratches on the surface, before installing the STP pump. If unsatisfactory, contact Edwards. MT-00E-1C1-D Page 22... -
Page 29: Stp Pump Installation Positions
STP Series Turbomolecular Pump 2.3.2 STP pump installation positions The STP pump can be installed vertically, horizontally, upside-down and/or slanted. (Depending upon the pump model, the STP pump cannot be installed in some positions. Refer to "TECHNICAL DATA" in the STP Pump Instruction Manual (B).) Vacuum equipment 4. -
Page 30: Secure The Stp Pump
STP Series Turbomolecular Pump 2.3.3 Secure the STP pump WARNING The STP pump is provided with a high-speed rotor. Any internal abnormality/error may result in a jump in rotational torque leading to personal injury or peripheral equipment damage. The STP pump is provided with a high-speed rotor. The worst-case failure may result in a jump in rotational torque leading to personal injury or peripheral equipment damage. -
Page 31: Vacuum Piping Method
STP Series Turbomolecular Pump Select a backing-pump in accordance with the capacity and starting method (simultaneous starting, starting after generating roughing vacuum) suitable for the vacuum equipment you use. Connect the STP pump and the backing-pump using stainless steel or aluminum alloy tubing, flexible tubing, vacuum rubber or Teflon tubing, and other. -
Page 32: Connecting The Purge Port
STP Series Turbomolecular Pump 2.3.6 Connecting the purge port When pumping reactive or corrosive gas, gas including hydrogen, introduce a dry N gas or other gas into the STP pump in order to protect the inside of the STP pump. Introduce a dry N gas through the electromagnetic vent. -
Page 33: Attaching A Baking Heater
STP Series Turbomolecular Pump 2.3.8 Attaching a baking heater WARNING The surfaces of the STP pump and its peripheral equipment will become extremely hot when performing baking. NEVER touch them with bare hands. CAUTION DO NOT apply excessive force to the cable for the baking heater. CAUTION Wind the baking heater around the surface of the STP pump tightly. - Page 34 STP Series Turbomolecular Pump This page is intentionally blank. MT-00E-1C1-D Page 28...
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Page 35: Installation Of The Stp Control Unit
STP Series Turbomolecular Pump INSTALLATION OF THE STP CONTROL UNIT This section is extracted from the STP Control Unit Instruction Manual (C). The Applicable control unit differs depending upon the STP pump model. Refer to "TECHNICAL DATA" in the STP Pump Instruction Manual (B). -
Page 36: Scu-800/801
STP Series Turbomolecular Pump 3.1.2 SCU-800/801 X 7 R E M O T E X 3 A M A I N P O W E R (L1) S T P C O N T R O L U N I T POWER FAILURE REMOTE... -
Page 37: Scu-1600/1601
STP Series Turbomolecular Pump 3.1.3 SCU-1600/1601 STP CONTROL UNIT REMOTE POWER FAILURE TEMP CTRL RESET SELECT NORMAL X8 STP-LINK BRAKE ACCEL DOWN ENTER START STOP a) Front panel b) Rear panel Figure 24 - SCU-1600 a) Front panel b) Rear panel Figure 25 - SCU-1601 Note: Refer to the STP Control Unit Instruction Manual (C) for the functions of each switch and... -
Page 38: Cable Connection
STP Series Turbomolecular Pump Cable connection Refer to the STP Control Unit Instruction Manual (C) for detailed information of the cables. 3.2.1 STP connection cable Figure 26 - SCU-350 series STP connection cable Figure 27 - SCU-800/801 STP connection cable Figure 28 - SCU-1600/1601 STP connection cable MT-00E-1C1-D Page 32... -
Page 39: Power Cable
STP Series Turbomolecular Pump 3.2.2 Power cable Figure 29 - SCU-350 series power cable Figure 30 - SCU-800/801 power cable Figure 31 - SCU-1600/1601 power cable MT-00E-1C1-D Page 33... -
Page 40: How To Connect The Cables
CAUTION Use the STP connection cable and the power cable that Edwards has specified. The use of other cables may result in product damage. The STP connection cables and power cables differ depending upon the pump model. Refer to Section 3.2, "Cable connection"... - Page 41 STP Series Turbomolecular Pump CAUTION DO NOT place heavy objects on the cables or bend them excessively. Support each cable so as not to apply direct force to the connectors or terminals. If any problem occurs in cables, connectors or terminals, the STP pump may not function normally. DO NOT apply voltage to each connector pin and DO NOT cause any short-circuiting between pins.
- Page 42 STP Series Turbomolecular Pump This page is intentionally blank. MT-00E-1C1-D Page 36...
- Page 43 STP Series Turbomolecular Pump OPERATION This section is an extract from the STP Control Unit Instruction Manual (C). Read the STP Control Unit Instruction Manual (C) of carefully before operating the STP pump. Before starting the STP pump CAUTION NEVER connect or disconnect any cables while the power is ON. NEVER turn the primary power OFF (turn the MAIN POWER "OFF") while the STP pump is in rotation.
- Page 44 STP Series Turbomolecular Pump 4.1.2 Operation of vacuum system Starting backing-pump CAUTION DO NOT stop the backing-pump without closing the vacuum valve. Depending upon the type of the backing-pump, doing so may cause a reverse flow of oil, which could contaminate the inside of the STP pump.
- Page 45 CAUTION Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the following gases, contact Edwards: • Gases including alkaline metals except Li gas. • Gases including Ga, Hg, In, or Sn.
- Page 46 STP Series Turbomolecular Pump 4.3.2 How to introduce a purge gas CAUTION When pumping reactive or corrosive gas, gas including hydrogen, introduce a purge gas to protect the inside of the STP pump. Not to do so may result in product damage. Connect a needle valve or a similar part to the purge port and introduce a dry N gas or other gas to perform a gas purge (see Section 2.3.6, "Connecting the purge port").
- Page 47 STP Series Turbomolecular Pump 4.4.2 Air-cooling method When water-cooling is not available, use an air-cooling unit (optional accessory). Refer to the STP Pump Instruction Manual (B) for installation and other details. Note: The air-cooling unit is not available depending on the STP pump model. Refer to the STP Pump Instruction Manual (B) and confirm whether the air-cooling unit can be used for the STP pump.
- Page 48 STP Series Turbomolecular Pump How to use the TMS unit See the STP Pump Instruction Manual (B) for the installation method of the TMS unit. 4.6.1 Parameter set mode Before operating the TMS unit, set the "TMS Function" to "ENABLE". Setting can be performed in Parameter Set Mode.
- Page 49 STP Series Turbomolecular Pump SAFETY FUNCTIONS The STP pump is provided with safety functions for various abnormalities/errors. If an abnormality/error is found when using the STP pump, check it and take measures in accordance with the following procedures. If you cannot trace it or if the STP pump does not function normally after the troubleshooting in the STP Control Unit Instruction Manual (C), contact Service office.
- Page 50 STP Series Turbomolecular Pump 5.1.3 Abnormal state of magnetic bearing CAUTION When an abnormality/error occurs in the magnetic bearing, check the STP pump as well as the STP control unit. If "FAILURE" cannot be released after reset operation, contact Service office. When the magnetic bearing does not function normally due to a breakage of the STP connection cable, disconnection of connectors or any abnormality/error of the STP control circuit, the rotor lands on the touch down bearing and stops.
- Page 51 STP Series Turbomolecular Pump 5.1.7 Overheating inside the STP control unit The temperature in the STP control unit increases when the ventilating duct is blocked or the ambient temperature is high. The LCD displays error message "CAUTION: CNT heat*" when the inside of the STP control unit overheats.
- Page 52 STP Series Turbomolecular Pump This page is intentionally blank. MT-00E-1C1-D Page 46...
- Page 53 NEVER open any panel because it could cause shock, malfunction, or short circuit. Power OFF the peripheral equipments before performing maintenance and inspections. Only Edwards will replace the maintenance parts, and will execute repair and overhaul. Contact Service office.
- Page 54 • Clean off with a pure gas when dust has accumulated in the connector. • If the label of the STP pump has been damaged, contact Edwards. The decontamination (overhaul) in the STP pump is executed in Service office. When an overhaul is needed, contact Service office.
- Page 55 STP Series Turbomolecular Pump Maintenance 6.4.1 Recommended overhaul intervals If the STP pump has been used for a long time, accumulation of deposits and deterioration/failure of the parts may cause the pump to stop running or fail. To efficiently and safely use the STP pump, periodically conduct an overhaul. By referring to the overhaul intervals based on the pump conditions of use as shown in the table below, develop an overhaul plan.
- Page 56 STP Series Turbomolecular Pump 6.4.3 Recommended maintenance intervals for main parts Internal components of the STP pump will be damaged from gas load, heat, and corrosion when used long-term. Deterioration or abrasion of the main parts of the STP pump will cause unexpected failures.
- Page 57 Procedure". CAUTION When returning the STP pump to Edwards, be sure to pack it well to prevent external damage. If the "Return Procedure" has not been satisfied, Edwards will not be responsible for any troubles. Always contact Service office before returning the STP pump for repairs, overhaul, or other purposes.
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Page 59: Storage And Disposal
STP Series Turbomolecular Pump STORAGE AND DISPOSAL Storage of the STP pump When planning not to use the STP pump over a long period (more than a few months), follow the precautions below: Store the STP pump in a vertical position. Close the inlet port of the STP pump and vacuum it using a backing pump. -
Page 60: Disposal
Material Safety Data Sheet (MSDS) you obtain from the gas supplier. Dispose of the STP pump as industrial waste in accordance with all local and national safety and environmental standards. Note: Edwards will not be responsible for problems during or after disposal. MT-00E-1C1-D Page 54... -
Page 61: Service, Spares And Accessories
A majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, state for each part required: •... -
Page 62: Accessories
STP Series Turbomolecular Pump Accessories The following is a list of accessories that can be purchased by contacting Edwards. Items Application purpose Remarks Instruction Manual (A) Generic Instruction Manual This manual Instruction Manual (B) Pump Specific Information Instruction Manual (C) - Page 63 For more information, contact the nearest Service Office. http://www.edwardsvacuum.com/ Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8836 International +81-47-458-8836 Facsimile: Domestic 047-458-8835 International +81-47-458-8835 Copyright 2023 Edwards Japan Limited. All rights reserved.