Piping at the Inlet Port Flange
Attach the inlet port to the high vacuum side.
Maximum working pressure:
Pressure at the inlet port
flange applicable continuously
Piping at the Outlet Port Flange
Attach the outlet port to the inlet port flange of the backing pump (primary side
pump).
Allowable backing pressure:
Pressure at the outlet port
flange applicable continuously
◇ To attain the ultimate pressure shown in Table 13.1, "STP Pump specifications", set
the pressure at the outlet port flange to 1.3 Pa (10
4.3.5
Connecting the Ground Cable
Connect the ground cable (yellow/green) between the ground terminal of the STP pump and
the ground terminal of the STP control unit.
When the resistance between the ground terminals is lower than 0.1 ohms, it is not
necessary to connect the ground cable after installing the STP pump and the STP control
unit.
◇ When the resistance between the ground terminals is over 0.1 ohms, always
connect the ground cable.
◇ The ground terminal and inlet port of the STP pump in STP-L301/L451 series are
isolated by the insulator. Install the STP pump so as to establish a ground for the
inlet port. Doing so may result in electric shock.
STP-L301/L451 Series Instruction Manual
See Table 13.1, "Specifications of the STP Pump"
See Table 13.1, "Specifications of the STP Pump"
-2
Torr).
4-13