Connecting The Purge Port; Connecting The Water Cooling Pipe; Positions Of The Cooling Water Port And Baking Heater - Edwards STP Series Instruction Manual

2.3.6

Connecting the purge port

2
When pumping reactive or corrosive gases, introduce a dry N
order to protect the inside of the STP pump. Introduce a dry N
valve, needle valve or similar valve (must be prepared by the customer) from the purge port.
For instructions on how to introduce the purge gas, see Section 4.3.2.
Note: When not introducing the purge gas, close the purge port with the blank flange. Refer to
"TECHNICAL DATA" in the STP Pump Instruction Manual (B) for the position of a purge port.
2.3.7

Connecting the water cooling pipe

Secure the connection pipe to prevent water leakage and use cooling water under the conditions
provided in the STP Pump Instruction Manual (B). Install a secondly containment for liquids or a
water leak detector in the place (ex. cooling water ports) where cooling water may leak. Figure 15
shows the position of the cooling water ports. The STP pump in Figure 15 is a typical pump model.
Refer to the STP Pump Instruction Manual (B) for the configuration of each STP pump.
March 10
STP Series Turbomolecular Pump
1
2
1. Baking heater
Figure 15 - Positions of the cooling water port and baking heater
gas or other gas into the STP pump in
2
gas through the electromagnetic vent.
2
2. Cooling water port
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