Precautions For Safe Operation Of The Stp Pump; Usable Gases - Edwards STP-iS1607 Series Instruction Manual

1.4

Precautions for safe operation of the STP pump

1
1.4.1

Usable gases

1. Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the
following gases, contact Edwards.
• Gases including alkaline metals except Li gas.
• Gases including Ga, Hg, In, or Sn.
• HBr gas.
2. Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine
system gases.
To prevent an accident, confirm the characteristics of gases to be used, referring to the
Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep MSDS
NEVER use any gas that is not specified as usable in this Manual. The use of such gas may
Introduce a dry N
corrosive gas, gas including hydrogen. The use of these gases may result in product damage.
MT-94E-001-C
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STP-iS1607 Series Turbomolecular Pump
and a safety advice of gas supplier.
Warn of the danger of the gas with the warning label when the use gas is hazardous
Secure safety by wearing personal protective equipment when using the gas which
might influence damage health. In addition, take appropriate measure for depending
upon the properties of the gas to be used.
corrode the STP pump and damage it.
gas (purge gas) to protect the inside of the STP pump when using reactive or
2
WARNING
WARNING
chemical material.
WARNING
CAUTION
CAUTION