Installation Of The Stp Pump To The Vacuum Equipment - Edwards STP-XF803 Series Instruction Manual

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2
1. STP control unit
2. Power cable
3. TMS connection cable
*1
The STP pump can be installed through the damper (optional accessory).
*2
The TMS unit is an optional accessory. Refer to the STP Pump Instruction Manual (B) for more detailed information.
*3
The equipment and part within the parentheses must be prepared by the customer.
Figure 16 - Installation of the STP pump to the vacuum equipment
STP Series Turbomolecular Pump
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*2
3
4. STP connection cable
5. (Vacuum equipment)
6. Inlet port flange
*1
7. Outlet port
*3 8. (Vacuum valve)
9. (Backing-pump
[dry pump, and other])
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6
7
8
9
*3
*3
MT-00E-2A1-C
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