Edwards STP Series Instruction Manual
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Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual

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Instruction Manual (B)
STP Series Turbomolecular Pumps
STP-A803/A1303 Series
Pump Specific Information
Model name
STP-A803/A1303 series
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
Instruction Manual (B):
(This Instruction Manual)
Instruction Manual (C):
Voltage
200 - 240 Va.c.
STP pump generic Instruction Manual
STP pump specific information
STP control unit Instruction Manual
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
MT-36E-101-I
2023.08

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  • Page 1 STP pump consists of the three-volumed Instruction Manuals. Instruction Manual (A): STP pump generic Instruction Manual Instruction Manual (B): STP pump specific information (This Instruction Manual) Instruction Manual (C): STP control unit Instruction Manual 2023.08 Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
  • Page 2 Declaration of Conformity This declaration of conformity is issued under the sole responsibility of the manufacturer: Edwards Japan Limited Documentation Officer 1078-1,Yoshihashi, Jana Sigmunda 300 Yachiyo-shi Lutín , 78349 Chiba, 276-8523 Czech Republic Japan T: +42(0) 580 582 728 documentation@edwardsvacuum.com...
  • Page 3 -Oct-2022 You must retain the signed legal declaration for future reference This declaration becomes invalid if modifications are made to the product without prior agreement. Signed for and on behalf of Edwards Ltd Martin Tollner Petr Tochacek President, Semiconductor Chamber Solutions...
  • Page 4 ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION RoHS (EU, UK): Material Exemption Information This product is compliant with the following Exemptions Annex III: • 6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight • 6(c) Copper alloy containing up to 4% lead by weight •...
  • Page 5 材料成分声明 China Material Content Declaration 有害物质 Hazardous Substances 部件名称 六价铬 多溴联苯 多溴二苯醚 Part name 铅 汞 镉 Hexavalent Polybrominated Polybrominated Lead Mercury Cadmium Chromium biphenyls diphenyl ethers (Pb) (Hg) (Cd) (Cr VI) (PBB) (PBDE) 铸铝及铝合金制品 × 〇 〇 〇 〇 〇...
  • Page 6 The description of this product consists of the three-volumed Instruction Manuals. Read through each Instruction Manual before operation. The separate volume contents of each description are as follows: Instruction Manual (A) STP pump generic Instruction Manual: • Introduction • Installation of the STP pump •...

  • Page 7: Table Of Contents

    STP-A803/A1303 Series Turbomolecular Pump CONTENTS PAGE Section Title Page TECHNICAL DATA Applicable pump specifications 1.1.1 STP pump specifications 1.1.2 Condition for the water-cooling unit External appearance of the STP pump Label affixing positions Accessories HOW TO SECURE THE STP PUMP When securing the inlet port with bolts When securing the inlet port flange with claw clamps When installing the damper in the inlet port flange...
  • Page 8 STP-A803/A1303 Series Turbomolecular Pump ILLUSTRATIONS PAGE Figure Title Page STP-A803 series: ICF203/VG150 STP-A803 series: ISO160/ISO160F STP-A1303 series: ICF253/VG200 STP-A1303 series: ISO200/ISO200F Label affixing positions for the STP pump Example of securing the STP pump (when securing the inlet port with bolts) Shape of reduced diameter shank bolts Example of securing the STP pump (when securing the inlet port flange with claw clamps)

  • Page 9: Technical Data

    STP-A803/A1303 Series Turbomolecular Pump TECHNICAL DATA Applicable pump specifications Model Name Specification Applicable Control unit STP-A803/A1303 series Advanced high-throughput type SCU-800/801 Naming convention: • "C" following a pump model name indicates a corrosion resistant type (e.g. STP-A803C). • "CV" indicates an enhanced corrosion resistant type with TMS (e.g.

  • Page 10: Stp Pump Specifications

    STP-A803/A1303 Series Turbomolecular Pump 1.1.1 STP pump specifications The values shown below are typical. They are not guaranteed. Item A803 series A1303 series Flange size Inlet port flange ICF203/VG150/ ICF253/VG200/ ISO160K/ISO160F ISO200K/ISO200F Outlet port flange KF40 KF40 Pumping speed 1,300 Compression ratio >10 Ultimate pressure...

  • Page 11: Condition For The Water-Cooling Unit

    1,300 L/min) is used. When the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. Consult Edwards about conditions. *2 A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.

  • Page 12: External Appearance Of The Stp Pump

    STP-A803/A1303 Series Turbomolecular Pump External appearance of the STP pump (A) With original TMS sensor connecter (B) With alternative TMS sensor connecter Figure 1 - STP-A803 series: ICF203/VG150 MT-36E-101-I Page 4...
  • Page 13 STP-A803/A1303 Series Turbomolecular Pump Item Description Inlet port flange Inlet port flange Height of the purge port Bending dimension of the STP connection cable Temperature sensor connector Optional accessory Screw hole of legs depth 20 Cooling water port 2-Rc Outlet port flange STP connector Screw hole for legs 8-M12...
  • Page 14 STP-A803/A1303 Series Turbomolecular Pump (A) With original TMS sensor connecter (B) With alternative TMS sensor connecter Figure 2 - STP-A803 series: ISO160K/ISO160F MT-36E-101-I Page 6...
  • Page 15 STP-A803/A1303 Series Turbomolecular Pump Item Description Inlet port flange 160K Inlet port flange 160F Height of the purge port Bending dimension of the STP connection cable Temperature sensor connector Optional accessory Screw hole of legs depth 20 Cooling water port 2-Rc Outlet port flange STP connector...

  • Page 16: Stp-A1303 Series: Icf253/Vg200

    STP-A803/A1303 Series Turbomolecular Pump (A) With original TMS sensor connecter (B) With alternative TMS sensor connecter Figure 3 - STP-A1303 series: ICF253/VG200 MT-36E-101-I Page 8...
  • Page 17 STP-A803/A1303 Series Turbomolecular Pump Item Description Inlet port flange Inlet port flange Height of the purge port Bending dimension of the STP connection cable Temperature sensor connector Optional accessory Screw hole of legs depth 20 Cooling water port 2-Rc Outlet port flange STP connector Screw hole for legs 8-M12...
  • Page 18 STP-A803/A1303 Series Turbomolecular Pump (A) With original TMS sensor connecter (B) With alternative TMS sensor connecter Figure 4 - STP-A1303 series: ISO200K/ISO200F MT-36E-101-I Page 10...
  • Page 19 STP-A803/A1303 Series Turbomolecular Pump Item Description Inlet port flange 200K Inlet port flange 200F Height of the purge port Bending dimension of the STP connection cable Temperature sensor connector Optional accessory Screw hole of legs depth 20 Cooling water port 2-Rc Outlet port flange STP connector...

  • Page 20: Label Affixing Positions

    STP-A803/A1303 Series Turbomolecular Pump Label affixing positions Refer to the Instruction Manual (A) for the details of the labels 1 to 7. Figure 5 - Label affixing positions for the STP pump STP pump installation warning label Hot surface warning label Heavy product caution label Connector caution label STP pump/control unit caution label...

  • Page 21: Accessories

    STP-A803/A1303 Series Turbomolecular Pump Accessories Item Q’ty Remarks Inlet port cover Outlet port cover STP connector cover Blank flange for purge port KF10 Clamping ring for purge port KF10 O-ring washer for purge port KF10 4 legs are attached to the STP pump Rubber foot for leg Instruction Manual (B)
  • Page 22 STP-A803/A1303 Series Turbomolecular Pump This page is intentionally blank. MT-36E-101-I Page 14...

  • Page 23: How To Secure The Stp Pump

    Use a material that has a tensile strength of 600N/mm or more. When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more. Note: When using any securing method other than that specified in this manual, contact Edwards. MT-36E-101-I Page 15...

  • Page 24: When Securing The Inlet Port With Bolts

    STP-A803/A1303 Series Turbomolecular Pump When securing the inlet port with bolts Refer to Table 2 for the destructive torque and for the recommended type of securing bolt for inlet port flange. Secure the inlet port flange with the correct size bolts as specified in the Inlet Port Flange Standard. Reduced diameter shank bolts (R.D.S.B.) listed on Table 2 are more reinforced bolts over standard bolts by smoothing the portion to attach flange securing bolts to the respective face at the equipment side.

  • Page 25: Example Of Securing The Stp Pump

    STP-A803/A1303 Series Turbomolecular Pump (A) When the base is not secured (B) When the base is secured Recommended fitting bolt for flange Secure the base Figure 6 - Example of securing the STP pump (when securing the inlet port with bolts) MT-36E-101-I Page 17...

  • Page 26: Shape Of Reduced Diameter Shank Bolts

    STP-A803/A1303 Series Turbomolecular Pump Refer to Figure 7 for the shape of Reduced Diameter Shank Bolts (R.D.S.B.). ISO_F flange VG/ICF flange Vacuum equipment Clearance made by cantering Pump flange Figure 7 - Shape of reduced diameter shank bolts Use Table 3 in conjunction with. Ensure that the surface of the levelled and smoothed area (expressed by "D"...

  • Page 27: When Securing The Inlet Port Flange With Claw Clamps

    STP-A803/A1303 Series Turbomolecular Pump When securing the inlet port flange with claw clamps Refer to Table 2 for the destructive torque. When securing the inlet port flange with only the claw clamp, the vacuum equipment cannot withstand the destructive torque generated by the worst-case failure. To make the vacuum equipment withstand the destructive torque in pump abnormality, secure the base with either the 8 screws for legs or the 8 attached legs.

  • Page 28: When Installing The Damper In The Inlet Port Flange

    STP-A803/A1303 Series Turbomolecular Pump When installing the damper in the inlet port flange CAUTION Use a damper only at the vertically upright position. CAUTION DO NOT remove the bolts and nuts attached to reinforce the damper. Refer to Table 2 for the destructive torque. When using a damper, secure the base with either the 8 screw-holes for legs or the 8 attached legs.

  • Page 29: Temperature Management System (Tms)

    STP-A803/A1303 Series Turbomolecular Pump TEMPERATURE MANAGEMENT SYSTEM (TMS) WARNING The STP pump operates at high temperatures while the Temperature Management System (TMS) unit is in operation. NEVER touch the STP pump and its peripheral equipment while TMS unit are in operation. Operators can burn hands. The Temperature Management System (TMS) maintains the temperature of the turbomolecular pump by monitoring the temperature with temperature sensor in the base of the turbomolecular pump, and performing the TMS valve and TMS heater ON/OFF control.
  • Page 30 STP-A803/A1303 Series Turbomolecular Pump STP control unit 5. TMS sensor cable STP connection cable 6. TMS connection cable TMS heater 7. Power cable TMS valve Note: The shape of each part is an example. It varies according to types of pumps. MT-36E-101-I Page 22...

  • Page 31: Tms Connection Cable

    STP-A803/A1303 Series Turbomolecular Pump TMS connection cable The components of the TMS connection cables are as follows: (see Figure 11) Item Description Function Connector X5A For the STP control unit TC IN connector For the TMS sensor cable Fuse (F2) For protection of the TMS valve (0.5 A) CON2 COOLING VALVE OUT connector For the TMS valve...

  • Page 32: Tms Heater

    STP-A803/A1303 Series Turbomolecular Pump TMS heater The TMS heater heats the base of the STP pump. TMS heater connector Figure 12 - TMS heater Note: The shape of the TMS heater is an example. It varies according to types of pumps. TMS valve The TMS valve controls the cooling water in order to maintain a constant temperature inside the STP pump.

  • Page 33: Installation Of The Tms Unit

    STP-A803/A1303 Series Turbomolecular Pump Installation of the TMS unit CAUTION DO NOT install the TMS unit in places with high temperature, humidity, noise, vibration, or other unstable environment. CAUTION DO NOT apply force to the TMS unit and cables during installation and DO NOT bend the cables excessively.

  • Page 34: Connecting Tms Connection Cable To Stp Pump

    STP-A803/A1303 Series Turbomolecular Pump 3.6.3 Connecting TMS connection cable to STP pump Refer to Figure 10, "Configuration of the STP pump with the TMS". Connect the TMS connection cable to the STP pump as follows: 1. Loosen the screws on the metal fitting securing the connectors to the distribution box, and remove the metal fitting.

  • Page 35: Condition For The Tms Unit

    STP-A803/A1303 Series Turbomolecular Pump Condition for the TMS unit The values shown below are typical. They are not guaranteed. Item Condition Ambient temperature range °C 0 to 40 Storage temperature range °C -20 to 55 Input voltage 200 to 240 VAC ±10 Allowable input voltage fluctuation...
  • Page 36 STP-A803/A1303 Series Turbomolecular Pump This page is intentionally blank. MT-36E-101-I Page 28...
  • Page 37 For more information, contact the nearest Service Office. http://www.edwardsvacuum.com/ Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8836 International +81-47-458-8836 Facsimile: Domestic 047-458-8835 International +81-47-458-8835 Copyright 2023 Edwards Japan Limited. All rights reserved.

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