Installation Of The Stp Pump; Precautions Before Installation; Operating Environment - Edwards STP-iS2207 Series Instruction Manual

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INSTALLATION OF THE STP PUMP

3.1

Precautions before installation

Installation, operation and maintenance must only be executed by personnel who read through this
Manual carefully and have the specific skills to perform installation, operation and maintenance of the
STP pump.
3.1.1

Operating environment

To prevent an accident, confirm the characteristics of gases to be used, referring to
the Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep
Take measures according to MSDS to prevent an accident when using toxic,
reactive or combustible gases. Dilute the gas to be used with the inert gas controlled
if necessary. And, take measures according to MSDS to prevent an accident caused
Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the
• Gases including alkaline metals except Li gas.
• Gases including Ga, Hg, In, or Sn.
• HBr gas.
Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine system
STP-iS2207 Series Turbomolecular Pump
WARNING
MSDS and a safety advice of gas supplier.
WARNING
by exhaust gas.
CAUTION
following gases, contact Edwards:
gases.
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