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1.7
Operation principle of the STP pump
1
The STP series pump is a series of a magnetically-levitated turbomolecular pumps, each with the
following features:
• Oil free
• Low vibration
• High reliability
MT-00E-001-M
Page 8
STP Series Turbomolecular Pump
7
6
1.
Rotor blade
2.
Stator blade
3.
Radial sensor
4.
Radial electromagnet
Figure 8 - Cross sectional view of the STP pump
1
2
3
4
5
5.
Axial sensor
6.
Axial electromagnet
7.
Touch down bearing
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