Name And Function Of Each Part; Name And Function Of The Pump; Configuration Of The Stp Pump; Control Unit (Front Panel) - Edwards STP-iS1607 Series Instruction Manual

3.3

Name and function of each part

3.3.1

Name and function of the pump

The STP pump in Figure 16 is the STP-iS1607S. Refer to Section 2, "TECHNICAL DATA".
Item Description
1 Inlet port flange
2 Outlet port flange
3 Cooling water port
4 Control unit
5 Purge port
(only specification with
purge port)
6 Adapter plate (option)
STP-iS1607 Series Turbomolecular Pump
1
2
3
5
4
3
Figure 16 - Configuration of the STP pump
Connected to the vacuum equipment (at the high vacuum side).
Connected to the inlet port side of the backing-pump.
Connected to the STP pump cooling water pipe.
Contains the electronics that control the pump. Refer to Section
3.3.2, "Name and function of the control unit, for details.
Introduces a purge gas.
In order to protect the inside of the STP pump when pumping
reactive or corrosive gas, gas including hydrogen.
The bolt pitch on the bottom is compatible with STP-iXR1606.
Table 3 - Pump functions
6
6
Function
3
MT-94E-001-C
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