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STP-A2503 Series
Edwards STP-A2503 Series Manuals
Manuals and User Guides for Edwards STP-A2503 Series. We have
2
Edwards STP-A2503 Series manuals available for free PDF download: Instruction Manual
Edwards STP-A2503 Series Instruction Manual (59 pages)
STP Series Turbomolecular Pumps
Brand:
Edwards
| Category:
Water Pump
| Size: 1.34 MB
Table of Contents
Table of Contents
3
1 Introduction
7
Scope and Definitions
7
Applied Standards
8
Limited Warranty
8
Warranty Period
8
Item Warranted
8
Disclaimer
9
Spare Parts
9
Precautions for Safe Operation of the STP Pump
10
Usable Gases
10
Maintenance and Inspection Precautions
11
Labels
11
STP Pump Installation Warning Label
11
Hot Surface Warning Label
11
Heavy Product Caution Label
12
Connector Caution Label
12
Caution Label
12
TMS Heater Surface Caution Label
13
Rotation Instruction Label
13
Operation Principle of the STP Pump
14
Cross Sectional View of the STP Pump
14
Temperature Management System
15
Name of the STP Pump
16
Configuration of the STP Pump (Typical Pump Model)
16
2 Installation of the Stp Pump
19
Precautions before Installation
19
Operating Environment
19
Installation Area
20
Bench
21
Unpacking
22
Unpacking the STP Pump
22
Example of Lifting the STP Pump
22
Example of Lifting the STP Pump (Horizontal Positioning)
23
How to Install the STP Pump
24
Installation of the STP Pump to the Vacuum Equipment
25
Cleaning the Seal
26
STP Pump Installation Positions
27
Positions of the Outlet Port on the Horizontally
27
Secure the STP Pump
28
Precautions of Vacuum Piping
28
Vacuum Piping Method
29
Connecting the Purge Port
30
Connecting the Water Cooling Pipe
30
Positions of the Cooling Water Port and Baking Heater
30
Attaching a Baking Heater
31
Installation of the Air Cooling Unit
31
2.3.10 Installation of the TMS Unit
31
3 Installation of the Stp Control Unit
33
STP Control Unit
33
Scu-800
33
Scu-750
34
Scu-1400
34
Scu-1500
35
Scu-1600
35
Cable Connection
36
STP Connection Cable
36
SCU-1400/SCU-1500/SCU-1600 STP Connection Cable
36
SCU-750/SCU-800 STP Connection Cable
36
Power Cable
37
SCU-1400/SCU-1500/SCU-1600 Power Cable
37
SCU-750 Power Cable
37
SCU-800 Power Cable
37
How to Connect the Cables
38
4 Operation
41
Before Starting the STP Pump
41
Tuning
41
Operation of Vacuum System
42
Pump Operation
42
LED Indication During Operation
42
Starting the STP Pump after a Safety Function Operates
43
Gas Pumping, Cooling and Baking the STP Pump
43
Gas Pumping
43
How to Introduce a Purge Gas
44
Cooling the STP Pump
44
Water-Cooling Method
44
Air-Cooling Method
45
Baking the STP Pump
45
How to Use the TMS Unit
46
Parameter Set Mode
46
Starting/Stopping the TMS Unit
46
Temperature Control
46
5 Safety Functions
47
Power Failure
47
Operation after a Power Recovery
47
Abnormal State of Magnetic Bearing
48
Excessive Vibration
48
Motor Driver Overload
48
Overheating Inside the STP Pump
48
Overheating Inside the STP Control Unit
49
Overspeed
49
Abnormality/Error in the TMS Unit (for Use with the TMS Unit)
49
Failure of the Air-Cooling Fan (for SCU-800 Only)
49
6 Maintenance and Inspection
51
Cleaning
52
Inspecting the Deposit
52
Overhaul
53
Transporting for Repair or Overhaul
54
7 Storage and Disposal
55
Storage of the STP Pump
55
Disposal
56
Service, Spares and Accessories
57
Introduction
57
Spares
57
Accessories
58
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Edwards STP-A2503 Series Instruction Manual (63 pages)
Turbomolecular pumps
Brand:
Edwards
| Category:
Water Pump
| Size: 1.47 MB
Table of Contents
Table of Contents
3
Introduction
7
Scope and Definitions
7
Electromagnetic Compatibility
8
Limited Warranty
8
Item Warranted
8
Disclaimer
9
Spare Parts
9
Precautions for Safe Operation of the STP Pump
10
Usable Gases
10
STP Pump Installation Warning Label
11
Hot Surface Warning Label
11
Maintenance and Inspection Precautions
11
Labels
11
Heavy Product Caution Label
12
Connector Caution Label
12
Caution Label
12
TMS Heater Caution Label
13
Operation Principle of the STP Pump
14
Temperature Management System
15
Name of the STP Pump
16
Installation of the Stp Pump
19
Precautions before Installation
19
Operating Environment
19
Installation Area
21
Bench
22
Example of Lifting the STP Pump
23
Unpacking
23
Unpacking the STP Pump
23
Example of Lifting the STP Pump (Horizontal Positioning)
24
How to Install the STP Pump
26
Installation of the STP Pump to the Vacuum Equipment
27
Cleaning the Seal
28
Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump
29
STP Pump Installation Positions
29
Secure the STP Pump
30
Precautions of Vacuum Piping
30
Vacuum Piping Method
31
Positions of the Cooling Water Port and Baking Heater
32
Connecting the Purge Port
32
Connecting the Water Cooling Pipe
32
Attaching a Baking Heater
33
Installation of the Air Cooling Unit
33
2.3.10 Installation of the TMS Unit
33
Installation of the Stp Control Unit
35
STP Control Unit
35
SCU-350 Series
35
Scu-800/801
36
Scu-800
36
Scu-801
36
Scu-1600/1601
37
Scu-1601
37
Cable Connection
38
STP Connection Cable
38
Power Cable
39
How to Connect the Cables
40
Operation
43
Before Starting the STP Pump
43
Tuning
43
Operation of Vacuum System
44
Pump Operation
44
LED Indication During Operation
44
Starting the STP Pump after a Safety Function Operates
45
Gas Pumping, Cooling and Baking the STP Pump
45
Gas Pumping
45
How to Introduce a Purge Gas
46
Cooling the STP Pump
46
Water-Cooling Method
46
Air-Cooling Method
47
Baking the STP Pump
47
How to Use the TMS Unit
48
Parameter Set Mode
48
Starting/Stopping the TMS Unit
48
Temperature Control
48
Safety Functions
49
Power Failure
49
Operation after a Power Recovery
49
Abnormal State of Magnetic Bearing
50
Excessive Vibration
50
Motor Driver Overload
50
Overheating Inside the STP Pump
50
Overheating Inside the STP Control Unit
51
Overspeed
51
Abnormality/Error in the TMS Unit (for Use with the TMS Unit)
51
Failure of the Air-Cooling Fan (for SCU-800/801, SCU-1600/1601)
51
Maintenance and Inspection
53
Cleaning
54
Inspecting the Deposit
54
Maintenance
55
Recommended Overhaul Intervals
55
Standard Replacement Parts
55
Recommended Maintenance Intervals for Main Parts
56
Transporting for Repair or Overhaul
57
Storage and Disposal
59
Storage of the STP Pump
59
Disposal
60
Service, Spares and Accessories
61
Introduction
61
Service
61
Spares
61
Accessories
62
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