Page 1 Read through the Safety Precautions and each section of this Manual carefully before using the STP pump. Keep this Manual in a place where you can quickly access it at any time. July 2014 Copyright 2014 Edwards Japan Limited. All rights reserved. Printed in Japan.
Page 2 Note: This declaration covers all product serial numbers from the date this Declaration was signed onwards. Manufacture: July. 2013, Yachiyo Yuji Kato, TMP Technical Senior Manager, Edwards Japan Limited Date and Place August. 2013, Burgess Hill EU representative: Date and Place...
Page 3: Table Of Contents
STP-iXR1606 Turbomolecular Pump CONTENTS PAGE Section Title Page INTRODUCTION Scope and definitions Applied standards Limited warranty 1.3.1 Warranty period 1.3.2 Item warranted 1.3.3 Disclaimer 1.3.4 Spare parts Precautions for safe operation of the STP pump 1.4.1 Usable gases Maintenance and inspection precautions...
Page 4 STP-iXR1606 Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page Connecting to semiconductor equipment 3.9.1 Connecting to power 3.9.2 Emergency off circuit (EMO circuit) OPERATION Gas pumping, cooling and baking the STP pump 4.1.1 Gas pumping 4.1.2 How to introduce a purge gas Cooling the STP pump 4.2.1...
Page 5 STP-iXR1606 Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page 5.3.5 Transmission data format 5.3.6 Frame control (checksum) 5.3.7 Error control 5.3.8 Transmission frame in the RS485 multi-point connection 5.3.9 Control command in the RS485 multi-point connection 5.3.10 Query command in the RS485 multi-point connection 5.3.11...
Page 6 STP-iXR1606 Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page STP-LINK AND DISPLAY UNIT STP-Link Display unit SAFETY FUNCTIONS Safety functions 7.1.1 Power Failure 7.1.2 Operation after a power recovery 7.1.3 Abnormal state of magnetic bearing (Disturbance) 7.1.4 Excessive vibration (Disturbance) 7.1.5...
Page 7 STP-iXR1606 Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page STORAGE AND DISPOSAL Storage of the STP pump Disposal SERVICE, SPARES AND ACCESSORIES 10.1 Introduction 10.2 Service 10.3 Spares 10.4 Accessories MT-79E-001-D Page v...
Page 8 Heavy product caution label High voltage device caution label Rotation instruction label Cross sectional view of the STP pump External appearance of STP-iXR1606 Label affixing positions Space around the STP pump Example of lifting the STP pump Example of lifting the STP pump (horizontal positioning)
Page 9 STP-iXR1606 Turbomolecular Pump ILLUSTRATIONS (CONTINUED) PAGE Figure Title Page Display unit iDT-001 WARNING output Failure output MT-79E-001-D Page vii...
Page 10 STP-iXR1606 Turbomolecular Pump TABLES PAGE viii Table Title Page Environmental requirements for installation Eyebolt size Pump functions Control unit front panel functions Control unit front panel functions (continued) Tightening torque of bolt Maximum torque predicted and recommended securing bolt for inlet port flange...
Page 11: Introduction
The units used throughout this manual conform to the SI international system of units of measurement; US equivalent units of measurement are also given. The following IEC warning labels/symbols appear on the STP-iXR1606 Turbomolecular Pump and the STP Pump Instruction Manual: Warning - This symbol denotes general warning Refer to accompanying documentation and instruction manual.
Page 12: Applied Standards
- in homogeneous materials (subject to the exemptions allowed by the Directive). This information relates only to products sold on or after the date of this certificate. Edwards has taken all reasonable steps to confirm this statement, which is based mainly on information from our suppliers. Whilst the RoHS Directive does not legally apply to this vacuum equipment, we recognize that component compliance is relevant to many of our customers.
Page 13: Limited Warranty
This WARRANTY applies to the customer to whom Edwards has delivered this product. 1.3.1 Warranty period Edwards warrants this product against defects for a period of two (2) years from the date of delivery or during the period specified in the agreement made by and between the customer and Edwards. 1.3.2 Item warranted This warranty applies only to the product delivered from Edwards to the customer.
Page 14: Disclaimer
STP-iXR1606 Turbomolecular Pump 1.3.3 Disclaimer Edwards makes no warranty with respect to any damage occurred due to any of the following during the warranty period: 1. Handling, operation or maintenance other than that specified herein. 2. Failure to follow any of the warnings or cautions enumerated in this manual.
Page 15: Precautions For Safe Operation Of The Stp Pump
The use of these gases may result in product damage. CAUTION The STP-iXR1606 is non-corrosion resistant type. Therefore, the use of corrosive gases and active gases (radical gases) may damage Advanced Composite Materials (ACM) used in the part of rotor.
Page 16: Maintenance And Inspection Precautions
STP-iXR1606 Turbomolecular Pump Maintenance and inspection precautions Perform any maintenance or inspection of the STP pump under the condition that no power is applied to the STP pump (refer to SEMI S2 Section 13.2 - type 1), following Section 8, "MAINTENANCE AND INSPECTION".
Page 17: Heavy Product Caution Label
STP-iXR1606 Turbomolecular Pump Heavy product caution label This label is affixed to the product with a weight of 18 kg or more. Follow the precautions of Section 3.2, "Locate the STP pump" so as not to cause any accident during handling.
Page 18: Operation Principle Of The Stp Pump
Gas molecules are pumped from the inlet port to the outlet port by the high speed rotation of the rotor. The STP-iXR1606 pump is a magnetically-levitated turbomolecular pumps, each with the following features: 1. Oil free 2.
Page 19 STP-iXR1606 Turbomolecular Pump 1. Oil free Rotor blade (1) is supported by the magnetic bearing without mechanical contact. Therefore, the STP pump requires no lubrication oil unlike conventional turbomolecular pumps using ball bearings. 2. Low vibration The magnetic bearing consists of 5 pairs of active magnetic bearings. The rotor is supported in the radial direction by 4 pairs of radial direction active magnetic bearings that consist of radial sensor (3) and radial electromagnet (4).
Page 20: Stp Pump Specification
STP-iXR1606 The display unit iDT-001 is available as an optional accessory with the STP-iXR1606. The display unit operates the STP pump, confirms the pump status and sets various settings. (refer to Section 6.2 and the Instruction Manual of the "Display Unit iDT-001".)
Page 21: Technical Data
STP-iXR1606 Turbomolecular Pump TECHNICAL DATA STP pump specifications The values shown below are typical. They are not guaranteed. Item STP-iXR1606 Flange size Inlet port flange VG200 / VG250 VG150 / ISO160F ISO200F / ISO250F ICF203 ICF253 / ICF305 Outlet port flange...
Page 22: Maximum Gas Flow-Rate
For example, when the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards. Use the STP pump with purge ports (optional accessory) when introduce a purge gas. Refer to Section 3.6, "Introducing N2 gas (for the STP pump equipped with purge port) "...
Page 23: Water Cooling Use Condition
STP-iXR1606 Turbomolecular Pump Water cooling use condition Use cooling water which fulfills the following conditions. Item Specification Port type Rc 1/4 (Female) Flow rate L/min Water temperature °C 15 to 35 Water pressure MPa (kgf/cm 0.3 (3) Maximum grain size 0.03...
Page 24: Control Unit
STP-iXR1606 Turbomolecular Pump Control unit The values shown below are typical. They are not guaranteed. Item STP-iXR1606 Input voltage 200 to 240 Input power 750 maximum Input frequency 50/60 ± 2 Leakage current 2.0 maximum Input phase Single phase Main fuse specification...
Page 25 STP-iXR1606 Turbomolecular Pump Item STP-iXR1606 Safety function Electromagnetic bearing failure detection STP pump overheat detection Motor driver overload detection Power failure detection STP pump overspeed detection Control unit overheat detection Other failure detection MT-79E-001-D Page 15...
Page 26: External Appearance Of The Stp Pump
ISO160F ISO200F ISO250F ICF203 ICF253 ICF305 port flange φA φB φE 231.8 22.5º 22.5º 15º 22.5º 15º 15º 9 º 7.5º 5.625 º 8-φ12 8-φ15 12-φ15 8-φ11 12-φ11 12-φ11 20-φ8.4 24-φ8.4 32-φ8.4 Figure 7 - External appearance of STP-iXR1606 MT-79E-001-D Page 16...
Page 27: Label Affixing Positions
STP-iXR1606 Turbomolecular Pump Label affixing positions Refer to Section 1.6, "Labels" for the details of the labels 1 to 4. STP pump installation warning label Heavy product caution label High voltage device caution label Rotational direction instruction label Name plate...
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Page 29: Installation Of The Stp Pump
HBr gas. CAUTION The STP-iXR1606 is non-corrosion resistant type. Therefore, the use of corrosive gases and active gases (radical gases) may damage Advanced Composite Materials (ACM) used in the part of rotor. Note that the costs for repair of the product will be at the customer's own charge.
Page 30  A place free of exposure to radiation.  No discharge of high voltage (more than 500 V) (If more than 500 V is discharged, contact Edwards).  Others: An area free of exposure to direct sunlight, high humidity, salty air, explosive or flammable gas, corrosive gas, excessive vibration and sources of electric noise.
Page 31: Installation Area
STP-iXR1606 Turbomolecular Pump Table 1 - Environmental requirements for installation 3.1.2 Installation area Leave enough space for the followings in addition to that for the STP pump: (see Figure 9)  Space for maintenance and inspection.  Space for connecting cables.
Page 32: Bench
The bolt may not be able to be inserted from the lower side of the inlet port according to the shape of the inlet port flange. Note: When the external appearance of the STP pump is not in the manual, contact Edwards. 3.1.4 Insulation test DO NOT perform an insulation test on the control unit.
Page 33: Unpacking And Installation
It is recommended to keep the packaging materials, such as the corrugated fiberboard container and cushioning material for possible reuse. If the STP pump is damaged, return it in its original package and contact Edwards or their distributor. WARNING The STP pumps are heavy products. Observe national laws/regulations, safety standards and manufacturers instructions when lifting the STP pump.
Page 34: Example Of Lifting The Stp Pump (Horizontal Positioning)
STP-iXR1606 Turbomolecular Pump When installing the STP pump horizontally using a crane or other appropriate, support pump casing, pump base, or control unit (see Figure 11). DO NOT apply face on convex parts, such as the outlet port or connectors by ropes. Doing so may the pump to fall, or deform and damage the parts.
Page 35 STP-iXR1606 Turbomolecular Pump Use lifting devices when installing the STP pump under the equipment (see Figure 12). Moreover, when jacking up the bottom of the control unit, place the STP pump on the table which is larger than base size (see Figure 13). A device due to jacking up the STP pump should withstand the load of five times or more the weight of the STP pump.
Page 36: Stp Pump With Eyebolts
STP-iXR1606 Turbomolecular Pump When installing the STP pump to the vacuum equipment in upside-down position, the STP-iXR1606 can be loft with the eyebolts (M8) attached to the screw holes for securing the base. (see Figure 14) A crane and eyebolts due to lifting operations should withstand the load of five times or more the weight of the STP pump, and rope should be seven time or more.
Page 37: Name And Function Of Each Part
STP-iXR1606 Turbomolecular Pump Name and function of each part 3.3.1 Name and function of the pump The STP pump in Figure 15 is a typical pump model. Refer to Section 2, "TECHNICAL DATA". Figure 15 - Configuration of the STP pump...
Page 38: Name And Function Of The Control Unit
STP-iXR1606 Turbomolecular Pump 3.3.2 Name and function of the control unit Figure 16 shows the front panel of the control unit. WARNING A hazardous live voltage may exist at the connectors that are marked with the warning sign . DO NOT touch the connecter. Doing so may result in electric shock.
Page 39: Control Unit Front Panel Functions
STP-iXR1606 Turbomolecular Pump Item Description Function "POWER" LED (Green LED) Illuminates when 200 to 240 Va.c. is input to the connector X1 (Power ON state). Refer to Section 4.8, "LED”. "FAILURE" LED (Red/Orange LED) A failure of the STP pump is indicated by the flashing pattern of the red LED.
Page 40: Control Unit Front Panel Functions (Continued)
STP-iXR1606 Turbomolecular Pump Item Description Function "Error" LED (Red LED) Functions only when the Profibus (optional accessory) is equipped. ON at the same time as Offline LED = Configuration or parameterization error. Flashing at 1 Hz = Invalid address selected.
Page 41: How To Install The Stp Pump
STP-iXR1606 Turbomolecular Pump How to install the STP pump Install the STP pump to the inside of the vacuum equipment as shown in Figure 17. WARNING An appropriate enclosure or a barrier which cannot be removed without using a tool should be provided to prevent an operator from accessing the connection cables between the STP pump and its connectors provided.
Page 42: Cleaning The Seal
STP-iXR1606 Turbomolecular Pump 3.4.1 Cleaning the seal WARNING The wipes used to clean the flange of the pump might become hazardous waste depending upon the solvent (alcohol). Dispose of the contaminated wipes appropriately according to the regulations of each national and/or local government.
Page 43: Stp Pump Installation Positions
STP-iXR1606 Turbomolecular Pump 3.4.2 STP pump installation positions The STP pump can be installed vertically, horizontally, upside-down and/or slanted. Vacuum equipment 4. Slanted Upside-down 5. Vertical Horizontal Figure 18 - STP pump installation positions When installing the STP pump in a horizontal or slanted position, it is recommended to install it so that the direction of the outlet port is on a vertical or horizontal plane in the direction of the gravity.
Page 44: Secure The Stp Pump
When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more. The pump cannot be used with claw clamps fixed. Note: When using any securing method other than that specified in this manual, contact Edwards. MT-79E-001-D Page 34...
Page 45: Maximum Torque Predicted And Recommended Securing Bolt For Inlet Port Flange
STP-iXR1606 Turbomolecular Pump Pump model STP-iXR1606 ISO160F Flange type (with O-ring VG150 ICF203 ISO200F ISO250F groove Torque reduction Equipped Equipped Not Equipped Not Equipped Not Equipped mechanism Destructive Torque 20.7 20.7 27.7 27.7 27.7 [kNm] Base securing (4 positions) Shape...
Page 46 STP-iXR1606 Turbomolecular Pump The generated destructive torque depends on the presence of a torque reduction mechanism that can be built into the flange, according to the pump model and flange type. This mechanism, shown in Figure 20, is designed to absorb energy and also buffer the destructive torque.
Page 47 STP-iXR1606 Turbomolecular Pump Vacuum equipment Inlet port flange Washer Torque reduction mechanism Bolt insert position Figure 20 - Bolt position for securing the flange (i) When the base is (ii) When the base is secured not secured Recommended fitting bolt for flange...
Page 48: Legs For Securing The Base
STP-iXR1606 Turbomolecular Pump 3.4.4 Legs for securing the base CAUTION When securing the base, use stainless steel securing bolts with a tensile strength class is 70 or more. Figure 22 shows the position of the four screw holes for securing the base.
Page 49: Power Cable
STP-iXR1606 Turbomolecular Pump 3.4.5 Power cable WARNING Ensure that the electrical supply cable is suitably protected against earth (ground) faults and that the earth (ground) and "X1 AC POWER" is correctly connected. CAUTION The power cable is designed specifically for the STP pump. DO NOT use the power cable with other products.
Page 50 STP-iXR1606 Turbomolecular Pump Control unit side Power side (Primary) Black 1 or Brown M4-bolt (fixing screw) Black 2 or Blue Crimp-type terminal (M4) Yellow/Green Cover Clearance min. 1.5 mm Terminal block Use material flammability: UL 94V-0 Use the UL-recognized terminal block satisfying with the following conditions;...
Page 51: How To Connect The Power Cable
Moreover, an accident caused by water leaks or gas leak may occur. CAUTION Use the power cable that Edwards has specified. The use of other cables may result in product damage. CAUTION Confirm the power voltage on the label.
Page 52 STP-iXR1606 Turbomolecular Pump CAUTION DO NOT place heavy objects on the cables or bend them excessively. Support each cable so as not to apply direct force to the connectors or terminals. If any problem occurs in cables, connectors or terminals, the STP pump may not function normally. DO NOT apply voltage to each connector pin and DO NOT cause any short-circuiting between pins.
Page 53: Precautions Of Vacuum Piping
STP-iXR1606 Turbomolecular Pump Precautions of vacuum piping CAUTION DO NOT open the STP pump through the flange to atmospheric air while the STP pump is running. If atmospheric air flows into the STP pump, it may not function normally. Install the valve to isolate cooling water (Lockout/Tagout) at your company.
Page 54: Vacuum Piping Method
STP-iXR1606 Turbomolecular Pump 3.5.1 Vacuum piping method 1. Attach the inlet port to the high vacuum side. (Refer to Section 2.1, "STP pump specification" for maximum working pressure). 2. Attach the outlet port to the inlet port flange of the backing-pump (primary side pump).
Page 55: Connecting The Water Cooling Pipe
STP-iXR1606 Turbomolecular Pump Connecting the water cooling pipe Secure the connection pipe to prevent water leakage. The direction of cooling water (IN side / OUT side) is not specified. And, use cooling water under the conditions provided in Section 2.3, "Water cooling use condition".
Page 56: Attaching A Baking Heater
STP-iXR1606 Turbomolecular Pump Attaching a baking heater WARNING The surfaces of the STP pump and its peripheral equipment will become extremely hot when performing baking. NEVER touch them with bare hands. CAUTION DO NOT apply excessive force to the cable for the baking heater.
Page 57: Connecting To Semiconductor Equipment
STP-iXR1606 Turbomolecular Pump Connecting to semiconductor equipment The STP pump is a component system when installing to the semiconductor equipment. Consider the following when designing the semiconductor equipment. 3.9.1 Connecting to power The STP pump receives its power from the semiconductor equipment electrical distribution system via a circuit breaker (Rated current 10 A).
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Page 59: Operation
HBr gas. CAUTION The STP-iXR1606 is non-corrosion resistant type. Therefore, the use of corrosive gases and active gases (radical gases) may damage Advanced Composite Materials (ACM) used in the part of rotor. Note that the costs for repair of the product will be at the customer's own charge.
Page 60: How To Introduce A Purge Gas
STP-iXR1606 Turbomolecular Pump 4.1.2 How to introduce a purge gas CAUTION When pumping gases including hydrogen, introduce a purge gas to protect the inside of the STP pump. Not to do so may result in product damage. Connect a needle valve or a similar part to the purge port and introduce a dry N gas or other gas to perform a gas purge (see Section 3.6, "Connecting the purge port").
Page 61: Baking The Stp Pump
STP-iXR1606 Turbomolecular Pump Baking the STP pump WARNING The surfaces of the STP pump and its peripheral equipment will become extremely hot. Never touch them with bare hands. To attain a less pressure in a shorter time and reduce the exhaust time, bake the vacuum equipment and STP pump.
Page 62: Before Starting The Stp Pump
STP-iXR1606 Turbomolecular Pump Before starting the STP pump CAUTION NEVER connect or disconnect any cables while the power is ON. NEVER turn the primary power OFF (turn the MAIN POWER "OFF") while the STP pump is in rotation. DO NOT release the inlet port flange or outlet port flange into the atmosphere while the STP pump is rotating.
Page 63: Powering On
STP-iXR1606 Turbomolecular Pump Powering ON Turn "ON" the "MAIN POWER" switch on the control unit. If no error is found, the magnetic bearing functions and the rotor levitates (POWER ON state). The "POWER" LED illuminates in green (Levitation state). Pump operation 4.6.1...
Page 64: Starting/Stopping The Stp Pump
STP-iXR1606 Turbomolecular Pump 4.6.2 Starting/stopping the STP pump There are the methods of contact input for the starting/stopping operation with the parallel port. Method Starting the pump Stopping the pump 1) Short the circuit between (1)-(21). Open the circuit between (1)-(21).
Page 65: How To Start/Stop The Stp Pump
STP-iXR1606 Turbomolecular Pump How to start/stop the STP pump 4.7.1 Starting the STP pump after stopping Perform the start operation shown in Section 4.6.2, "Starting/stopping the STP pump". The STP pump can be reaccelerated even while it is stopping. 4.7.2 Starting the STP pump after a safety function operates A safety function operates when an abnormality/error occurs in the STP pump or peripheral equipment.
Page 66: Led
STP-iXR1606 Turbomolecular Pump Three LEDs indicate the pump’s operational state. Power on state Acceleration Deceleration Warning/ (Levitation state state Failure state state) POWER Steady green Steady green Steady green Steady green (green) (OFF only at power failure) ROTATION Extinguishes Green...
Page 67: Parallel Port Input/Output Signal
STP-iXR1606 Turbomolecular Pump Parallel port input/output signal The remote input/output signal connector "X2 REMOTE" is used for input/output remote signals (see Figure 31). This connector is of D-Sub (37 pins, socket type) type. The screw for connector is M2.6. Note: The connector (pin type) is not included.
Page 68: X2 Remote Input Signal Pins
STP-iXR1606 Turbomolecular Pump Description Pins for inputting the START signal. (21) The following two methods are available: 1） Short the circuits between (1)-(21). Then, short the circuits STOP IN START IN between (3)-(21) for 0.3 seconds or more. However, when inputting this START signal simultaneously with switching "ON"...
Page 69: X2 Remote Input Signal Pins (Continued)
STP-iXR1606 Turbomolecular Pump Description Pins for inputting the input operation port select signal. When the pins between (1)-(4) are short-circuited, the input operation port will be set to the parallel port automatically, and the input operation via the serial port is disabled.
Page 70: X2 Remote Input Signal Pins (Contact Input)
STP-iXR1606 Turbomolecular Pump A. In case of Start 1) B. In case of Start 2) Figure 32 - X2 REMOTE input signal pins (contact input) Note: 1 pin (0 V) is isolated from the frame ground. Note: The input current of remote input signal is approx. 5 mA. Make sure the minimum applicable load of the relay contact when the remote operation with the relay.
Page 71: Input Operation Port Setting
STP-iXR1606 Turbomolecular Pump 4.9.2 Input operation port setting Set the input operation port to the parallel port when operating the STP pump via the connector X2. The input operation port can be changed by "PORT SELECT IN" signal of the connector X2 and "Remote Operation Mode"...
Page 72: Rotation Inhibit Signal
STP-iXR1606 Turbomolecular Pump 4.9.3 Rotation INHIBIT signal When using rotation INHIBIT signal, short-circuit the "INHIBIT ENABLE IN" signal. Relations between rotation INHIBIT signal input and pump operation state are shown in Table 15. Signal input Pump operation ● The pump accelerates when the START...
Page 73: Second Speed Option
STP-iXR1606 Turbomolecular Pump 4.9.4 Second speed option When the second speed option is enabled, second rating speed can be set independently of the normal rating speed setting. The selection of the second rating speed and normal rating speed are operated from I/O remote input or serial communication port.
Page 74: Output Signal Pins
STP-iXR1606 Turbomolecular Pump 4.9.5 Output signal pins Table 17 and Figure 33. The pins function when the input operation port is either in parallel port setting or serial port setting. Three abbreviations are used in Table 17. N.O OUT: Normal Open Output Pin N.C OUT:...
Page 75: X2 Remote Output Signal Pins
STP-iXR1606 Turbomolecular Pump Description Pins for outputting the POWER ON state signal. (28) POWER These pins are closed when magnetic bearing functions and N.O OUT the rotor levitates. This output is opened at a power failure (10) (29) Pins for outputting the ACCELERATION state signal.
Page 76: X2 Remote Output Signal Pins
STP-iXR1606 Turbomolecular Pump Description Pins for optional signal output. (26) In state of the second speed option is "ENABLE", and second N.O OUT speed is selected, the pins are closed. Table 18 - X2 REMOTE output signal pins (continued) Figure 33 - X2 REMOTE output signal pins...
Page 77 STP-iXR1606 Turbomolecular Pump Table 19 shows the rated contacts for relays CR1 to CR8 in Figure 33. Resistance Load (COS Ø=1) Rated Load 30 V DC, 0.5 A Rated Current 0.5 A Maximum Contact Point Current 0.5 A Maximum Open/Close Capacity...
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Page 79: Serial Communication Protocol
SERIAL COMMUNICATION PROTOCOL Introduction STP-iXR1606 is provided with compliant serial RS232/RS485 interface. Prepare the user application according to this protocol procedure. Operation instructions and information, such as the running state and setting values of the STP pump can be set by the software.
Page 80: Connection And Setting Up
STP-iXR1606 Turbomolecular Pump Connection and setting up 5.2.1 Signal connection 1. Serial Port COM1 (X3 COM1 connector) The serial port COM1 is available for the serial communication via RS232 or RS485. When using a user application, connect it to this port.
Page 81 STP-iXR1606 Turbomolecular Pump Figure 35 - X3/X4 connector (D-Sub9) Note: The connectors X3 and X4 are fitted using M2.6 screws. The RS232 and RS485 share the X3 COM1 port. When connecting RS232, the length of the communication cable should be 15 m or less. When connecting RS485, refer to Section 5.2.2.
Page 82: Connecting The Rs485
1.2 km or less. • Connect the terminator to the communication devises at both ends of the transmission line. The terminator (120 Ω, 0.25 W) is required for connection. (STP-iXR1606 does not have terminator setting function) 7 (D–) (connector X3 120Ω...
Page 83: Communication Parameter Setting
STP-iXR1606 Turbomolecular Pump 5.2.3 Communication parameter setting The factory setting of COM1 and COM2 is shown in Table 21. To set communication parameters, use the STP-Link (optional accessory) or the display unit iDT-001 (optional accessory). Communication Factory setting PC setting example...
Page 84: Input Operation Port Setting
STP-iXR1606 Turbomolecular Pump 5.2.4 Input operation port setting Set the input operation port to the serial port when operating the STP pump via the serial port in accordance with the following procedures. 1. Open the "PORT SELECT IN" signal between (1)-(4) of the "X2 REMOTE" connector.
Page 85: Serial Communication Timeout Setting
STP-iXR1606 Turbomolecular Pump 5.2.5 Serial communication timeout setting If the signal to the input operation port of the STP pump is interrupted for a certain period during acceleration or normal operation, the STP pump detects a failure and stops. The time setting of the failure detection is user definable.
Page 86: Recommended Items About Communication Cable Installation
STP-iXR1606 Turbomolecular Pump 5.2.6 Recommended items about communication cable installation Noise generated by many factors such as the type or length of cable, communication speed, and different communication devices may cause the communication failure with a serial port. It is very difficult to prevent a communication failure completely.
Page 87 STP-iXR1606 Turbomolecular Pump  DO NOT bundle a communication line with a protective earth conductor or a power line. Moreover, keep away a communication line from the apparatus used as a noise source as much as possible.  As radio frequency noise measure, place a ferrite core on both ends of the communication cable.
Page 88 STP-iXR1606 Turbomolecular Pump  DO NOT insert or remove a communication cable while a communication device and a STP pump are turned ON the power. Communication interface circuit may break down if surge voltage caused by such as potential difference of communication interfaces or static electricity is applied to communication line.
Page 89: Protocol Specifications
STP-iXR1606 Turbomolecular Pump Protocol specifications 5.3.1 General description The STP serial communication protocol enables the SIM to receive the communication command transmitted from the PC and sends a response following the communication command (Figure 42-1). Each communication command from the PC transmits a text message (ASCII text) assigned to each function (Figure 42-2).
Page 90: Standard Transmission Frame (In The Rs232/Rs485 Single Point Connection)
STP-iXR1606 Turbomolecular Pump Table 24 shows ASCII characters being used in the transmission control, error control and handshake in the application layer. ASCII Function character code Transmission layer Transmission block start character Transmission frame end character Transmission block end character...
Page 91: (In The Rs232/Rs485 Single Point Connection)
STP-iXR1606 Turbomolecular Pump Transmission frame when a message exceeds 255 characters (n = 255, m<=255, k = the number of transmission blocks): First 5+n+1 5+n+2 Block ASCII Second 5+n+1 5+n+2 Block ASCII Final 5+m+1 5+m+2 Block ASCII "Stx" is used as a start character of each transmission block; "Etb" is used as an end character of the transmission block with a message of 255 characters;...
Page 92: Query Command
STP-iXR1606 Turbomolecular Pump Then the preceding SIM->PC character is "Ack", the instructed control command is executed and the SIM returns the following response. PC->SIM Ack or Nak SIM->PC Stx # or ! Etx LRC The PC transmits "Ack" or "Nak"; then transmits the next command if necessary.
Page 93: Transmission Data Format
STP-iXR1606 Turbomolecular Pump Parameter (from C to C ) serves as 16 bits signed hexadecimal value coded ASCII text. When a message (a space character, a function code, and parameter) exceeds 255 characters, input "?" and CHR to the top transmission block only (the first transmission block of the transmission frame). It is not necessary to input them to the 2nd and succeeding transmission blocks.
Page 94: Frame Control (Checksum)
STP-iXR1606 Turbomolecular Pump 5.3.6 Frame control (checksum) The transmission frame is controlled by the odd number parity check. First initialize LRC as FF Next calculate LRC by EXCLUSIVE-OR (XOR) of all the frame bytes containing "Stx", "Etb", "Etx" and LRC and transmit the result as LRC.
Page 95 STP-iXR1606 Turbomolecular Pump Examples: Network frame ID character and number in the multi-point connection ASCII Network frame No "1" ASCII Network frame No "100" ASCII Network frame No "127" The transmission frame has a single block or multiple transmission blocks. Each transmission block...
Page 96: Control Command In The Rs485 Multi-Point Connection
STP-iXR1606 Turbomolecular Pump 5.3.9 Control command in the RS485 multi-point connection The control command to be used when a pump operation instruction or a setting change instruction is transmitted to the SIM and is arranged in the order specified below. The top is "Sp" (space character, HEX code "20") and ASCII characters corresponding to the respective function code and parameter...
Page 97: 5.3.10 Query Command In The Rs485 Multi-Point Connection
STP-iXR1606 Turbomolecular Pump Next, the preceding SIM->PC character is "Ack", the PC continues instructing the control command (the 2nd block). PC->SIM @ F Stx 0 Etx LRC SIM->PC Ack or Nak Always assign less than 510 characters (n< 510) to the parameter so that the message is less than 512 characters.
Page 98: 5.3.11 Broadcasting Command In The Rs485 Multi-Point Connection
STP-iXR1606 Turbomolecular Pump Always assign less than 254 characters (n< 254) to the parameter so that the message is less than 256 characters. Next, the preceding SIM->PC character is "Ack", the instructed query command is executed and the SIM returns the following response (1st block).
Page 99: 5.3.12 Application Note
STP-iXR1606 Turbomolecular Pump 5.3.12 Application note Noise generated by many factors such as the type or length of cable, communication speed, and different communication devices may cause the communication failure with a serial port. It is very difficult to prevent a communication failure completely. The followings are the methods to create the tool application with redundancy to a noise etc.
Page 100: Example Of Answer Resending Process
STP-iXR1606 Turbomolecular Pump  Always check the LRC checksum of answer data. When LRC checksum is incorrect, do not use the data. When the incorrect data caused by noise is accepted, parameters might be set unexpected values. In this case, the processing of the tool application may determine to be a communication failure.
Page 101 STP-iXR1606 Turbomolecular Pump This procedure is not necessary Communication cycle start if TMP connection number = 1. RS485 multipoint connection? Address selection: First TMP Command sending process Succeeded? Answer receiving process Succeeded? Decode process Error process RS485 multipoint connection? Address selection:...
Page 102 STP-iXR1606 Turbomolecular Pump This procedure is not necessary if total block N = 1. Send command (N blocks) *1 When using RS485 to communicate, switch the PC side from sending state to receiving state within 5 sec. *2 When using RS485 multipoint connection, Block number: k = 1 also an address is incorrect.
Page 103: Command Specifications
STP-iXR1606 Turbomolecular Pump Command specifications 5.4.1 Command list Function Command/Query Name Function code ReadMeas Reads the measured rotational speed. Command Sends commands START, STOP, RESET (These commands are valid only when being sent to the serial port which is set as the input operation port.) ReadFailMess Reads the errors being detected.
Page 104: Readmeas
STP-iXR1606 Turbomolecular Pump 5.4.2 ReadMeas Function: Reads the measured rotational speed. Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx D Parameter 1 to 2 Etx LRC Parameter Item Data format Remarks [System reservation] 56-bits hexadecimal coded ASCII Measured rotational speed...
Page 105: Readfailmess
STP-iXR1606 Turbomolecular Pump Parameter Item Data format Remark Pump operation command 8-bits hexadecimal coded Refer to Table 27 ASCII Pump operation command Value START STOP RESET Table 27 - Pump operation commands Example: Pump operation command : RESET operation = 4 = 04...
Page 106 STP-iXR1606 Turbomolecular Pump Parameter Item Data format Remarks The number of error 8-bits hexadecimal Up to 80 errors coded ASCII 2 to 81 Error 1 8-bits hexadecimal coded ASCII … … Error 80 8-bits hexadecimal coded ASCII *1 The maximum number of errors may differ depending upon the software version of the STP pump. It is recommended that an application be designed as variable-length data.
Page 107: Error Message Values
STP-iXR1606 Turbomolecular Pump Error message Value Error message Value Ram Error AMB Com. Failure [System reservation] [System reservation] TMS Higher Temp TMS Sensor Lost [System reservation] [System reservation] [System reservation] [System reservation] Power Failure [System reservation] Power Supply Fail [System reservation]...
Page 108: Error Message Values (Continued)
STP-iXR1606 Turbomolecular Pump Error message Value Error message Value [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] Aberrant Brake [System reservation] Aberrant Accel [System reservation]...
Page 109: Readmodfonct
STP-iXR1606 Turbomolecular Pump 5.4.5 ReadModFonct Function: Reads the pump operation mode and the errors being detected. The data of errors being detected reads the same data as that of "ReadFailMess". Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx...
Page 110: Pump Operation Mode
STP-iXR1606 Turbomolecular Pump Pump operation mode Value Levitation No Levitation Acceleration Normal Deceleration (Brake) Autotest [System Reservation] [System Reservation] [System Reservation] [System Reservation] [System Reservation] Table 30 - Pump operation mode Example: Pump operation mode : 01 = 1 = Levitation...
Page 111: Readversion
STP-iXR1606 Turbomolecular Pump 5.4.6 ReadVersion Function: Read the software version. Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx Parameter 1 to 24 Etx LRC Parameter Item Data format Remarks 1 to 16 Control unit software version 8-bits hexadecimal...
Page 112: Readcounters
STP-iXR1606 Turbomolecular Pump 5.4.7 ReadCounters Function: Reads serial number, hour counter and start counter. Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx Parameter 1 to 23 Etx LRC Parameter Item Data format Remarks 1 to 10 Control unit serial number...
Page 113: Readsetpoint
STP-iXR1606 Turbomolecular Pump 5.4.8 ReadSetPoint Function: Reads the setting value of the "Speed Set Point" and TMS temperature. The "Speed Set Point" data is the same data as that of "ReadSpeedSetPoint". Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx...
Page 114: 5.4.10 Readstatus
STP-iXR1606 Turbomolecular Pump Parameter Item Data format Remark Motor temperature 16-bits hexadecimal (Unit: ºC) coded ASCII Example: Motor temperature : 0014 = 20 ºC (68 ºF) Parameter ASCII 30 30 31 34 5.4.10 ReadStatus Function: Reads various settings (Remote mode, TMS function, Emergency vent valve).
Page 115: 5.4.11 Readevents
STP-iXR1606 Turbomolecular Pump Remote mode Value I/O Remote (X2) COM1 (X3) COM2 (X4) COM3 (X5 STP-LINK) [System reservation] 3, 4 Table 31 - Remote mode Example: Remote mode setting : 01 = I/O Remote TMS function setting : 00 = ENABLE...
Page 116: 5.4.12 Setspeedsetpoint
STP-iXR1606 Turbomolecular Pump Parameter Item Data format Remarks The number of 8-bits hexadecimal Up to 10 errors "Error Record" coded ASCII 2 to 11 Error Record 1 to 8-bits hexadecimal Error Record 10 coded ASCII *1 Value corresponding to the error message is transmitted (refer to Table 28 and Table 29). The most recent error has the smallest parameter number.
Page 117: 5.4.13 Readspeedsetpoint
STP-iXR1606 Turbomolecular Pump Parameter Items Data format Remark Speed Set Point 16-bits hexadecimal (Unit: Hz) coded ASCII *1 When the value set to the parameter is larger than the upper limit, it is automatically set to the upper limit. When the value set to the parameter is smaller than the lower limit, it is automatically set to the lower limit.
Page 118: 5.4.14 Readmodfonctwithwarning
STP-iXR1606 Turbomolecular Pump 5.4.14 ReadModFonctWithWarning Function: Reads the pump operation mode, errors and warnings being detected. Transmission Frame: PC→SIM Stx Etx LRC SIM→PC PC→SIM SIM→PC Stx Parameter 1 to 82 Etx LRC Parameter Item Data format Remark Pump operation mode...
Page 119 STP-iXR1606 Turbomolecular Pump Warning message 16-bits hex value 0001 [System reservation] WARNING: Second Damage Limit 0002 WARNING: First Damage Limit 0004 WARNING: Imbalance X_H 0008 WARNING: Imbalance X_B 0010 WARNING: Imbalance Z 0020 WARNING: Pump Run Time Over 0040 WARNING: Pump Overload...
Page 120 STP-iXR1606 Turbomolecular Pump Example: Pump operation mode : 01 = 1 = Levitation WARNING being detected : 000C = 0004 OR 0080 "WARNING: First Damage Limit" and "WARNING: Imbalance X_H" The number of error : 02 = 2 errors Error 1...
Page 121: 5.4.15 Readmeasvalue
STP-iXR1606 Turbomolecular Pump 5.4.15 ReadMeasValue Function: Reads the TMS temperature, motor temperature, motor current, measured rotational speed, and control unit temperature. The motor temperature value is the same temperature as "ReadMotorTemp". The measured rotational speed value is the same as "ReadMeas" parameter 2 (Measured rotational speed).
Page 122 STP-iXR1606 Turbomolecular Pump Example: TMS temperature: 0046 = 70 ºC (158ºF) Motor temperature: 0014C = 20 ºC (68ºF) Motor current: = 2.5A Measured rotational speed: 01C2 = 450 Hz = 27,000 rpm Control unit temperature: 0032 = 50 °C Parameter...
Page 123: 5.4.16 Readoptionfunc
STP-iXR1606 Turbomolecular Pump 5.4.16 ReadOptionFunc Function: Reads the setting value of the input operation port, warning function, and serial communication time out. Transmission frame: PC→SIM Stx Etx LRC SIM→PC PC→SIM SIM→PC Stx Parameter 1 to 13 Etx LRC *1 The HEX code of ASCII character ' = ' is "3D".
Page 124 STP-iXR1606 Turbomolecular Pump Parameter Item Data format Remarks Serial communication time out 16-bits hexadecimal 60 sec. step setting (Unit: sec.) coded ASCII [System reservation] 88-bits hexadecimal coded ASCII Parameter Item Setting range I/O REMOTE (X2): Input operation port setting COM1 (X3):...
Page 125 STP-iXR1606 Turbomolecular Pump Example: Input operation port: = I/O REMOTE TMS Option: = DISABLE Second Damage Limit Option: = ENABLE First Damage Limit Warning: = ENABLE Pump Runtime Over Warning: = DISABLE Pump Runtime Over Warning hours: 000003E8 = 1,000 (×100 hours)
Page 126: 5.4.17 Setoptionfunc
STP-iXR1606 Turbomolecular Pump 5.4.17 SetOptionFunc Function: Changes the setting value of the input operation port, warning function, and serial communication time out. Transmission frame: PC->SIM Stx Parameter 1 to 13 Etx LRC SIM->PC PC->SIM SIM->PC Stx Etx LRC *1 The HEX code of ASCII character ' = ' is "3D".
Page 127 STP-iXR1606 Turbomolecular Pump Parameter Item Data format Remarks [System reservation] 88-bits hexadecimal coded ASCII *1 Valid only with TMS specification the parameter value Fhex or the reading data of ReadOptionFunc (?=) *2 Assign Refer to Table 33, "Parameter setting value" for each parameter setting value.
Page 128: 5.4.18 Readcondition
STP-iXR1606 Turbomolecular Pump 5.4.18 ReadCondition Function: Reads the pump model and damage point. Transmission frame: PC→SIM Stx Etx LRC SIM→PC PC→SIM SIM→PC Stx Parameter 1 to 4 Etx LRC *1 The HEX code of ASCII character ' { ' is "7B".
Page 129 STP-iXR1606 Turbomolecular Pump Example: Pump model: 5354502D6958523136303620202020202020202020 = STP-iXR1606 Damage point: = 50 Parameter "S" "T" "P" "–" "i" "X" "R" "1" "6" "0" ASCII 35 33 35 34 35 30 32 44 36 39 35 38 35 32 33 31 33 36 33 30 Parameter "6"...
Page 130: 5.4.19 Readeventswithtime
STP-iXR1606 Turbomolecular Pump 5.4.19 ReadEventsWithTime Function: Reads the "Error Record" with detection time. Transmission frame: PC→SIM Stx Etx LRC SIM→PC PC→SIM SIM→PC Stx Parameter 1 to 15 Etx LRC PC→SIM SIM→PC Stx Parameter 15 to 22 Etx LRC *1 The HEX code of ASCII character ' } ' is "7D".
Page 131 STP-iXR1606 Turbomolecular Pump 1. In case of time flag = 0 Parameter Item Data format Remarks Error Code 8-bits hexadecimal coded ASCII Time flag 8-bits hexadecimal coded ASCII Pump running time 32-bits hexadecimal Unit: minute coded ASCII Control unit running time...
Page 132 STP-iXR1606 Turbomolecular Pump Example: In case of Disturbance X_H detection at September 13, 2007 12: 34 Parameter ASCII 30 44 30 31 30 37 30 39 31 33 31 32 33 34 *3 System reservation Example: When 3 errors have been detected in the past;...
Page 133 STP-iXR1606 Turbomolecular Pump Parameter ASCII 46 46 30 30 30 30 30 30 30 30 30 30 30 30 Parameter ASCII 46 46 30 30 30 30 Parameter ASCII 46 46 30 30 30 30 30 30 30 30 30 30 30 30...
Page 134: 5.4.20 Setoptions
STP-iXR1606 Turbomolecular Pump 5.4.20 SetOptions Function: Changes the setting value of optional function. The parameter n depends on the optional function. Transmission frame: PC->SIM Stx Parameter 1 to n Etx LRC SIM->PC PC->SIM SIM->PC Stx Etx LRC Parameter Item Data format...
Page 135: 5.4.20.2 Second Speed Selection
STP-iXR1606 Turbomolecular Pump Example: : 0190hex = 400 Hz = 24000 rpm Second speed setting Second speed option setting : 0000hex = DISABLE Parameter ASCII 30 30 31 34 30 30 39 30 30 30 30 30 5.4.20.2 Second speed selection The normal rating speed setting or second rating speed setting can be selected in the normal state.
Page 136: 5.4.21 Readoptions
STP-iXR1606 Turbomolecular Pump 5.4.21 ReadOptions Function: Reads the setting value of optional function. The parameter n depends on the optional function. Transmission frame: PC->SIM Parameter 1 Etx LRC SIM->PC PC→SIM SIM→PC Stx Parameter 1 to n Etx LRC Parameter Item...
Page 137: 5.4.21.2 Second Speed Select
STP-iXR1606 Turbomolecular Pump Example: Second speed setting : 0190hex = 400 Hz = 24000 rpm Second speed option setting : 0000 = DISABLE : 0260hex = 608 Hz ≒ 36500 rpm (Normal rating speed setting) Selected speed value Parameter ASCII 30 30 31 34 30 31 39 30 30 30 30 30 30 32 36 30 5.4.21.2 Second speed select...
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Page 139: Stp-Link And Display Unit
STP-iXR1606 Turbomolecular Pump STP-LINK and DISPLAY UNIT The STP-Link (optional accessory) and the display unit iDT-001 (optional accessory) are available with the STP pump. STP-Link The "STP-Link" is a Windows application for operating the STP pump, confirming the pump status or setting various settings.
Page 140: Display Unit
STP-iXR1606 Turbomolecular Pump Display unit The "display unit" operates the STP pump, confirms the pump status or sets various settings. The display unit iDT-001 is equipped with an LCD and flat panel switches. See the Instruction Manual of the "Display unit iDT-001" for the detailed specification and operating methods.
Page 141: Safety Functions
STP-iXR1606 Turbomolecular Pump SAFETY FUNCTIONS The STP pump is provided with safety functions for various abnormalities/errors. When two or more warnings are detected simultaneously, a high-priority warning is indicated. Also, the warning signal is output from the "X2 REMOTE" connector. If an abnormality/error is found when using the STP pump,...
Page 142: Operation After A Power Recovery
STP-iXR1606 Turbomolecular Pump Table 37 shows the states of LED output and the "X2 REMOTE" output signals at a power failure. REMOTE output signal LEDs (REMOTE X2) Rotational Duration of speed power failure ALARM POWER FAILURE POWER N.O. N.C. 8,000 rpm or Approx.
Page 143: Abnormal State Of Magnetic Bearing (Disturbance)
STP-iXR1606 Turbomolecular Pump 7.1.3 Abnormal state of magnetic bearing (Disturbance) CAUTION When an abnormality/error occurs in the magnetic bearing, check the STP pump. If "FAILURE" cannot be released after reset operation, contact Service office. When the magnetic bearing does not function normally due to a breakage of the STP connection cable, disconnection of connectors or any abnormality/error of the STP control circuit, the rotor lands on the touch down bearing and stops.
Page 144: Overspeed
STP-iXR1606 Turbomolecular Pump 7.1.8 Overspeed When the rotational speed of the STP pump exceeds 38,000 rpm due to a failure in the motor driver, the STP pump changes into free-running and stops. The "FAILURE" LED (red) illuminates, and a failure signal is output from the "X2 REMOTE"...
Page 145 STP-iXR1606 Turbomolecular Pump ↓Warning detection "FAILURE" LED indication First Damage Limit Second Damage Limit (3 flashes in orange) Pump Run Time Over Pump Overload Corresponding to (2 flashes in orange) warning type Imbalance (1 flash in orange) 1 cycle X2 REMOTE output WARNING N.O OUT...
Page 146: Contents Of Warning Function
STP-iXR1606 Turbomolecular Pump Contents of WARNING function 7.3.1 First Damage limit Impact of the STP pump rotor onto the touch-down bearing, such as by an unexpected in-rush of air from outside or in the event of power failure, can damage the touch-down bearings. The STP pump monitors these impacts and assigns damage points to the event of "Disturbance"...
Page 147: Pump Overload
STP-iXR1606 Turbomolecular Pump 7.3.4 Pump Overload "Pump Overload" is displayed when the state that the motor current exceeding the setting value continues during the fixed time or the state that the STP pump rotational speed drops below the setting value continues during the fixed time. However, the motor current and the rotational speed are monitored only in the NORMAL state.
Page 148: Warning Function Setting
STP-iXR1606 Turbomolecular Pump WARNING function setting The WARNING functions can be set to Enable or Disable. Set to "ENABLE" when using the WARNING function. Set to "DISABLE" to release each WARNING function after the WARNING is detected. A setting value of the "Pump Run Time Over" and "Pump Overload" are adjustable. The WARNING detection can be released by setting the value larger than pump running hours after "Pump Run Time...
Page 149: Troubleshooting Immediately After Failure Occurs
STP-iXR1606 Turbomolecular Pump Troubleshooting immediately after failure occurs The STP pump is provided with safety functions for various abnormities/errors. A safety function operates when an abnormality/error occurs. The "FAILURE" LED illuminates or flashes. Also, the failure signal is output from the "X2 REMOTE" connector. If an abnormality/error is found when using the STP pump, check it and take measures in accordance with the following procedures.
Page 150: Troubleshooting
STP-iXR1606 Turbomolecular Pump Troubleshooting 7.6.1 Indication of "FAILURE" LED (red) The flashing pattern of the "FAILURE" LED (red) differs depending on the type of abnormality/error. When two or more failures are detected simultaneously, a high-priority failure is indicated. Also, the failure signal is output from the "X2 REMOTE"...
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Page 157: Indication Of "Failure" Led (Green)
STP-iXR1606 Turbomolecular Pump 7.6.2 Indication of "FAILURE" LED (green) If an abnormality/error is detected by self test during the power ON operation, "FAILURE" LED flashes green. This is the indication of STP pump or control unit failure. Contact Service Office.
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Page 159: Maintenance And Inspection
NEVER open any panel because it could cause shock, malfunction, or short circuit. Power OFF the peripheral equipments before performing maintenance and inspections. Only Edwards will replace the maintenance parts, and will execute repair and overhaul. Contact Service office.
Page 160: Cleaning
Contact with the atmosphere may cause a reaction of the deposit. DO NOT open the STP pump to the atmosphere. Edwards can supply a Temperature Management System (TMS) unit which will keep the temperature high inside the STP pump and prevent the accumulation of deposit. For details, contact Edwards. MT-79E-001-D Page 150...
Page 161: Maintenance
5 years No gases used (only vacuum pumping) Other use 2 years Dependent on application, contact Edwards. "Etching" includes semiconductor etching and LCD etching. Note: When "First Damage Limit" warning or "Second Damage Limit" warning is detected, it is essential to have the touch down bearings replaced regardless of the recommended overhaul intervals.
Page 162: Recommended Maintenance Intervals For Main Parts
STP-iXR1606 Turbomolecular Pump 8.4.3 Recommended maintenance intervals for main parts Internal components of the STP pump will be damaged from gas load, heat, and corrosion when used long-term. Deterioration or abrasion of the internal parts of the STP pump will cause unexpected failures.
Page 163: Transporting For Repair Or Overhaul
CAUTION When returning the STP pump to Edwards, be sure to pack it well to prevent external damage. If the "Return Procedure" has not been satisfied, Edwards will not be responsible for any troubles. Always contact Service office before returning the STP pump for repairs, overhaul, or other purposes.
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Page 165: Storage And Disposal
STP-iXR1606 Turbomolecular Pump STORAGE AND DISPOSAL Storage of the STP pump When planning not to use the STP pump over a long period (more than a few months), follow the precautions below: 1. Store the STP pump in a vertical position.
Page 166: Disposal
Dispose of the STP pump as industrial waste in accordance with all local and national safety and environmental standards. Note: Edwards will not be responsible for problems during or after disposal. MT-79E-001-D Page 156...
Page 167: Service, Spares And Accessories
A majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, state for each part required: ...
Page 168: Accessories
STP-iXR1606 Turbomolecular Pump 10.4 Accessories The following is a list of accessories that can be purchased by contacting Edwards. Items Application purpose Remarks Instruction Manual STP Pump Instruction Manual This manual Supplied with STP pump Power cable Primary input power Standard cable length is 5 m.
Page 169 For more information, contact the nearest Service Office. Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8853 International +81-47-458-8853 Facsimile: Domestic 047-458-8048 International +81-47-458-8048 Copyright 2014 Edwards Japan Limited. All rights reserved.

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