3.1.2
Installation area
Leave enough space for the followings in addition to that for the STP pump: (see Figure 10)
• Space for maintenance and inspection.
• Space for connecting cables.
DO NOT bend the power cable excessively and beware of any obstacles when installing the STP
pump. In addition, leave enough space to install other cables without bending them excessively.
STP-iS1607 Series Turbomolecular Pump
CAUTION
Side view
Figure 10 - Space around the STP pump
3
MT-94E-001-C
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