Installation Of The Stp Pump; Precautions Before Installation; Operating Environment - Edwards STP-XF803 Series Instruction Manual

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INSTALLATION OF THE STP PUMP

2.1

Precautions before installation

2.1.1

Operating environment

To prevent an accident, confirm the characteristics of gases to be used, referring to
the Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep
Take measures according to MSDS to prevent an accident when using toxic,
reactive or combustible gases. Dilute the gas to be used with the inert gas controlled
if necessary. And, take measures according to MSDS to prevent an accident caused
If the STP pump is to be used in an area with radiation, contact Edwards.
Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the
•
Gases including alkaline metals except Li gas.
•
Gases including Ga, Hg, In, or Sn.
•
HBr gas.
Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine system
STP Series Turbomolecular Pump
WARNING
MSDS and a safety advice of gas supplier.
WARNING
by exhaust gas.
CAUTION
CAUTION
following gases, contact Edwards:
gases.
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MT-00E-2A1-C
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