3.1.2
SCU-800/801
3
MT-00E-2A1-C
Page 30
STP Series Turbomolecular Pump
S T P C O N T R O L U N I T
POWER
FAILURE
REMOTE
TEMP CTRL
R E S E T
U P
NORMAL
X8 STP-LINK
ACCEL.
BRAKE
D O W N
S T A R T
S T O P
a) Front panel
Figure 21 - SCU-800
a) Front panel
Figure 22 - SCU-801
ON
OFF
M A I N P O W E R
PE
L
(L1)
N
ON
(L2)
F2 4A(F)
X2
S ELECT
E N T E R
AC POWER !
b) Rear panel
b) Rear panel
X 7 R E M O T E
!
X6
X 3 A
F1 4A(F)
X5 TMS
!
X 3 B
X 3 B