Page 1 Read through the Safety Precautions and each section of this Manual carefully before using the STP pump. Keep this Manual in a place where you can quickly access it at any time. Copyright 2016 Edwards Japan Limited. All rights reserved. Printed in Japan.
Page 3: Table Of Contents
STP-iS2207 Series Turbomolecular Pump CONTENTS PAGE Section Title Page INTRODUCTION Scope and definitions Applied standards Limited warranty 1.3.1 Warranty period 1.3.2 Item warranted 1.3.3 Disclaimer 1.3.4 Spare parts Precautions for safe operation of the STP pump 1.4.1 Usable gases Maintenance and inspection precautions...
Page 4 STP-iS2207 Series Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page Connecting to semiconductor equipment 3.9.1 Connecting to power 3.9.2 Emergency off circuit (EMO circuit) OPERATION Gas pumping, cooling and baking the STP pump 4.1.1 Gas pumping 4.1.2 How to introduce a purge gas Cooling the STP pump 4.2.1...
Page 5 STP-iS2207 Series Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page 5.3.7 Error control 5.3.8 Transmission frame in the RS485 multi-point connection 5.3.9 Control command in the RS485 multi-point connection 5.3.10 Query command in the RS485 multi-point connection 5.3.11 Broadcasting command in the RS485 multi-point connection 5.3.12...
Page 6 STP-iS2207 Series Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page STP-LINK AND DISPLAY UNIT STP-Link Display unit SAFETY FUNCTIONS Safety functions 7.1.1 Power Failure 7.1.2 Operation after a power recovery 7.1.3 Abnormal state of magnetic bearing (Disturbance) 7.1.4 Excessive vibration (Disturbance) 7.1.5...
Page 7 STP-iS2207 Series Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page STORAGE AND DISPOSAL Storage of the STP pump Disposal SERVICE, SPARES AND ACCESSORIES 10.1 Introduction 10.2 Service 10.3 Spares 10.4 Accessories MT-89E-001-C Page v...
Page 8 STP-iS2207 Series Turbomolecular Pump ILLUSTRATIONS PAGE Figure Title Page STP pump installation warning label Hot surface warning label Heavy product caution label High voltage device caution label Rotation instruction label Cross sectional view of the STP pump External appearance of STP-iS2207...
Page 9 STP-iS2207 Series Turbomolecular Pump ILLUSTRATIONS (CONTINUED) PAGE Figure Title Page Display unit iDT-001 WARNING output Failure output MT-89E-001-C Page vii...
Page 10 STP-iS2207 Series Turbomolecular Pump TABLES PAGE viii Table Title Page Environmental requirements for installation Eye nut size Pump functions Control unit front panel functions Control unit front panel functions (continued) Tightening torque of bolt Maximum torque predicted and recommended securing bolt...
Page 11: Introduction
The units used throughout this manual conform to the SI international system of units of measurement; US equivalent units of measurement are also given. The following IEC warning labels/symbols appear on the STP-iS2207 series Turbomolecular Pump and the STP Pump Instruction Manual: Warning - This symbol denotes general warning Refer to accompanying documentation and instruction manual.
Page 12: Applied Standards
- in homogeneous materials (subject to the exemptions allowed by the Directive). This information relates only to products sold on or after the date of this certificate. Edwards has taken all reasonable steps to confirm this statement, which is based mainly on information from our suppliers. Whilst the RoHS Directive does not legally apply to this vacuum equipment, we recognize that component compliance is relevant to many of our customers.
Page 13: Limited Warranty
This WARRANTY applies to the customer to whom Edwards has delivered this product. 1.3.1 Warranty period Edwards warrants this product against defects for a period of two (2) years from the date of delivery or during the period specified in the agreement made by and between the customer and Edwards. 1.3.2 Item warranted This warranty applies only to the product delivered from Edwards to the customer.
Page 14: Disclaimer
STP-iS2207 Series Turbomolecular Pump 1.3.3 Disclaimer Edwards makes no warranty with respect to any damage occurred due to any of the following during the warranty period: Handling, operation or maintenance other than that specified herein. Failure to follow any of the warnings or cautions enumerated in this manual.
Page 15: Precautions For Safe Operation Of The Stp Pump
STP-iS2207 Series Turbomolecular Pump Precautions for safe operation of the STP pump 1.4.1 Usable gases Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the following gases, contact Edwards. Gases including alkaline metals except Li gas.
Page 16: Maintenance And Inspection Precautions
STP-iS2207 Series Turbomolecular Pump Maintenance and inspection precautions Perform any maintenance or inspection of the STP pump under the condition that no power is applied to the STP pump (refer to SEMI S2 Section 13.2 - type 1), following Section 8, "MAINTENANCE AND INSPECTION".
Page 17: Heavy Product Caution Label
STP-iS2207 Series Turbomolecular Pump Heavy product caution label This label is affixed to the product with a weight of 18 kg or more. Follow the precautions of Section 3.2, "Unpacking and installation" so as not to cause any accident during handling.
Page 18: Operation Principle Of The Stp Pump
Gas molecules are pumped from the inlet port to the outlet port by the high speed rotation of the rotor. The STP-iS2207 series pump is a magnetically-levitated turbomolecular pumps, each with the following features: Oil free...
Page 19 STP-iS2207 Series Turbomolecular Pump Oil free Rotor blade (1) is supported by the magnetic bearing without mechanical contact. Therefore, the STP pump requires no lubrication oil unlike conventional turbomolecular pumps using ball bearings. Low vibration The magnetic bearing consists of 5 pairs of active magnetic bearings. The rotor is supported in the radial direction by 4 pairs of radial direction active magnetic bearings that consist of radial sensor (3) and radial electromagnet (4).
Page 20: Stp Pump Specification
(e.g. STP-iS2207C) Corrosion resistant: STP pump with anti-corrosive treatment. The display unit iDT-001 is available as an optional accessory with the STP-iS2207 series. The display unit operates the STP pump, confirms the pump status and sets various settings. (refer to Section 6.2 and the Instruction Manual of the "Display Unit iDT-001".)
Page 21: Technical Data
STP-iS2207 Series Turbomolecular Pump TECHNICAL DATA STP pump specifications The values shown below are typical. They are not guaranteed. Item STP-iS2207 / STP-iS2207C Flange size Inlet port flange VG200 / ISO200F VG250 / ISO250F ICF253 ICF305 Outlet port flange KF40...
Page 22: Maximum Gas Flow-Rate
For example, when the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards. Use the STP pump with purge ports (optional accessory) when introduce a purge gas. Refer to Section 3.6, "Introducing N2 gas (for the STP pump equipped with purge port) "...
Page 23: Water Cooling Use Condition
STP-iS2207 Series Turbomolecular Pump Water cooling use condition Use cooling water which fulfills the following conditions. Item Specification Port type Rc 1/4 (Female) Flow rate L/min Water temperature °C 15 to 35 Water pressure MPa (kgf/cm 0.3 (3) Maximum grain size 0.03...
Page 24: Control Unit
STP-iS2207 Series Turbomolecular Pump Control unit The values shown below are typical. They are not guaranteed. Item STP-iS2207 / STP-iS2207C Input voltage 200 to 240 Input power 750 maximum Input frequency 50/60 ± 2 Leakage current 2.0 maximum Input phase...
Page 25 STP-iS2207 Series Turbomolecular Pump Item STP-iS2207 / STP-iS2207C Safety function Electromagnetic bearing failure detection STP pump overheat detection Motor driver overload detection Power failure detection STP pump overspeed detection Control unit overheat detection Other failure detection MT-89E-001-C Page 15...
Page 26: External Appearance Of The Stp Pump
STP-iS2207 Series Turbomolecular Pump External appearance of the STP pump Item Description Center of gravity Height of water cooling port Rc1/4 Control unit Outlet port flange KF40 Screw hole for securing the 4-M8 base Depth 20 Inlet VG200 VG250 ISO200F ISO250F...
Page 27: External Appearance Of Stp-Is2207C
STP-iS2207 Series Turbomolecular Pump Item Description Center of gravity Height of water cooling port Rc1/4 Control unit Outlet port flange KF40 Screw hole for securing the 4-M8 base Depth 20 Purge port KF10 Inlet VG200 VG250 ISO200F ISO250F ICF253 ICF305 port flange φ...
Page 28: Label Affixing Positions
STP-iS2207 Series Turbomolecular Pump Label affixing positions Refer to Section 1.6, "Labels" for the details of the labels 1 to 4. STP pump installation warning label Heavy product caution label High voltage device caution label Rotational direction instruction label Name plate...
Page 29: Installation Of The Stp Pump
STP-iS2207 Series Turbomolecular Pump INSTALLATION OF THE STP PUMP Precautions before installation Installation, operation and maintenance must only be executed by personnel who read through this Manual carefully and have the specific skills to perform installation, operation and maintenance of the STP pump.
Page 30 STP-iS2207 Series Turbomolecular Pump The STP pump should be installed in an area which meets the following requirements: Ambient temperature 0 to 40 °C (32 to 104 °F) Ambient relative humidity 30 to 95% (no dew condensing) Environment An area free of externally applied mechanical shock.
Page 31: Installation Area
STP-iS2207 Series Turbomolecular Pump 3.1.2 Installation area Leave enough space for the followings in addition to that for the STP pump: (see Figure 10) Space for maintenance and inspection. Space for connecting cables. CAUTION DO NOT bend the power cable excessively and beware of any obstacles when installing the STP pump.
Page 32: Bench
The bolt may not be able to be inserted from the lower side of the inlet port according to the shape of the inlet port flange. Note: When the external appearance of the STP pump is not in the manual, contact Edwards. 3.1.4 Insulation test DO NOT perform an insulation test on the control unit.
Page 33: Unpacking And Installation
Unpacking and installation Check outer package for damage and that the delivery note corresponds to the purchase order. If the STP pump is damaged, contact Edwards or their distributor. Note: It is recommended to keep the packaging materials, such as the corrugated fiberboard container and cushioning material for possible reuse.
Page 34: Example Of Lifting The Stp Pump (Horizontal Positioning)
STP-iS2207 Series Turbomolecular Pump When installing the STP pump horizontally using a crane or other appropriate, support pump casing, pump base, or control unit (see Figure 12). DO NOT apply face on convex parts, such as the outlet port or connectors by ropes. Doing so may the pump to fall, or deform and damage the parts.
Page 35 STP-iS2207 Series Turbomolecular Pump Use lifting devices when installing the STP pump under the equipment (see Figure 13). Moreover, when jacking up the bottom of the control unit, place the STP pump on the table which is larger than base size (see Figure 14). A device due to jacking up the STP pump should withstand the load of five times or more the weight of the STP pump.
Page 36: Stp Pump With Eyebolts
STP-iS2207 Series Turbomolecular Pump When installing the STP pump to the vacuum equipment in upside-down position, the STP-iS2207 series can be loft with the eyebolts (M8) attached to the screw holes for securing the base. (see Figure 15) A crane and eyebolts due to lifting operations should withstand the load of five times or more the weight of the STP pump, and rope should be seven time or more.
Page 37: Name And Function Of Each Part
STP-iS2207 Series Turbomolecular Pump Name and function of each part 3.3.1 Name and function of the pump The STP pump in Figure 16 is a typical pump model. Refer to Section 2, "TECHNICAL DATA". Figure 16 - Configuration of the STP pump...
Page 38: Name And Function Of The Control Unit
STP-iS2207 Series Turbomolecular Pump 3.3.2 Name and function of the control unit Figure 17 shows the front panel of the control unit. WARNING A hazardous live voltage may exist at the connectors that are marked with the warning sign . DO NOT touch the connecter. Doing so may result in electric shock.
Page 39 STP-iS2207 Series Turbomolecular Pump Standard specification Profibus specification "POWER" LED "REMOTE" connector (X2) "Error" LED "FAILURE" LED "COM1" connector (X3) 10 "AC POWER" connector (X1) "ROTATION" LED "Data" LED 11 "MAIN POWER" switch "STP-LINK" connector (X5) "Off-Line" LED Figure 17 - Control unit (Front panel) Note: Refer to Table 4, Table 5 for front panel functions.
Page 40: Control Unit Front Panel Functions
STP-iS2207 Series Turbomolecular Pump orange LED. The flashing pattern indicates the warning type. Refer to Section 7.2, "WARNING Function". "ROTATION" LED (Green/Orange LED) The rotational speed is indicated by the flashing pattern of the LED (acceleration state: green, deceleration state: orange). Refer to Section 4.8, "LED".
Page 41: Control Unit Front Panel Functions (Continued)
STP-iS2207 Series Turbomolecular Pump Item Description Function "Error" LED (Red LED) Installed only when the Profibus (optional accessory) is equipped. ON at the same time as Offline LED = Configuration or parameterization error. Flashing at 1 Hz = Invalid address selected.
Page 42: How To Install The Stp Pump
STP-iS2207 Series Turbomolecular Pump How to install the STP pump Install the STP pump to the inside of the vacuum equipment as shown in Figure 18. WARNING An appropriate enclosure or a barrier which cannot be removed without using a tool should be provided to prevent an operator from accessing the connection cables between the STP pump and its connectors provided.
Page 43: Cleaning The Seal
STP-iS2207 Series Turbomolecular Pump 3.4.1 Cleaning the seal WARNING The wipes used to clean the flange of the pump might become hazardous waste depending upon the solvent (alcohol). Dispose of the contaminated wipes appropriately according to the regulations of each national and/or local government.
Page 44: Stp Pump Installation Positions
STP-iS2207 Series Turbomolecular Pump 3.4.2 STP pump installation positions The STP pump can be installed vertically, horizontally, upside-down and/or slanted. Vacuum equipment 4. Slanted Upside-down 5. Vertical Horizontal Figure 19 - STP pump installation positions When installing the STP pump in a horizontal or slanted position, it is recommended to install it so that the direction of the outlet port is on a vertical or horizontal plane in the direction of the gravity.
Page 45: Secure The Stp Pump
When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more. The pump cannot be used with claw clamps fixed. Note: When using any securing method other than that specified in this manual, contact Edwards. MT-89E-001-C Page 35...
Page 46: Maximum Torque Predicted And Recommended Securing Bolt
STP-iS2207 Series Turbomolecular Pump Pump model STP-iS2207 / STP-iS2207C Flange type ISO200F ISO250F VG200 VG250 Torque reduction Not Equipped Not Equipped Not Equipped Not Equipped mechanism Destructive Torque 40.7 40.7 40.7 40.7 [kNm] Base securing (4 positions) Shape Standard Standard...
Page 47 STP-iS2207 Series Turbomolecular Pump The generated destructive torque depends on the presence of a torque reduction mechanism that can be built into the flange, according to the pump model and flange type. This mechanism, shown in Figure 21, is designed to absorb energy and also buffer the destructive torque.
Page 48 STP-iS2207 Series Turbomolecular Pump Vacuum equipment Inlet port flange Washer Torque reduction mechanism Bolt insert position Figure 21 - Bolt position for securing the flange (i) When the base is (ii) When the base is secured not secured Recommended fitting bolt for flange...
Page 49: Legs For Securing The Base
STP-iS2207 Series Turbomolecular Pump 3.4.4 Legs for securing the base CAUTION When securing the base, use stainless steel securing bolts with a tensile strength class is 70 or more. Figure 23 shows the position of the four screw holes for securing the base.
Page 50: Power Cable
STP-iS2207 Series Turbomolecular Pump 3.4.5 Power cable WARNING Ensure that the electrical supply cable is suitably protected against earth (ground) faults and that the earth (ground) and "X1 AC POWER" is correctly connected. In addition, always lock it with the fixed metal fittings attached to the connector.
Page 51 STP-iS2207 Series Turbomolecular Pump Control unit side Power side (Primary) Black 1 M4-bolt (fixing screw) Black 2 Crimp-type terminal (M4) Yellow/Green Cover Clearance min. 1.5 mm Terminal block Use material flammability: UL 94V-0 Use the UL-recognized terminal block satisfying with the following conditions;...
Page 52: How To Connect The Power Cable
Moreover, an accident caused by water leaks or gas leak may occur. CAUTION Use the power cable that Edwards has specified. The use of other cables may result in product damage. CAUTION Confirm the power voltage on the label.
Page 53 STP-iS2207 Series Turbomolecular Pump CAUTION DO NOT place heavy objects on the cables or bend them excessively. Support each cable so as not to apply direct force to the connectors or terminals. If any problem occurs in cables, connectors or terminals, the STP pump may not function normally. DO NOT apply voltage to each connector pin and DO NOT cause any short-circuiting between pins.
Page 54: Precautions Of Vacuum Piping
STP-iS2207 Series Turbomolecular Pump Precautions of vacuum piping CAUTION DO NOT open the STP pump through the flange to atmospheric air while the STP pump is running. If atmospheric air flows into the STP pump, it may not function normally.
Page 55: Vacuum Piping Method
STP-iS2207 Series Turbomolecular Pump 3.5.1 Vacuum piping method 1. Attach the inlet port to the high vacuum side. (Refer to Section 2.1, "STP pump specification" for maximum working pressure). 2. Attach the outlet port to the inlet port flange of the backing-pump (primary side pump).
Page 56: Connecting The Water Cooling Pipe
STP-iS2207 Series Turbomolecular Pump Connecting the water cooling pipe Secure the connection pipe to prevent water leakage. The direction of cooling water (IN side / OUT side) is not specified. And, use cooling water under the conditions provided in Section 2.3, "Water cooling use condition".
Page 57: Attaching A Baking Heater
STP-iS2207 Series Turbomolecular Pump Attaching a baking heater WARNING The surfaces of the STP pump and its peripheral equipment will become extremely hot when performing baking. NEVER touch them with bare hands. CAUTION DO NOT apply excessive force to the cable for the baking heater.
Page 58: Connecting To Semiconductor Equipment
STP-iS2207 Series Turbomolecular Pump Connecting to semiconductor equipment The STP pump is a component system when installing to the semiconductor equipment. Consider the following when designing the semiconductor equipment. 3.9.1 Connecting to power The STP pump receives its power from the semiconductor equipment electrical distribution system via a circuit breaker (Rated current 10 A).
Page 59: Operation
STP-iS2207 Series Turbomolecular Pump OPERATION Gas pumping, cooling and baking the STP pump Installation, operation and maintenance must only be executed by personnel who read through this Manual carefully and have the specific skills to perform installation, operation and maintenance of the STP pump.
Page 60: How To Introduce A Purge Gas
STP-iS2207 Series Turbomolecular Pump 4.1.2 How to introduce a purge gas CAUTION When pumping reactive or corrosive gas, gas including hydrogen, introduce a purge gas to protect the inside of the STP pump. Not to do so may result in product damage.
Page 61: Baking The Stp Pump
STP-iS2207 Series Turbomolecular Pump Baking the STP pump WARNING The surfaces of the STP pump and its peripheral equipment will become extremely hot. Never touch them with bare hands. To attain a less pressure in a shorter time and reduce the exhaust time, bake the vacuum equipment and STP pump.
Page 62: Before Starting The Stp Pump
STP-iS2207 Series Turbomolecular Pump Before starting the STP pump CAUTION NEVER connect or disconnect any cables while the power is ON. NEVER turn the primary power OFF (turn the MAIN POWER "OFF") while the STP pump is in rotation. DO NOT release the inlet port flange or outlet port flange into the atmosphere while the STP pump is rotating.
Page 63: Powering On
STP-iS2207 Series Turbomolecular Pump Powering ON Turn "ON" the "MAIN POWER" switch on the control unit. If no error is found, the magnetic bearing functions and the rotor levitates (POWER ON state). The "POWER" LED illuminates in green (Levitation state).
Page 64: Starting/Stopping The Stp Pump
STP-iS2207 Series Turbomolecular Pump 4.6.2 Starting/stopping the STP pump There are the methods of contact input for the starting/stopping operation with the parallel port. Starting the pump Stopping the pump Short the circuit between (1)-(2). Open the circuit between (1)-(2).
Page 65: How To Start/Stop The Stp Pump
STP-iS2207 Series Turbomolecular Pump How to start/stop the STP pump 4.7.1 Starting the STP pump after stopping Perform the start operation shown in Section 4.6.2, "Starting/stopping the STP pump". The STP pump can be reaccelerated even while it is stopping.
Page 66: Led
STP-iS2207 Series Turbomolecular Pump Three LEDs indicate the pump’s operational state. Power on state Acceleration Deceleration Warning/ (Levitation state state Failure state state) POWER Steady green Steady green Steady green Steady green (green) (OFF only at power failure) ROTATION Extinguishes...
Page 67: Parallel Port Input/Output Signal
STP-iS2207 Series Turbomolecular Pump Parallel port input/output signal The remote input/output signal connector "X2 REMOTE" is used for input/output remote signals (see Figure 31). This connector is of D-Sub (25 pins, socket type) type. The screw for connector is M2.6.
Page 68: X2 Remote Input Signal Pins
STP-iS2207 Series Turbomolecular Pump Description Pins for inputting the START signal. Short the circuits between (1)-(2). When the pins (1)-(2) are opened, the STP pump will stop. START IN Pins for inputting the RESET signal. (15) When a safety function operates, remove the cause of the abnormality/error after confirming the STP pump has stopped.
Page 69: X2 Remote Input Signal Pins (Contact Input)
STP-iS2207 Series Turbomolecular Pump Figure 32 - X2 REMOTE input signal pins (contact input) Note: 1 pin (0 V) is isolated from the frame ground. Note: The input current of remote input signal is approx. 2.5 mA. Make sure the minimum applicable load of the relay contact when the remote operation with the relay.
Page 70: Input Operation Port Setting
STP-iS2207 Series Turbomolecular Pump 4.9.2 Input operation port setting Set the input operation port to the parallel port when operating the STP pump via the connector X2. The default setting of the Input operation port is "I/O Remote" (parallel port). It can be set via serial communication, the STP-Link or (optional accessory) or the display unit iDT-001 (optional accessory).
Page 71: Second Speed Option
STP-iS2207 Series Turbomolecular Pump 4.9.3 Second speed option When the second speed option is enabled, second rating speed can be set independently of the normal rating speed setting. The selection of the second rating speed and normal rating speed are operated from I/O remote input or serial communication port.
Page 72: Output Signal Pins
STP-iS2207 Series Turbomolecular Pump 4.9.4 Output signal pins Table 14 and Figure 33. The pins function when the input operation port is either in parallel port setting or serial port setting. Three abbreviations are used in Table 14. N.O OUT: Normal Open Output Pin N.C OUT:...
Page 73 STP-iS2207 Series Turbomolecular Pump Description (18) Pins for outputting the ACCELERATION state signal. ACCELERATION These pins are closed when the STP pump is in acceleration. N.O OUT NORMAL Pins for outputting the NORMAL OPERATION state signal. (6) N.O OUT When the STP pump is in rated operation, the pins between (6)-(19) are closed.
Page 74: X2 Remote Output Signal Pins
STP-iS2207 Series Turbomolecular Pump Figure 33 - X2 REMOTE output signal pins MT-89E-001-C Page 64...
Page 75 STP-iS2207 Series Turbomolecular Pump Table 15 shows the rated contacts for relays CR1 to CR8 in Figure 33. Resistance Load (COS Ø=1) Maximum voltage 30 V DC Maximum rated current 0.1 A Maximum OFF-state current 1 μA Table 15 - Rated contacts for relays CR1 to CR8...
Page 76 STP-iS2207 Series Turbomolecular Pump This page intentionally blank MT-89E-001-C Page 66...
Page 77: Serial Communication Protocol
STP-iS2207 Series Turbomolecular Pump SERIAL COMMUNICATION PROTOCOL Introduction STP-iS2207 is provided with compliant serial RS232/RS485 interface. Prepare the user application according to this protocol procedure. Operation instructions and information, such as the running state and setting values of the STP pump can be set by the software.
Page 78: Connection And Setting Up
STP-iS2207 Series Turbomolecular Pump Connection and setting up 5.2.1 Signal connection 1. Serial Port COM1 (X3 COM1 connector) The serial port COM1 is available for the serial communication via RS232 or RS485. When using a user application, connect it to this port.
Page 79 STP-iS2207 Series Turbomolecular Pump 2. STP-LINK (X5 connector) The STP-Link (optional accessory) or the display unit iDT-001 (optional accessory) can be connected to the STP-LINK. MT-89E-001-C Page 69...
Page 80: Connecting The Rs485
STP-iS2207 Series Turbomolecular Pump 5.2.2 Connecting the RS485 Make sure the followings when using the serial port COM1 with RS485. • A connection condition is 1 on 1 (single point connection) or 1 on N (multi-point connection). A maximum number of 32 SIMs are connectable in the multi-point connection.
Page 81: Communication Parameter Setting
STP-iS2207 Series Turbomolecular Pump 5.2.3 Communication parameter setting The factory setting of COM1 is shown in Table 17. To set communication parameters, use the STP-Link (optional accessory) or the display unit iDT-001 (optional accessory). Communication Factory setting PC setting example...
Page 82: Input Operation Port Setting
STP-iS2207 Series Turbomolecular Pump 5.2.4 Input operation port setting Set the input operation port to the serial port when operating the STP pump via the X3 COM1 or X5 STP-LINK. Set the parameter of the "Input operation port" to the serial port which operates STP pump, following Section 5.4.16.
Page 83: Serial Communication Timeout Setting
STP-iS2207 Series Turbomolecular Pump 5.2.5 Serial communication timeout setting If the signal to the input operation port of the STP pump is interrupted for a certain period during acceleration or normal operation, the STP pump detects a failure and stops. The time setting of the failure detection is user definable.
Page 84: Recommended Items About Communication Cable Installation
STP-iS2207 Series Turbomolecular Pump 5.2.6 Recommended items about communication cable installation Noise generated by many factors such as the type or length of cable, communication speed, and different communication devices may cause the communication failure with a serial port. It is very difficult to prevent a communication failure completely.
Page 85 STP-iS2207 Series Turbomolecular Pump DO NOT bundle a communication line with a protective earth conductor or a power line. Moreover, keep away a communication line from the apparatus used as a noise source as much as possible. As radio frequency noise measure, place a ferrite core on both ends of the communication cable.
Page 86 STP-iS2207 Series Turbomolecular Pump DO NOT insert or remove a communication cable while a communication device and a STP pump are turned ON the power. Communication interface circuit may break down if surge voltage caused by such as potential difference of communication interfaces or static electricity is applied to communication line.
Page 87: Protocol Specifications
STP-iS2207 Series Turbomolecular Pump Protocol specifications 5.3.1 General description The STP serial communication protocol enables the SIM to receive the communication command transmitted from the PC and sends a response following the communication command (Figure 42-1). Each communication command from the PC transmits a text message (ASCII text) assigned to each function (Figure 42-2).
Page 88: Standard Transmission Frame (In The Rs232/Rs485 Single Point Connection)
STP-iS2207 Series Turbomolecular Pump Table 20 shows ASCII characters being used in the transmission control, error control and handshake in the application layer. ASCII Function character code Transmission layer Transmission block start character Transmission frame end character Transmission block end character...
Page 89: (In The Rs232/Rs485 Single Point Connection)
STP-iS2207 Series Turbomolecular Pump Transmission frame when a message exceeds 255 characters (n = 255, m<=255, k = the number of transmission blocks): First 5+n+1 5+n+2 Block ASCII Second 5+n+1 5+n+2 Block ASCII Final 5+m+1 5+m+2 Block ASCII "Stx" is used as a start character of each transmission block; "Etb" is used as an end character of the transmission block with a message of 255 characters;...
Page 90: Query Command
STP-iS2207 Series Turbomolecular Pump Then the preceding SIM->PC character is "Ack", the instructed control command is executed and the SIM returns the following response. PC->SIM Ack or Nak SIM->PC Stx # or ! Etx LRC The PC transmits "Ack" or "Nak"; then transmits the next command if necessary.
Page 91: Transmission Data Format
STP-iS2207 Series Turbomolecular Pump Parameter (from C to C ) serves as 16 bits signed hexadecimal value coded ASCII text. When a message (a space character, a function code, and parameter) exceeds 255 characters, input "?" and CHR to the top transmission block only (the first transmission block of the transmission frame). It is not necessary to input them to the 2nd and succeeding transmission blocks.
Page 92: Frame Control (Checksum)
STP-iS2207 Series Turbomolecular Pump 5.3.6 Frame control (checksum) The transmission frame is controlled by the odd number parity check. First initialize LRC as FF Next calculate LRC by EXCLUSIVE-OR (XOR) of all the frame bytes containing "Stx", "Etb", "Etx" and LRC and transmit the result as LRC.
Page 93 STP-iS2207 Series Turbomolecular Pump Examples: Network frame ID character and number in the multi-point connection ASCII Network frame No "1" ASCII Network frame No "100" ASCII Network frame No "127" The transmission frame has a single block or multiple transmission blocks. Each transmission block...
Page 94: Control Command In The Rs485 Multi-Point Connection
STP-iS2207 Series Turbomolecular Pump 5.3.9 Control command in the RS485 multi-point connection The control command to be used when a pump operation instruction or a setting change instruction is transmitted to the SIM and is arranged in the order specified below. The top is "Sp" (space character, HEX code "20") and ASCII characters corresponding to the respective function code and parameter...
Page 95: 5.3.10 Query Command In The Rs485 Multi-Point Connection
STP-iS2207 Series Turbomolecular Pump Next, the preceding SIM->PC character is "Ack", the PC continues instructing the control command (the 2nd block). PC->SIM @ F Stx 0 Etx LRC SIM->PC Ack or Nak Always assign less than 510 characters (n< 510) to the parameter so that the message is less than 512 characters.
Page 96: 5.3.11 Broadcasting Command In The Rs485 Multi-Point Connection
STP-iS2207 Series Turbomolecular Pump Always assign less than 254 characters (n< 254) to the parameter so that the message is less than 256 characters. Next, the preceding SIM->PC character is "Ack", the instructed query command is executed and the SIM returns the following response (1st block).
Page 97: 5.3.12 Application Note
STP-iS2207 Series Turbomolecular Pump 5.3.12 Application note Noise generated by many factors such as the type or length of cable, communication speed, and different communication devices may cause the communication failure with a serial port. It is very difficult to prevent a communication failure completely. The followings are the methods to create the tool application with redundancy to a noise etc.
Page 98: Example Of Answer Resending Process
STP-iS2207 Series Turbomolecular Pump Always check the LRC checksum of answer data. When LRC checksum is incorrect, do not use the data. When the incorrect data caused by noise is accepted, parameters might be set unexpected values. In this case, the processing of the tool application may determine to be a communication failure.
Page 99 STP-iS2207 Series Turbomolecular Pump This procedure is not necessary Communication cycle start if TMP connection number = 1. RS485 multipoint connection? Address selection: First TMP Command sending process Succeeded? Answer receiving process Succeeded? Decode process Error process RS485 multipoint connection?
Page 100 STP-iS2207 Series Turbomolecular Pump This procedure is not necessary if total block N = 1. Send command (N blocks) *1 When using RS485 to communicate, switch the PC side from sending state to receiving state within 5 sec. *2 When using RS485 multipoint connection, Block number: k = 1 also an address is incorrect.
Page 101: Command Specifications
STP-iS2207 Series Turbomolecular Pump Command specifications 5.4.1 Command list Function Command/Query Name Function code ReadMeas Reads the measured rotational speed. Command Sends commands START, STOP, RESET (These commands are valid only when being sent to the serial port which is set as the input operation port.) ReadFailMess Reads the errors being detected.
Page 102: Readmeas
STP-iS2207 Series Turbomolecular Pump 5.4.2 ReadMeas Function: Reads the measured rotational speed. Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx D Parameter 1 to 2 Etx LRC Parameter Item Data format Remarks [System reservation] 56-bits hexadecimal coded ASCII...
Page 103: Readfailmess
STP-iS2207 Series Turbomolecular Pump Parameter Item Data format Remark Pump operation command 8-bits hexadecimal coded Refer to Table 23 ASCII Pump operation command Value START STOP RESET Table 23 - Pump operation commands Example: Pump operation command: RESET operation = 4 = 04...
Page 104 STP-iS2207 Series Turbomolecular Pump Parameter Item Data format Remarks The number of error 8-bits hexadecimal Up to 80 errors coded ASCII 2 to 81 Error 1 8-bits hexadecimal coded ASCII … … Error 80 8-bits hexadecimal coded ASCII *1 The maximum number of errors may differ depending upon the software version of the STP pump. It is recommended that an application be designed as variable-length data.
Page 105 STP-iS2207 Series Turbomolecular Pump Error message Value Error message Value [System reservation] AMB Com. Failure [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] Power Failure [System reservation] Power Supply Fail [System reservation]...
Page 106: Error Message Values
STP-iS2207 Series Turbomolecular Pump Error message Value Error message Value [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] Aberrant Brake [System reservation] Aberrant Accel...
Page 107: Readmodfonct
STP-iS2207 Series Turbomolecular Pump 5.4.5 ReadModFonct Function: Reads the pump operation mode and the errors being detected. The data of errors being detected reads the same data as that of "ReadFailMess". Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx...
Page 108: Pump Operation Mode
STP-iS2207 Series Turbomolecular Pump Pump operation mode Value Levitation No Levitation Acceleration Normal Deceleration (Brake) Autotest [System Reservation] [System Reservation] [System Reservation] [System Reservation] [System Reservation] Table 26 - Pump operation mode Example: Pump operation mode : 01 = 1 = Levitation...
Page 109: Readversion
STP-iS2207 Series Turbomolecular Pump 5.4.6 ReadVersion Function: Read the software version. Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx Parameter 1 to 24 Etx LRC Parameter Item Data format Remarks 1 to 16 Control unit software version 8-bits hexadecimal...
Page 110: Readcounters
STP-iS2207 Series Turbomolecular Pump 5.4.7 ReadCounters Function: Reads serial number, running time and start counter. Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx Parameter 1 to 23 Etx LRC Parameter Item Data format Remarks 1 to 10 Control unit serial number...
Page 111: Readsetpoint
STP-iS2207 Series Turbomolecular Pump 5.4.8 ReadSetPoint Function: Reads the setting value of the "Speed Set Point" and TMS temperature. The "Speed Set Point" data is the same data as that of "ReadSpeedSetPoint". Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx...
Page 112: 5.4.10 Readstatus
STP-iS2207 Series Turbomolecular Pump Parameter Item Data format Remark Motor temperature 16-bits hexadecimal (Unit: ºC) coded ASCII Example: Motor temperature : 0014 = 20 ºC (68 ºF) Parameter ASCII 30 30 31 34 5.4.10 ReadStatus Function: Reads various settings (Remote mode, TMS function, Emergency vent valve).
Page 113: 5.4.11 Readevents
STP-iS2207 Series Turbomolecular Pump Remote mode Value I/O Remote (X2) COM1 (X3) COM3 (X5 STP-LINK) [System reservation] 3, 4, 5 Table 27 - Remote mode Example: Remote mode setting : 01 = I/O Remote TMS function setting : 00 = ENABLE...
Page 114: 5.4.12 Setspeedsetpoint
STP-iS2207 Series Turbomolecular Pump Parameter Item Data format Remarks The number of 8-bits hexadecimal Up to 10 errors "Error Record" coded ASCII 2 to 11 Error Record 1 to 8-bits hexadecimal Error Record 10 coded ASCII *1 Value corresponding to the error message is transmitted (refer to Table 24 and Table 25). The most recent error has the smallest parameter number.
Page 115: 5.4.13 Readspeedsetpoint
STP-iS2207 Series Turbomolecular Pump Parameter Items Data format Remark Speed Set Point 16-bits hexadecimal (Unit: Hz) coded ASCII *1 When the value set to the parameter is larger than the upper limit, it is automatically set to the upper limit. When the value set to the parameter is smaller than the lower limit, it is automatically set to the lower limit.
Page 116: 5.4.14 Readmodfonctwithwarning
STP-iS2207 Series Turbomolecular Pump 5.4.14 ReadModFonctWithWarning Function: Reads the pump operation mode, errors and warnings being detected. Transmission Frame: PC→SIM Stx Etx LRC SIM→PC PC→SIM SIM→PC Stx Parameter 1 to 82 Etx LRC Parameter Item Data format Remark Pump operation mode...
Page 117: Warning Value Bit Assign
STP-iS2207 Series Turbomolecular Pump Warning message 16-bits hex value 0001 [System reservation] WARNING: Second Damage Limit 0002 WARNING: First Damage Limit 0004 WARNING: Imbalance X_H 0008 WARNING: Imbalance X_B 0010 WARNING: Imbalance Z 0020 WARNING: Pump Run Time Over 0040...
Page 118 STP-iS2207 Series Turbomolecular Pump Example: Pump operation mode : 01 = 1 = Levitation WARNING being detected : 000C = 0004 OR 0080 "WARNING: First Damage Limit" and "WARNING: Imbalance X_H" The number of error : 02 = 2 errors...
Page 119: 5.4.15 Readmeasvalue
STP-iS2207 Series Turbomolecular Pump 5.4.15 ReadMeasValue Function: Reads the TMS temperature, motor temperature, motor current, measured rotational speed, and control unit temperature. The motor temperature value is the same temperature as "ReadMotorTemp". The measured rotational speed value is the same as "ReadMeas" parameter 2 (Measured rotational speed).
Page 120 STP-iS2207 Series Turbomolecular Pump Example: TMS temperature: 0046 = 70 ºC (158ºF) Motor temperature: 0014C = 20 ºC (68ºF) Motor current: = 2.5A Measured rotational speed: 01C2 = 450 Hz = 27,000 rpm Control unit temperature : 0032 = 50 °C...
Page 121: 5.4.16 Readoptionfunc
STP-iS2207 Series Turbomolecular Pump 5.4.16 ReadOptionFunc Function: Reads the setting value of the input operation port, warning function, and serial communication time out. Transmission frame: PC→SIM Stx Etx LRC SIM→PC PC→SIM SIM→PC Stx Parameter 1 to 13 Etx LRC *1 The HEX code of ASCII character ' = ' is "3D".
Page 122 STP-iS2207 Series Turbomolecular Pump Parameter Item Data format Remarks Serial communication time out 16-bits hexadecimal 60 sec. step setting (Unit: sec.) coded ASCII [System reservation] 88-bits hexadecimal coded ASCII Parameter Item Setting range I/O REMOTE (X2 REMOTE): Input operation port setting...
Page 123 STP-iS2207 Series Turbomolecular Pump Example: Input operation port: = I/O REMOTE TMS Option: = DISABLE Second Damage Limit Option: = ENABLE First Damage Limit Warning: = ENABLE Pump Runtime Over Warning: = DISABLE Pump Runtime Over Warning hours: 000003E8 = 1,000 (×100 hours)
Page 124: 5.4.17 Setoptionfunc
STP-iS2207 Series Turbomolecular Pump 5.4.17 SetOptionFunc Function: Changes the setting value of the input operation port, warning function, and serial communication time out. CAUTION There is an endurance limit of setting changes (no more than 24 times per day for about ten years).
Page 125 STP-iS2207 Series Turbomolecular Pump Parameter Item Data format Remarks Pump Overload Warning 16-bits hexadecimal Default 0000 Rotational speed setting coded ASCII (0.0%) Default 003C Serial communication 16-bits hexadecimal (60 sec.) time out setting (Unit: sec.) coded ASCII [System reservation] 88-bits hexadecimal...
Page 126: 5.4.18 Readcondition
STP-iS2207 Series Turbomolecular Pump Parameter ASCII *1 Assign Fhex or the reading data of ReadOptionFunc (?=). 5.4.18 ReadCondition Function: Reads the pump model and damage point. Transmission frame: PC→SIM Stx Etx LRC SIM→PC PC→SIM SIM→PC Stx Parameter 1 to 4 Etx LRC *1 The HEX code of ASCII character ' { ' is "7B".
Page 127 STP-iS2207 Series Turbomolecular Pump Example: Pump model: 5354502D69533232303720202020202020202020hex = STP-iS2207 Damage point: = 50 Parameter "S" "T" "P" "–" "i" "S" "2" "2" "0" "7" ASCII 35 33 35 34 35 30 32 44 36 39 35 33 35 32 33 32 33 30 33 37 Parameter "...
Page 128: 5.4.19 Readeventswithtime
STP-iS2207 Series Turbomolecular Pump 5.4.19 ReadEventsWithTime Function: Reads the "Error Record" with detection time. Transmission frame: PC→SIM Stx Etx LRC SIM→PC PC→SIM SIM→PC Stx Parameter 1 to 15 Etx LRC PC→SIM SIM→PC Stx Parameter 15 to 22 Etx LRC *1 The HEX code of ASCII character ' } ' is "7D".
Page 129 STP-iS2207 Series Turbomolecular Pump 1. In case of time flag = 0 Parameter Item Data format Remarks Error Code 8-bits hexadecimal coded ASCII Time flag 8-bits hexadecimal coded ASCII Pump running time 32-bits hexadecimal Unit: minute coded ASCII Control unit running time...
Page 130 STP-iS2207 Series Turbomolecular Pump Example: In case of Disturbance X_H detection at September 13, 2007 12: 34 Parameter ASCII 30 44 30 31 30 37 30 39 31 33 31 32 33 34 *3 System reservation Example: When 3 errors have been detected in the past;...
Page 131 STP-iS2207 Series Turbomolecular Pump Parameter ASCII 46 46 30 30 30 30 30 30 30 30 30 30 30 30 Parameter ASCII 46 46 30 30 30 30 Parameter ASCII 46 46 30 30 30 30 30 30 30 30 30 30 30 30...
Page 132: 5.4.20 Setoptions
STP-iS2207 Series Turbomolecular Pump 5.4.20 SetOptions Function: Changes the setting value of optional function. The parameter n depends on the optional function. Transmission frame: PC->SIM Stx Parameter 1 to n Etx LRC SIM->PC PC->SIM SIM->PC Stx Etx LRC HEX code of the ASCII character '0' is "30".
Page 133: 5.4.20.2 Second Speed Selection
STP-iS2207 Series Turbomolecular Pump Parameter Item Data format Remark Optional function 16-bits hexadecimal 0014 hex number coded ASCII Second speed setting 16-bits hexadecimal (Unit: Hz) coded ASCII Second speed option 16-bits hexadecimal 0000 hex：DISABLE setting coded ASCII 00FF hex：ENABLE This value can be changed in the range from half of the rated rotational speed to the rated rotational speed. When the parameter value is larger than the rated rotational speed, it is automatically set to the rated rotational speed.
Page 134: 5.4.21 Readoptions
STP-iS2207 Series Turbomolecular Pump 5.4.21 ReadOptions Function: Reads the setting value of optional function. The parameter n depends on the optional function. Transmission frame: PC->SIM Parameter 1 Etx LRC SIM->PC PC→SIM SIM→PC Stx Parameter 1 to n Etx LRC HEX code of the ASCII character '0' is "30".
Page 135: 5.4.21.2 Second Speed Select
STP-iS2207 Series Turbomolecular Pump Example: Second speed setting : 0190hex = 400 Hz = 24000 rpm Second speed option setting : 0000 = DISABLE Selected speed value : 0260hex = 608 Hz ≒ 36500 rpm (Normal rating speed setting) Parameter...
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Page 137: Stp-Link And Display Unit
STP-iS2207 Series Turbomolecular Pump STP-LINK and DISPLAY UNIT The STP-Link (optional accessory) and the display unit iDT-001 (optional accessory) are available with the STP pump. CAUTION The connector of the STP-Link (optional accessory) and the display unit iDT-001 (optional accessory) are not waterproof and dust-proof. The "STP-LINK" connector (X5) of the STP pump is waterproof and dust-proof when the cover is attached.
Page 138: Display Unit
STP-iS2207 Series Turbomolecular Pump Display unit The "display unit" operates the STP pump, confirms the pump status or sets various settings. The display unit iDT-001 is equipped with an LCD and flat panel switches. See the Instruction Manual of the "Display unit iDT-001" for the detailed specification and operating methods.
Page 139: Safety Functions
STP-iS2207 Series Turbomolecular Pump SAFETY FUNCTIONS The STP pump is provided with safety functions for various abnormalities/errors. When two or more warnings are detected simultaneously, a high-priority warning is indicated. Also, the warning signal is output from the "X2 REMOTE" connector. If an abnormality/error is found when using the STP pump, check it and take measures in accordance with the following procedures.
Page 140: Operation After A Power Recovery
STP-iS2207 Series Turbomolecular Pump Table 33 shows the states of LED output and the "X2 REMOTE" output signals at a power failure. REMOTE output signal LEDs (REMOTE X2) Rotational Duration of speed power failure ALARM POWER FAILURE N.O. N.C. 6,000 rpm or Approx.
Page 141: Abnormal State Of Magnetic Bearing (Disturbance)
STP-iS2207 Series Turbomolecular Pump 7.1.3 Abnormal state of magnetic bearing (Disturbance) CAUTION When an abnormality/error occurs in the magnetic bearing, check the STP pump. If "FAILURE" cannot be released after reset operation, contact Service office. When the magnetic bearing does not function normally due to a breakage of the STP connection cable, disconnection of connectors or any abnormality/error of the STP control circuit, the rotor lands on the touch down bearing and stops.
Page 142: Overspeed
STP-iS2207 Series Turbomolecular Pump 7.1.8 Overspeed When the rotational speed of the STP pump exceeds 38,000 rpm due to a failure in the motor driver, the STP pump changes into free-running and stops. The "FAILURE" LED (red) illuminates, and a failure signal is output from the "X2 REMOTE"...
Page 143 STP-iS2207 Series Turbomolecular Pump ↓Warning detection "FAILURE" LED indication Other Warning (Steady orange) First Damage Limit Second Damage Limit (3 flashes in orange) Pump Run Time Over Pump Overload Corresponding to (2 flashes in orange) warning type Imbalance (1 flash in orange)
Page 144: Contents Of Warning Function
STP-iS2207 Series Turbomolecular Pump Contents of WARNING function 7.3.1 First Damage limit Impact of the STP pump rotor onto the touch-down bearing, such as by an unexpected in-rush of air from outside or in the event of power failure, can damage the touch-down bearings. The STP pump monitors these impacts and assigns damage points to the event of "Disturbance"...
Page 145: Pump Overload
STP-iS2207 Series Turbomolecular Pump 7.3.4 Pump Overload "Pump Overload" is displayed when the state that the motor current exceeding the setting value continues during the fixed time or the state that the STP pump rotational speed drops below the setting value continues during the fixed time. However, the motor current and the rotational speed are monitored only in the NORMAL state.
Page 146: Warning Function Setting
STP-iS2207 Series Turbomolecular Pump WARNING function setting The WARNING functions can be set to Enable or Disable. Set to "ENABLE" when using the WARNING function. Set to "DISABLE" to release each WARNING function after the WARNING is detected. A setting value of the "Pump Run Time Over" and "Pump Overload" are adjustable. The WARNING detection can be released by setting the value larger than pump running hours after "Pump Run Time...
Page 147: Troubleshooting Immediately After Failure Occurs
STP-iS2207 Series Turbomolecular Pump Troubleshooting immediately after failure occurs The STP pump is provided with safety functions for various abnormities/errors. A safety function operates when an abnormality/error occurs. The "FAILURE" LED illuminates or flashes. Also, the failure signal is output from the "X2 REMOTE" connector. If an abnormality/error is found when using the STP pump, check it and take measures in accordance with the following procedures.
Page 148: Troubleshooting
STP-iS2207 Series Turbomolecular Pump Troubleshooting 7.6.1 Indication of "FAILURE" LED (red) The flashing pattern of the "FAILURE" LED (red) differs depending on the type of abnormality/error. When two or more failures are detected simultaneously, a high-priority failure is indicated. Also, the failure signal is output from the "X2 REMOTE"...
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Page 154: Indication Of "Failure" Led (Red)
STP-iS2207 Series Turbomolecular Pump 7.6.2 Indication of "FAILURE" LED (green) If an abnormality/error is detected by self test during the power ON operation, "FAILURE" LED flashes in green. This is the indication of STP pump or control unit failure. Contact Service Office.
Page 155: Maintenance And Inspection
NEVER open any panel because it could cause shock, malfunction, or short circuit. Power OFF the peripheral equipments before performing maintenance and inspections. Only Edwards will replace the maintenance parts, and will execute repair and overhaul. Contact Service office.
Page 156: Cleaning
Clean the outside of the control unit with a dry wipe as required. If the label of the STP pump has been damaged, contact Edwards. The decontamination (overhaul) in the STP pump is executed in Service office. When an overhaul is needed, contact Service office.
Page 157: Maintenance
STP-iS2207 Series Turbomolecular Pump Maintenance 8.4.1 Recommended overhaul intervals Regular overhaul (the cost of overhaul will be at your own charge) is required for safety and proper use of STP pump. The recommended intervals for different process applications are tabulated below:...
Page 158: Recommended Maintenance Intervals For Main Parts
STP-iS2207 Series Turbomolecular Pump 8.4.3 Recommended maintenance intervals for main parts Internal components of the STP pump will be damaged from gas load, heat, and corrosion when used long-term. Deterioration or abrasion of the internal parts of the STP pump will cause unexpected failures.
Page 159: Transporting For Repair Or Overhaul
Procedure". CAUTION When returning the STP pump to Edwards, be sure to pack it well to prevent external damage. If the "Return Procedure" has not been satisfied, Edwards will not be responsible for any troubles. Always contact Service office before returning the STP pump for repairs, overhaul, or other purposes.
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Page 161: Storage And Disposal
STP-iS2207 Series Turbomolecular Pump STORAGE AND DISPOSAL Storage of the STP pump When planning not to use the STP pump over a long period (more than a few months), follow the precautions below: 1. Store the STP pump in a vertical position.
Page 162: Disposal
Material Safety Data Sheet (MSDS) you obtain from the gas supplier. Dispose of the STP pump as industrial waste in accordance with all local and national safety and environmental standards. Note: Edwards will not be responsible for problems during or after disposal. MT-89E-001-C Page 152...
Page 163: Service, Spares And Accessories
A majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, state for each part required:...
Page 164: Accessories
STP-iS2207 Series Turbomolecular Pump 10.4 Accessories The following is a list of accessories that can be purchased by contacting Edwards. Items Application purpose Remarks Instruction Manual STP Pump Instruction Manual This manual Supplied with STP pump Power cable Primary input power Standard cable length is 5 m.
Page 165 For more information, contact the nearest Service Office. (http://www.edwardsvacuum.com/) Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8853 International +81-47-458-8853 Facsimile: Domestic 047-458-8048 International +81-47-458-8048 Copyright 2018 Edwards Japan Limited. All rights reserved.

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