STP-L301/L451 Series Instruction Manual
4.3.3
How to Secure the STP Pump
◇ The STP pump is provided with a high-speed rotor. The worst-case failure may
result in a jump in rotational torque leading to personal injury or peripheral
equipment damage.
The method of securing the STP pump will depend on the installation requirements.
Secure the STP pump to the vacuum equipment as follows:
◇ Design and secure the mounting for the STP pump so that it can withstand the
maximum rotational torque. Refer to Table 4.2 for torque in pump abnormality.
No
Damper
Yes
◇ In some cases, the damper and the claw clamper securing cannot be used depend
on the type of the STP pump.
◇ Refer to Table 4.1 for tightening torque of the bolt.
◇ When making the leg to secure the base, make them shortened more than ones
attached to the STP pump.
Use a material that has a tensile strength of 600N/mm
◇ When securing the base, use stainless steel securing bolts with a tensile strength
class is 70 or more.
◇ When using any securing method other than that specified in this manual, contact
Edwards.
with bolts
Secure the inlet port
with Claw Clamps
Table 4.1 Tightening Torque of Bolt
Size of bolt
Tightening torque of bolt (Nm)
M8
M10
M12
4-8
Refer to "1) When securing
the inlet port with bolts"
Refer to "2) When securing
the inlet port flange with claw
clamps"
Refer to "3) When installing
the damper in the inlet port
flange"
12
24
42
2
or more.