Installation Of The Stp Pump To The Vacuum Equipment - Edwards STP Series Instruction Manual

1
2
1. STP control unit
2. Power cable
3. TMS connection cable
*1
The STP pump can be installed through the damper (optional accessory).
*2
The TMS unit is an optional accessory. Refer to the STP Pump Instruction Manual (B) for more detailed information.
*3
The equipment and part within the parentheses must be prepared by the customer.
Figure 12 - Installation of the STP pump to the vacuum equipment
March 10
STP Series Turbomolecular Pump
4
*2
3
4. STP connection cable
5. (Vacuum equipment)
6. Inlet port flange
19
*1
7. Outlet port
*3
8. (Vacuum valve)
9. (Backing-pump
[dry pump, and other])
5
6
7
8
9
*3
*3
Issue 1-b
2