Maintenance And Inspection Precautions; Labels; Warning Label Of Stp Pump Installation And Caution Label For Heavy Product - Edwards STP Series Instruction Manual
Turbomolecular pumps
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Also See for STP Series:
- Instruction manual (167 pages) ,
- Instruction manual (169 pages) ,
- Instruction manual (63 pages)
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1.5
Maintenance and inspection precautions
Perform any maintenance or inspection of the STP pump under the condition that no power is
applied to the STP pump (refer to SEMI S2 Section 13.2 - type 1), following Section 8,
"MAINTENANCE AND INSPECTION".
1.6
Labels
The following labels are affixed to the STP pump. Read the contents of the labels before operation.
1.
Warning label of STP pump installation and Caution label for heavy product
"Warning label of STP pump" installation describes a warning during installation of the STP
pump. Install the STP pump according to Section 3, "INSTALLATION OF THE STP PUMP".
"Caution label for heavy product" is affixed to products with a weight of 18 kg or more. Comply
with Section 3.2, "Unpacking" not to cause an accident during handling.
Figure 1 - Warning label of STP pump installation and Caution label for Heavy product
STP-iXA4507 series Turbomolecular Pump
1
MT-91E-001-0
Page 5
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