Edwards STP Series Instruction Manual
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MT-41E-AA1-A
Instruction Manual
STP Series Turbomolecular Pumps
STP-A2203C3
(First Edition - a)
This Manual has extracted difference of the
STP-A2203 series and the STP-A2203C3. For
the "Safety Precautions", installation,
operation and maintenance, read the STP
pump Instruction Manual (A), STP- A2203
series Instruction Manual (B), and STP control
unit Instruction Manual (C).
Keep this Manual in a place where you can
quickly access it at any time.
Jan. 2008
Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.
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Summary of Contents for Edwards STP Series
- Page 1 Instruction Manual (A), STP- A2203 series Instruction Manual (B), and STP control unit Instruction Manual (C). Keep this Manual in a place where you can quickly access it at any time. Jan. 2008 Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.
- Page 2 STP-A2203C3 Instruction Manual (excerpt) INTRODUCTION Thank you very much for purchasing Edwards’ turbomolecular pump. The turbomolecular pump is designed to be installed in the vacuum equipment to exhaust gases from it. This manual covers all items necessary to ensure safe installation, operation and...
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Page 3: Table Of Contents
STP-A2203C3 Instruction Manual (excerpt) TABLE OF CONTENTS 1 Specifications...................1-1 Specifications for the STP Pump ................1-1 External Appearance of the STP Pump ..............1-2 TABLES Table 1.1 Specifications for the STP Pump................1-1 FIGURES Figure 1.1 External Appearance of the STP Pump (STP-A2203C3).........1-2... -
Page 4: Specifications
Mass The values shown in the table are typical.; They are not guaranteed. : Pumping speed, compression ratio, ultimate pressure and maximum gas flow are measured via a Edwards method. (Ultimate pressure is measured after baking.) : The maximum gas flow rate is measured under the following conditions. -
Page 5: External Appearance Of The Stp Pump
STP-A2203C3 Instruction Manual (excerpt) External Appearance of the STP Pump 12-φ11 Cooling Water Port 2-Rc 1/4(ISO) Purge Port φ335 Outlet Port Inlet port ISO250F KF40 φ289 φ296 φ324 STP Cable Connector VIEW FROM A φ231 8-M16 Depth 24 (Screw for Legs) 4-M16 Depth 32 Figure 1.1 External Appearance of the STP Pump (STP-A2203C3) - Page 6 For more information, contact the nearest Service Office. Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8822 International +81-47-458-8822 Facsimile: Domestic 047-458-8833 International +81-47-458-8833 Copyright 2008 Edwards Japan Limited. All rights reserved.