Baking, Cooling The Stp Pump And Gas Pumping; Baking The Stp Pump; Attaching A Baking Heater - Edwards STP-L301 Series Instruction Manual

5

Baking, Cooling the STP Pump and Gas Pumping

5.1

Baking the STP Pump

To attain a lower pressure in a shorter time and reduce the exhaust time, bake the vacuum
equipment and STP pump.
◇ The surfaces of the STP pump and its peripheral equipment will become extremely
hot when performing baking. NEVER touch them with bare hands.
◇ When baking the STP pump, always cool it to prevent overheating.
◇ Start baking after cooling is started.
Set the temperature of the baking heater to 120 °C or lower (an optional baking
heater is set to 110 °C or lower).
◇ DO NOT pump gases during baking to prevent overheating.
◇ To exhaust the gas discharged from the vacuum equipment and the inner wall of
the STP pump, run the STP pump during baking.
5.1.1

Attaching a Baking Heater

1) Attach a baking heater (optional accessory) as near as possible to the inlet port flange.
2) Affix the "Hot Surface Warning Label" to the surface of the STP pump so that the
operator can see it clearly at any time.
(See Figure 5.1, "Attaching Positions of the Cooling Unit and Baking Heater")
◇ Check the rated voltage of the baking heater before use. (The range of the available
voltage of the baking heater (optional accessory) is display voltage +/-10 %).
◇ Wind the baking heater around the surface of the STP pump tightly.
If the baking heater is not wound tightly, the loose parts will overheat.
◇ Procure protective parts for the baking heater, such as circuit breaker and fuses
when using the baking heater.
◇ DO NOT apply excessive force to the cable for the baking heater.
STP-L301/L451 Series Instruction Manual
5-1