Technical Data; Applicable Pump Specifications - Edwards STP Series Instruction Manual

TECHNICAL DATA

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1.1

Applicable pump specifications

Model Name
STP-A803/A1303 series
Naming convention:
• "C" following a pump model name indicates a corrosion resistant
• "CV" indicates an enhanced corrosion resistant type with TMS
*1 Corrosion resistant:
*2 Temperature Management System: TMS unit (optional accessory) maintains the temperature at the base of the
STP-A803/A1303 Series Turbomolecular Pump
Specification
Advanced high-throughput type
STP pump with anti-corrosive treatment.
turbomolecular pump by monitoring the temperature with the temperature sensor in
the base of the turbomolecular pump, and performing the TMS valve and base heater
ON/OFF control.
Applicable Control unit
SCU-800/801
*1
type (e.g. STP-A803C).
*2
(e.g. STP-A1303CV).
MT-36E-101-I
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