Gas Suction; How To Introduce A Purge Gas [For Chemical Specific Pump (Type C)] - Edwards STP-L301 Series Instruction Manual

STP-L301/L451 Series Instruction Manual
5.3

Gas Suction

◇ When pumping gases, they may remain in the STP pump.
Introduce a purge gas and then exhaust all gasses.
Residual gases in the STP pump may cause an accident when the STP pump is
removed.
Confirm the characteristics of gases to be used, referring to the Material Safety
Data Sheet (MSDS) you obtain from the gas supplier.
◇ Chlorine or fluorine system gases can be used in the chemical specific pump (type
C). When you use gases including alkaline metals, but excluding Li, gases including
Ga, Hg, In, or Sn, or HBr, contact Edwards.
◇ NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the
STP-L301/STP-L451 pump or other models without anti-corrosion treatment.
◇ Cool the STP pump to prevent the STP pump from overheating when pumping
gases.
5.3.1

How to Introduce a Purge Gas [For Chemical Specific Pump (Type C)]

◇ When pumping reactive or corrosive gases, introduce a purge gas to protect the
inside of the STP pump. Doing so may result in product damage.
Connect a needle valve or a similar part to the purge port and introduce a dry N
other gas to perform a gas purge (see Section 4.3.6, "Connecting the Purge Port").
◇ Refer to Section 13, "Specifications and Accessories" for the proper amount of the
gas.
◇ The allowable gas pressure ranges 0.1×10
Pa (0.5 kgf/cm
◇ When not using the purge port, always mount the blank flange (attached at
delivery).
◇ High-pressure at the inlet port may result in a noise. This is no abnormality/error.
2
).
5-4
5
Pa (atmospheric pressure) to 4.9×10
gas or
2
4