Attaching A Baking Heater; Installation Of The Air Cooling Unit; 2.3.10 Installation Of The Tms Unit - Edwards STP-XF803 Series Instruction Manual

2.3.8

Attaching a baking heater

The surfaces of the STP pump and its peripheral equipment will become extremely
hot when performing baking. NEVER touch them with bare hands.
DO NOT apply excessive force to the cable for the baking heater.
Wind the baking heater around the surface of the STP pump tightly. If the baking heater is not
The baking heater is not included in the scope of supply.
When preparing the baking heater at your company, refer to the external appearance on each
Instruction Manual of the STP pump before purchasing it.
Install the baking heater near the inlet port flange in the perimeter of the envelope. (see Figure 19)
2.3.9

Installation of the air cooling unit

Refer to "Air Cooling Method" in the STP Pump Instruction Manual (B) for the installation methods
and other details.
Note: The air cooling unit is not available depending on the STP pump model. Refer to the STP
Pump Instruction Manual (B) and confirm whether the air cooling unit can be used for the
STP pump.

2.3.10 Installation of the TMS unit

The TMS unit is an optional accessory. Refer to the STP Pump Instruction Manual (B) for installation
of the TMS unit.
Note: The TMS unit is not available depending on the STP pump model. Refer to the STP Pump
Instruction Manual (B) and confirm whether the TMS unit can be used for the STP pump.
STP Series Turbomolecular Pump
WARNING
CAUTION
CAUTION
wound tightly, the loose parts will overheat.
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