Edwards STP-XA4503 Series Instruction Manual
Turbomolecular pumps
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Also See for STP-XA4503 Series:
- Instruction manual (59 pages) ,
- Instruction manual (63 pages)
Table of Contents
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Instruction Manual (B)
STP Series Turbomolecular Pumps
STP-XA4503 Series
Pump Specific Information
Model name
STP-XA4503 series
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
Instruction Manual (B):
(This Instruction Manual)
Instruction Manual (C):
Voltage
200 - 240 Va.c.
STP pump generic Instruction Manual
Supplied with STP pump
STP pump specific information
Supplied with STP pump
STP control unit Instruction Manual
Supplied with STP control unit
Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.
MT-67E-101-B
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Table of Contents
Related Manuals for Edwards STP-XA4503 Series
Summary of Contents for Edwards STP-XA4503 Series
- Page 1 Supplied with STP pump Instruction Manual (B): STP pump specific information (This Instruction Manual) Supplied with STP pump Instruction Manual (C): STP control unit Instruction Manual Supplied with STP control unit Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.
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- Page 3 The description of this product consists of the three-volumed Instruction Manuals. Read through each Instruction Manual before operation. The separate volume contents of each description are as follows: Instruction Manual (A) STP pump generic Instruction Manual: • Introduction • Installation of the STP pump •...
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Page 5: Table Of Contents
STP-XA4503 Series Turbomolecular Pump CONTENTS PAGE Section Title Page TECHNICAL DATA Applicable pump specifications 1.1.1 STP pump specifications 1.1.2 Condition for the water-cooling unit External appearance of the STP pump Label affixing positions Accessories HOW TO SECURE THE STP PUMP... - Page 6 STP-XA4503 Series Turbomolecular Pump ILLUSTRATIONS PAGE Figure Title Page STP-XA4503 series: VG300/ISO320F STP-XA4503 series: VG350 Label Affixing Positions for the STP pump Methods of securing the STP pump Shape of reduced diameter shank bolts Configuration of the TMS External view of TMS connection cable...
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Page 7: Technical Data
STP-XA4503 Series Turbomolecular Pump TECHNICAL DATA Applicable pump specifications Model Name Specification Applicable Control unit STP-XA4503 series Extreme Advanced throughput type SCU-1500/SCU-1400 Applicable control unit: There are different performance specifications between SCU-1500 and SCU-1400. Refer to Section 1.1.1, "STP pump specifications" for the differences. -
Page 8: Stp Pump Specifications
STP-XA4503 Series Turbomolecular Pump 1.1.1 STP pump specifications The values shown below are typical. They are not guaranteed. Item XA4503 series Flange size Inlet port flange VG300 ISO320F VG350 Outlet port flange KF40 KF40 KF40 Pumping speed 3800 4000 4300... -
Page 9: Condition For The Water-Cooling Unit
Ar gas is vacuumed continuously and the backing backing-pump (pumping speed: 10,000 L/min) is used. It is changed depending on condition. For example, when the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards. 1.1.2... -
Page 10: External Appearance Of The Stp Pump
VG300 ISO320F (10) φA φH φ395 φ420 （12） Ａ (6) *1 φ182 （13） Figure 1 - STP-XA4503 series: VG300/ISO320F Item Description Inlet port VG300 ISO320F Center of gravity flange Height of the purge port φA Height of water cooling port 455.5... -
Page 11: Stp-Xa4503 Series: Vg350
VG350 φ450 φ395 φ420 (12) Ａ (6) *1 φ182 (13) Figure 2 - STP-XA4503 series: VG350 Item Description Center of gravity Height of the purge port Height of water cooling port TMS sensor Screw hole of legs 4-M16 depth 33... -
Page 12: Label Affixing Positions
STP-XA4503 Series Turbomolecular Pump Label affixing positions Refer to the Instruction Manual (A) for the details of the labels 1 to 7. Figure 3 - Label Affixing Positions for the STP pump STP pump installation warning label Hot surface warning label... -
Page 13: Accessories
STP-XA4503 Series Turbomolecular Pump Accessories Item Q’ty Remarks Inlet port cover Outlet port cover STP connector cover Blank flange for purge port KF10 Clamping ring for purge port KF10 O-ring washer for purge port KF10 Instruction Manual (B) This manual Aug. - Page 14 STP-XA4503 Series Turbomolecular Pump This page intentionally blank. Aug. 08 Issue 1-b...
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Page 15: How To Secure The Stp Pump
Use a material that has a tensile strength of 600N/mm or more. When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more. Note: When using any securing method other than that specified in this manual, contact Edwards. Aug. 08 Issue 1-b... -
Page 16: Maximum Torque Predicted And Recommended Securing Bolt
STP-XA4503 Series Turbomolecular Pump The generated destructive torque depends on the presence of a torque reduction mechanism that can be built into the flange, according to the pump model and flange type. This mechanism, shown in Figure 5, is designed to absorb energy and also buffer the destructive torque. -
Page 17: Shape Of Reduced Diameter Shank Bolts
STP-XA4503 Series Turbomolecular Pump CAUTION Install the flange securing bolts in the proper position with the special square washer shown in Figure 5. Failure to do so may cause abnormal operation of the torque reduction mechanism and damage the pump. - Page 18 STP-XA4503 Series Turbomolecular Pump This page intentionally blank Aug. 08 Issue 1-b...
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Page 19: Temperature Management System (Tms)
STP-XA4503 Series Turbomolecular Pump TEMPERATURE MANAGEMENT SYSTEM (TMS) WARNING The STP pump operates at high temperatures while the Temperature Management System (TMS) unit is in operation. NEVER touch the STP pump and its peripheral equipment while TMS unit are in operation. Operators can burn hands. Moreover, NEVER remove the TMS cover while the Temperature Management System (TMS) unit is in operation. -
Page 20: Tms Connection Cable
STP-XA4503 Series Turbomolecular Pump TMS connection cable The components of the TMS connection cables are as follows: (see Figure 7) Item Description Function Connector X5A For the STP control unit CON1 HEATER OUT connector For the TMS heater CON2 COOLING VALVE OUT connector... -
Page 21: Tms Heater
STP-XA4503 Series Turbomolecular Pump TMS heater The TMS heater heats the base of the STP pump. It’s fitted with the STP-XA4503 series at the factory. TMS valve The TMS valve controls the cooling water in order to maintain a constant temperature inside the STP pump. -
Page 22: Installation Of The Tms Unit
STP-XA4503 Series Turbomolecular Pump Installation of the TMS unit CAUTION DO NOT install the TMS unit in places with high temperature, humidity, noise, vibration, or other unstable environment. CAUTION DO NOT apply force to the TMS unit and cables during installation and DO NOT bend the cables excessively. -
Page 23: Condition For The Tms Unit
STP-XA4503 Series Turbomolecular Pump Condition for the TMS unit The values shown below are typical. They are not guaranteed. Item Condition Ambient temperature range °C 0 to 40 Storage temperature range °C -20 to 55 Input voltage Same voltage as the STP control unit 200 to 240 Vac... - Page 24 STP-XA4503 Series Turbomolecular Pump This page intentionally blank Aug. 08 Issue 1-b...
- Page 25 For more information, contact the nearest Service Office. Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8822 International +81-47-458-8822 Facsimile: Domestic 047-458-8833 International +81-47-458-8833 Copyright 2008 Edwards Japan Limited. All rights reserved.