Installation Of The Stp Pump; Name And Function Of Each Part - Edwards STP-L301 Series Instruction Manual

4

Installation of the STP Pump

4.1

Name and Function of Each Part

(1) Inlet Port Flange (ICF
Connected to the vacuum equipment (at the high vacuum side).
(2) Outlet Port Flange (KF
Connected to the inlet port side of the backing pump.
(3) STP Connector (41 pins)
Connected to the STP connection cable.
(4) Ground Terminal
Used for grounding.
Connect the ground cable between this terminal and the ground terminal of the STP
control unit.
The ground terminal is marked with
(5) Purge Port (KF 10)[Chemical Specific Pump (Type C)]
*2
Introduces a purge gas.
This port is attached only to the chemical specific pump (type C). In order to protect
the inside of the STP pump when pumping reactive or corrosive gases. The STP
pump is delivered with a blank flange attached to this port.
*1
: JVIA Standard
*2
: JIS
STP-L301/L451 Series Instruction Manual
, VG , ISO, and other)
*1 *1
25)
*2
4-1
label.