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1
2
1. STP control unit
2. Power cable
3. TMS connection cable
*1 The STP pump can be installed through the damper (optional accessory).
*2 The TMS unit is an optional accessory. Refer to the STP Pump Instruction Manual (B) for more detailed information.
*3 The equipment and part within the parentheses must be prepared by the customer.
Figure 14 - Installation of the STP pump to the vacuum equipment
STP Series Turbomolecular Pump
4
*2
3
4. STP connection cable
5. (Vacuum equipment)
6. Inlet port flange
*1
7. Outlet port
*3
8. (Vacuum valve)
9. (Backing-pump
[dry pump, and other])
5
6
7
8
9
*3
*3
MT-00E-001-M
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