SAFETY PRECAUTION
INTRODUCTION
1
1.1
Usable Gases..................................................................................................................1-1
1.2
1.3
Labels..............................................................................................................................1-2
2
3
Unpacking .....................................................................................3-1
3.1
3.2
Accessories .....................................................................................................................3-1
4
4.1
4.2
4.2.1
Operating Environment .......................................................................................4-3
4.2.2
Installation Area ..................................................................................................4-4
4.2.3
Bench..................................................................................................................4-4
4.3
4.3.1
Cleaning the Seal................................................................................................4-6
4.3.2
4.3.3
4.3.4
Vacuum Piping ..................................................................................................4-12
4.3.5
4.3.6
5
5.1
Baking the STP Pump .....................................................................................................5-1
5.1.1
5.2
Cooling the STP Pump....................................................................................................5-2
5.2.1
Water Cooling Method ........................................................................................5-2
5.2.2
Air Cooling Method..............................................................................................5-3
5.3
Gas Suction.....................................................................................................................5-4
5.3.1
6
6.1
6.1.1
Front Panel .........................................................................................................6-1
6.1.2
Rear Panel ..........................................................................................................6-3
6.1.3
Top Panel............................................................................................................6-5
6.1.4
Side Panel (Left side)..........................................................................................6-6
6.2
6.2.1
Operating Environment .......................................................................................6-7
6.2.2
Insulation Test.....................................................................................................6-7
TABLE of CONTENTS
9
STP-L301/L451 Series Instruction Manual