Water Cooling Use Condition - Edwards STP-iS1607 Series Instruction Manual

2.3

Water cooling use condition

2
Use cooling water which fulfills the following conditions.
MT-94E-001-C
Page 14
STP-iS1607 Series Turbomolecular Pump
Item
Port type
Flow rate
Water temperature
Water pressure MPa (kgf/cm
Maximum grain size
pH
Water hardness
Resistivity
Turbidity
*1
Maximum gas flow-rate differs according to the cooling water
temperature. (refer to Section 2.2)
Specification
Rc 1/4 (Female)
L/min 3
*1
°C 15 to 35
2
) 0.3 (3)
2
mm 0.03
6.5 to 8.0
mg/L 100
kΩ･cm
4 to 1,000
FNU < 30