STP-XA2703BV155/XA3203BV155 Turbomolecular Pump
1.4
Accessories
Inlet port cover
Outlet port cover
STP connector cover
Blank flange for purge port
Clamping ring for purge port
O-ring washer for purge port
Leg
Instruction Manual (B)
Item
Q'ty
1
1
1
1
1
1
4
1
Remarks
KF10
KF10
KF10
This manual
1
MT-66E-0A1-E
Page 7