Name And Function Of Each Part; Name And Function Of The Pump; Configuration Of The Stp Pump; Control Unit (Front Panel) - Edwards STP-iS2207 Series Instruction Manual

3.3

Name and function of each part

3.3.1

Name and function of the pump

The STP pump in Figure 16 is a typical pump model. Refer to Section 2, "TECHNICAL DATA".
Item Description
1 Inlet port flange
2 Outlet port flange
3 Cooling water port
4 Control unit
5 Purge port
(only specification with
purge port)
STP-iS2207 Series Turbomolecular Pump
Figure 16 - Configuration of the STP pump
Connected to the vacuum equipment (at the high vacuum side).
Connected to the inlet port side of the backing-pump.
Connected to the STP pump cooling water pipe.
Contains the electronics that control the pump. Refer to Section
3.3.2, "Name and function of the control unit, for details.
Introduces a purge gas.
In order to protect the inside of the STP pump when pumping
reactive or corrosive gas, gas including hydrogen.
The STP pump is delivered with a blank flange attached to this
port.
Table 3 - Pump functions
Function
3
MT-89E-001-C
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