Edwards STP Series Instruction Manual
Turbomolecular pumps
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Also See for STP Series:
- Instruction manual (167 pages) ,
- Instruction manual (23 pages) ,
- Instruction manual (33 pages)
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Instruction Manual (B)
STP Series Turbomolecular Pumps
STP-F2203 Series
Pump Specific Information
Model name
STP-F2203 series
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
Instruction Manual (B):
(This Instruction Manual)
Instruction Manual (C):
Voltage
200 - 240 Va.c.
STP pump generic Instruction Manual
Supplied with STP pump
STP pump specific information
Supplied with STP pump
STP control unit Instruction Manual
Supplied with STP control unit
Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.
MT-50E-101-A
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Table of Contents
Related Manuals for Edwards STP Series
Summary of Contents for Edwards STP Series
- Page 1 Supplied with STP pump Instruction Manual (B): STP pump specific information (This Instruction Manual) Supplied with STP pump Instruction Manual (C): STP control unit Instruction Manual Supplied with STP control unit Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.
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- Page 3 The description of this product consists of the three-volumed Instruction Manuals. Read through each Instruction Manual before operation. The separate volume contents of each description are as follows: Instruction Manual (A) STP pump generic Instruction Manual: • Introduction • Installation of the STP pump •...
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Page 5: Table Of Contents
STP-F2203 Series Turbomolecular Pump CONTENTS PAGE Section Title Page TECHNICAL DATA Applicable pump specifications 1.1.1 STP pump specifications 1.1.2 Condition for the water-cooling unit External appearance of the STP pump Label affixing positions Accessories HOW TO SECURE THE STP PUMP When securing the inlet port with bolts TEMPERATURE MANAGEMENT SYSTEM (TMS) Configuration of the STP pump with the TMS... - Page 6 STP-F2203 Series Turbomolecular Pump ILLUSTRATIONS PAGE Figure Title Page STP-F2203 series: VG250/ISO250F STP-F2203 series (with TMS unit): VG250/ISO250F Label affixing positions for the STP pump Example of securing the STP pump (when securing the inlet port with bolts) Shape of reduced diameter shank bolts Bolt position for securing the flange (ISO250F) Configuration of the STP pump with the TMS External view of TMS connection cable...
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Page 7: Technical Data
STP-F2203 Series Turbomolecular Pump TECHNICAL DATA Applicable pump specifications Model Name Specification Applicable Control unit STP-F2203 series High-flow type SCU-1500/SCU-1400 Applicable control unit: There are different performance specifications between SCU-1500 and SCU-1400. Refer to Section 1.1.1, "STP pump specifications" for the differences. Naming convention: •... -
Page 8: Stp Pump Specifications
1,300 L/min) is used. When the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. Consult Edwards about conditions. A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure. -
Page 9: Condition For The Water-Cooling Unit
Ar gas is vacuumed continuously and the backing backing-pump (pumping speed: 6,500 L/min) is used. It is changed depending on condition. For example, when the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards. 1.1.2... -
Page 10: Stp-F2203 Series: Vg250/Iso250F
STP-F2203 Series Turbomolecular Pump φA φ289 φ296 φ341 φ207 Ａ Figure 1 - STP-F2203 series: VG250/ISO250F Item Description Inlet Screw hole for legs 4-M16 depth 30 port VG250 ISO250F Screw hole of legs 4-M16 depth 32 flange φA Height of the purge port Cooling water port 2-Rc STP cable connector... -
Page 11: Stp-F2203 Series (With Tms Unit): Vg250/Iso250F
STP-F2203 Series Turbomolecular Pump (10) φA φ289 φ296 φ341 φ207 Ａ (11) Figure 2 - STP-F2203 series (with TMS unit): VG250/ISO250F Item Description Inlet Screw hole for legs 4-M16 depth 30 port VG250 ISO250F flange Screw hole of legs 4-M16 depth 32 φA Height of the purge port TMS heater... -
Page 12: Label Affixing Positions
STP-F2203 Series Turbomolecular Pump Label affixing positions Refer to the Instruction Manual (A) for the details of the labels 1 to 7. Figure 3 - Label affixing positions for the STP pump STP pump installation warning label Hot surface warning label Heavy product caution label Connector caution label STP pump/control unit caution label... -
Page 13: Accessories
STP-F2203 Series Turbomolecular Pump Accessories Item Q’ty Remarks Inlet port cover Outlet port cover STP connector cover Blank flange for purge port KF10 Clamping ring for purge port KF10 O-ring washer for purge port KF10 Instruction Manual (B) This manual July 08 Issue 1-a... - Page 14 STP-F2203 Series Turbomolecular Pump This page intentionally blank. July 08 Issue 1-a...
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Page 15: How To Secure The Stp Pump
When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more. Note: When using any securing method other than that specified in this manual, contact Edwards. When securing the inlet port with bolts There are two installation methods of the STP pump as shown in Figure 4. -
Page 16: Example Of Securing The Stp Pump
STP-F2203 Series Turbomolecular Pump Pump model STP-F2203 series Flange type VG250 ISO250F Torque in pump abnormality 7.6×10 6.5×10 [Nm] Base (4 positions) securing Shape R.D.S.B. Standard R.D.S.B. R.D.S.B. Carbon steel Carbon steel Carbon steel Carbon steel Material Alloyed steel Alloyed steel Alloyed steel Alloyed steel Recommended... -
Page 17: Shape Of Reduced Diameter Shank Bolts
STP-F2203 Series Turbomolecular Pump Refer to Figure 5 for the shape of Reduced Diameter Shank Bolts. (R.D.S.B.) Inlet port flange Vacuum equipment Washer Figure 5 - Shape of reduced diameter shank bolts Use Table 3 in conjunction with Figure 5. Ensure that the surface of the levelled and smoothed area (expressed by "D"... - Page 18 STP-F2203 Series Turbomolecular Pump CAUTION Install the flange securing bolts in the proper position with the special square washer shown in Figure 6. Failure to do so may cause abnormal operation of the torque reduction mechanism and damage the pump. CAUTION When any internal abnormality/error results in high rotational torque, causing the torque reduction mechanism to operate, the pump may rotate a maximum of 5 degrees around the rotor rotation at...
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Page 19: Temperature Management System (Tms)
STP-F2203 Series Turbomolecular Pump TEMPERATURE MANAGEMENT SYSTEM (TMS) WARNING The STP pump operates at high temperatures while the Temperature Management System (TMS) unit is in operation. NEVER touch the STP pump and its peripheral equipment while TMS unit are in operation. Operators can burn hands. The Temperature Management System (TMS) maintains the temperature of the turbomolecular pump by monitoring the temperature with temperature sensor in the base of the turbomolecular pump, and performing the TMS valve and TMS heater ON/OFF control. -
Page 20: Tms Connection Cable
STP-F2203 Series Turbomolecular Pump TMS Connection cable The components of the TMS connection cables are as follows: (see Figure 8) Item Description Function Connector X5A For the STP control unit CON1 HEATER OUT connector For the TMS heater CON2 COOLING VALVE OUT connector For the TMS valve CON3 TC IN connector For the TMS sensor cable... -
Page 21: Tms Heater
STP-F2203 Series Turbomolecular Pump TMS heater The TMS heater heats the base of the STP pump. It’s fitted with the STP-F2203CV series at the factory. TMS valve The TMS valve controls the cooling water in order to maintain a constant temperature inside the STP pump. -
Page 22: Installation Of The Tms Unit
STP-F2203 Series Turbomolecular Pump Installation of the TMS unit CAUTION DO NOT install the TMS unit in places with high temperature, humidity, noise, vibration, or other unstable environment. CAUTION DO NOT apply force to the TMS unit and cables during installation and DO NOT bend the cables excessively. -
Page 23: Condition For The Tms Unit
STP-F2203 Series Turbomolecular Pump Condition for the TMS unit Item Condition Ambient temperature range °C 0 to 40 Storage temperature range °C -20 to 55 Input voltage Same voltage as the STP control unit 200 to 240 Vac Temperature control method Control ON/OFF of the TMS heater and cooling water Setting temperature °C... - Page 24 STP-F2203 Series Turbomolecular Pump This page intentionally blank July 08 Issue 1-a...
- Page 25 For more information, contact the nearest Service Office. Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8822 International +81-47-458-8822 Facsimile: Domestic 047-458-8833 International +81-47-458-8833 Copyright 2008 Edwards Japan Limited. All rights reserved.