Table Of Contents - Edwards STP-L451 Series Instruction Manual

CONTENTS
Section Title
1 INTRODUCTION
1.1 Scope and definitions
1.2 Electromagnetic compatibility
1.3 Limited warranty
1.3.1 Item warranted
1.3.2 Disclaimer
1.3.3 Spare parts
1.4 Precautions for safe operation of the STP pump
1.4.1 Usable gases
1.5 Maintenance and inspection precautions
1.6 Labels
1.7 Operation principle of the STP pump
1.8 Temperature management system
1.9 Name of the STP pump
2 INSTALLATION OF THE STP PUMP
2.1 Precautions before installation
2.1.1 Operating environment
2.1.2 Installation area
2.1.3 Bench
2.2 Unpacking
2.2.1 Unpacking the STP pump
2.3 How to install the STP pump
2.3.1 Cleaning the seal
2.3.2 STP pump installation positions
2.3.3 Secure the STP pump
2.3.4 Precautions of vacuum piping
2.3.5 Vacuum piping method
2.3.6 Connecting the purge port
2.3.7 Connecting the water cooling pipe
2.3.8 Attaching a baking heater
2.3.9 Installation of the air cooling unit
2.3.10 Installation of the TMS unit
STP Series Turbomolecular Pump
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MT-00E-001-M
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