External Appearance Of Stp-Is1607S/Is1607Cs/Is1607Bs - Edwards STP-iS1607 Series Instruction Manual

2
No.
1 Center of gravity
2 Height of water cooling port
3 Control unit
4 Outlet port flange
5 Screw hole for securing the base
6 Purge port
Inlet port flange
φA
φB
C (1)
D
E
φF
G
H
I (4)
J (2)
K (6)
MT-94E-001-C
Page 18
STP-iS1607 Series Turbomolecular Pump
Item
ICF203 ISO160F VG150
203 225 235
22 15
228 224 222
430 430 430
20 20
181 200 210
9º 22.5º 22.5º
20-φ8.4 8-φ11 8-φ12
263 263 263
319 319 319
335 335 335
Figure 8 - External appearance of STP-iS1607S/iS1607CS/iS1607BS
Description
Rc1/4
KF40
4-M8, Depth 20
Plug/KF10
ICF253 ISO200F
253 285
15 25 16
220 192
428 390
20 20 20
231.8 260
15º 15º
24-φ8.4 12-φ11
261 223
317 279
333 295
VG200 ISO250F
300 335
16 16
190 186
390 390
20 20
270 310
22.5º 15º
8-φ15 12-φ11
223 223
279 279
295 295