Edwards STP Series Instruction Manual
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Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual

Turbomolecular pump & control unit
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Instruction Manual
STP Series Turbomolecular Pump
STP EtherCAT
Applicable Models
Read through the Safety Precautions and each
section of this Manual carefully before using the STP
pump.
Keep this Manual in a place where you can quickly
access it at any time.
Read this Manual thoroughly and keep it with the
Turbomolecular Pump and Control unit Instruction
Manual.
& Control Unit
®
Interface
◼ SCU-800
◼ SCU-801
◼ SCU-1600
◼ SCU-1601
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
MT-49E-A01-E
2023.08

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  • Page 1 Keep this Manual in a place where you can quickly access it at any time. Read this Manual thoroughly and keep it with the Turbomolecular Pump and Control unit Instruction Manual. 2023.08 Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
  • Page 2 This page is intentionally blank.

  • Page 3: Table Of Contents

    ® STP EtherCAT Interface CONTENTS PAGE Section Title Page INTRODUCTION Scope and definitions General description User connections and indicator for the EtherCAT interface TECHNICAL DATA EtherCAT network connectors USB connector Operating and storage data INSTALLATION Unpacking Precautions before installation EtherCAT Interface panel 3.3.1 EtherCAT IN and OUT connector 3.3.2...
  • Page 4 ® STP EtherCAT Interface ILLUSTRATIONS PAGE Figure Title Page SCU-800/801, SCU-1600/1601 with EtherCAT Interface User interface of EtherCAT Interface Example of cable installation in metallic duct Front panel of SCU-800/801 and SCU-1600/1601 TABLES Table Title Page EtherCAT socket pin-out Setting values for STP pump LED functions Device Profile objects TRADEMARK CREDITS...

  • Page 5: Introduction

    Interface (abbreviated to "EtherCAT Interface" throughout this manual). You must use the EtherCAT Interface as specified in this manual otherwise the protection provided by the equipment may be impaired. Edwards takes no responsibility for damage or injury caused by improper use of the equipment.

  • Page 6: General Description

    ® STP EtherCAT Interface General description The EtherCAT Interface acts as a gateway between the EtherCAT protocol and RS232/RS485 based ASCII serial protocol used by the STP control unit. It realizes the remote control through EtherCAT network. The EtherCAT Interface is integrated into the rear side of the STP control unit. The setting switches, indicators and connectors for the EtherCAT are on the rear panel.

  • Page 7: User Connections And Indicator For The Ethercat Interface

    • RJ45 socket 1 and 2 – EtherCAT IN and OUT network connectors. • USB Mini socket – connection for software upgrades by Edwards service personnel. • L/A (Link/Activity) LED (green) (one over each RJ45 socket) – indicates network activity.
  • Page 8 ® STP EtherCAT Interface This page is intentionally blank. MT-49E-A01-E Page 4...

  • Page 9: Technical Data

    ® STP EtherCAT Interface TECHNICAL DATA EtherCAT network connectors Connector type: RJ45 socket Mating part: Standard RJ45 plug Signal levels: Ethernet 100 base TX compliant USB connector Connector type: USB Min-B socket Mating part: USB Min-B plug Protocol: USB 2.0 full speed compatible Operating and storage data Operating temperature range: 0 to +40°C...
  • Page 10 ® STP EtherCAT Interface This page is intentionally blank. MT-49E-A01-E Page 6...

  • Page 11: Installation

    Check outer package for damage and that the delivery note corresponds to the purchase order. Note : The EtherCAT Interface is implemented into the STP control unit by Edwards Note : It is recommended to keep the packaging materials, such as the corrugated fibreboard container and cushioning material for possible re-use.

  • Page 12: Ethercat In And Out Connector

    3.3.2 Mini-USB connector The Mini-USB socket will normally be used by Edwards service personnel for code upgrades. It can also be used to power the EtherCAT Interface without the need to connect it to a pump. To utilise this socket, connect a standard Mini-USB lead (type A to Mini-USB type B) between a PC and the EtherCAT Interface.
  • Page 13 ® STP EtherCAT Interface CAUTION Connect each cable securely with caution, avoiding any obstacles. DO NOT place heavy objects on the cables or bend them excessively. Support each cable so as not to apply direct force to the connectors or terminals. If any problem occurs in cables, connectors or terminals, the STP pump may not function normally.
  • Page 14 ® STP EtherCAT Interface This page is intentionally blank. MT-49E-A01-E Page 10...

  • Page 15: Operation

    ® STP EtherCAT Interface OPERATION WARNING The EtherCAT Interface provides remote control of an Edward’s pump. You should refer to the safety information in the pump and the control unit instruction manual. This interface should not be relied upon for safety related functions. Setting communication parameters As defined in Section 1.2, the EtherCAT Interface acts as a gateway between the EtherCAT protocol and RS232/RS485 based ASCII serial protocol used by the STP pump.

  • Page 16: Led's

    ® STP EtherCAT Interface LED’s The indicators on the EtherCAT Interface are in accordance with the EtherCAT standard. Table 3 details the states and meanings of the LED’s on the EtherCAT Interface. LED/color Mode Meaning PWR(power) No powered / green Powered to the unit No link to the next device detected.

  • Page 17: Taking And Releasing Control

    ® STP EtherCAT Interface Taking and releasing control When the EtherCAT Interface is used as the remote operation tool of the STP pump, the remote switch in the front panel of the STP control unit has to be correctly set. If its switch is set to ‘REMOTE ON' position, the "Remote LED"...

  • Page 18: Using Turbo Low Speed (Available For Scu-1600/1601 Only)

    ® STP EtherCAT Interface Using Turbo Low Speed (available for SCU-1600/1601 only) The STP pump is normally driven in speed set “Turbo Normal Speed Setpoint (0x8003)”. Turbo Low Speed is a function alternated between “Normal Speed” and “Low Speed” by “Turbo Low Speed (0x7003)”.

  • Page 19: Rotation Inhibit (Available For Scu-1600/1601 Only)

    ® STP EtherCAT Interface Rotation INHIBIT (available for SCU-1600/1601 only) SCU-1600/1601 has the Rotation “INHIBIT function”. When Rotation “INHIBIT function” is set to “ENABLE” and the pins between “INHIBIT IN” and “COM” in “REMOTE X7” connector are opened, the STP pump does not rotate despite the presence of a start signal. Rotation “INHIBIT Function”...

  • Page 20: Protocol

    Firmware Update Over EtherCAT Refer to the EtherCAT MainDevice documentation for specific details. For firmware update to an EtherCAT Turbo Pump a suitable .efw from Edwards will be required such as: *.efw (* = software name). The Edwards version of these files contains a header that the SubordinateDevice will check for suitability.
  • Page 21 ® STP EtherCAT Interface Table 4 - Device Profile objects Data Index Default Name Description Index Type Access Rx/Tx Manufacture Identity 0x1000 UDINT Device Type Bit 0-15: device profile number (5003). Bit 16-31: 0x0000 ‘EtherCAT Turbo’ 0x1008 STRING Manufacturer Device Name 0x1009 STRING Manufacturer...
  • Page 22 ® STP EtherCAT Interface Data Index Default Name Description Index Type Access Rx/Tx 0x1A00 TxPDO Default Mapping 0x01 BIT1 0x01010060 Rotation 0x02 BIT1 0x01020060 Normal 0x03 BIT1 0x01030060 Acceleration 0x04 BIT1 0x01040060 Deceleration (Includes Braking) 0x05 BIT1 0x01050060 Remote/Local 0x06 BIT1 0x01070060 Turbo Low Speed...
  • Page 23 ® STP EtherCAT Interface Data Index Default Name Description Index Type Access Rx/Tx 0x09 BOOL Alarm 1:Alarm; 0:Not Alarm 0x0A BOOL Warning 1:Warning; 0:Not Warning 0x0E BOOL TxPdoState True if pump data invalid 0x11 Turbo Speed 0.1[%] 1000(100.0%): Rated Speed 0(0.0%): No rotation 0x12 Turbo Current...
  • Page 24 ® STP EtherCAT Interface Data Index Default Name Description Index Type Access Rx/Tx 0xF000 Semiconductor Device Profile 0x01 UINT Index Distance 0x02 UINT Maximum Number of Modules 0xF010 Module Profile List 0x01 ARRAY Module Profile 2070 (0x0816) UDINT Active Warning/Error Information 0xF380 USINT...
  • Page 25 ® STP EtherCAT Interface Data Index Default Name Description Index Type Access Rx/Tx Bit8: Controller Fail Bit9: Can not start Bit10: Accel. Overtime Bit11: Brake Overtime Bit12: Bearing Err Bit13: Bearing Sensor Err Bit14: TC Over Temperature Bit15: TC Sensor Err Bit16: TC Heater Err Bit17: TC Valve Err Bit18: Other (not in the above)
  • Page 26 0xF9F2 0x01 ARRAY SDP Functional SDP functional generation number of this module. UDINT Generation Number 0xF9F3 STRING Vendor Name ‘Edwards’ 0xF9F4 0x01 ARRAY Semiconductor ‘Turbo Pump’ STRING SDP Device Name String identifying the device type of this module. 0xF9F5 0x01...
  • Page 27 ® STP EtherCAT Interface Data Index Default Name Description Index Type Access Rx/Tx 0xF9F6 UDINT Time since power Time since device has been powered on in seconds. 0xF9F7 UDINT Total Time Total time device has received power in seconds. It powered persists through power cycle.
  • Page 28 ® STP EtherCAT Interface Data Index Default Name Description Index Type Access Rx/Tx Factory Reset: These values are set to profile default - Safe State = 0, Warning and Error Masks = 0xFFFFFFFF. These values may have been set on installation - (Turbo Low and Normal Speed Setpoints) they are not reset so as not to overwrite installation values, i.e.
  • Page 29 ® STP EtherCAT Interface Data Index Default Name Description Index Type Access Rx/Tx Byte 2: 0x73 Byte 3: 0x65 Byte 4: 0x72 A valid command is acted upon immediately and reads back as Nulls. 0x02 USINT Status 0x03 ARRAY Response Byte 0: = 0 [0..1] of Byte 1: = 0 (Unused)
  • Page 30 ® STP EtherCAT Interface Data Index Default Name Description Index Type Access Rx/Tx 0x02 USINT Status 0x03 ARRAY Response Byte 0: = 0 [0..1] of Byte 1: = 0 (Unused) BYTE 0xFBF3 Calculate This command calculates a checksum for the non- Checksum volatile parameters.
  • Page 31 ® STP EtherCAT Interface Data Index Default Name Description Index Type Access Rx/Tx Read: Bit 1 = 1: SubordinateDevice saves the non-volatile parameters automatically when they are written Write: All writable, non-volatile parameters will loaded from non-volatile memory when the following is sent: Byte 0: 0x6C Byte 1: 0x6F Byte 2: 0x61...
  • Page 32 ® STP EtherCAT Interface This page is intentionally blank. MT-49E-A01-E Page 28...

  • Page 33: Maintenance

    ® STP EtherCAT Interface MAINTENANCE Inspect the electrical connections Carry out the following checks regularly when maintaining the pumping system. 1. Inspect the electrical cables and check that they are not damaged. Repair or replace any damaged cables. 2. Inspect the electrical connections and check that they are secure. Tighten any loose connections found.
  • Page 34 ® STP EtherCAT Interface This page is intentionally blank. MT-49E-A01-E Page 30...

  • Page 35: Service, Spares And Accessories

    A majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, state for each part required: •...
  • Page 36 ® STP EtherCAT Interface This page is intentionally blank. MT-49E-A01-E Page 32...
  • Page 37 For more information, contact the nearest Service Office. http://www.edwardsvacuum.com/ Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8836 International +81-47-458-8836 Facsimile: Domestic 047-458-8835 International +81-47-458-8835 Copyright 2023 Edwards Japan Limited. All rights reserved.

This manual is also suitable for:

Scu-800Scu-801Scu-1600Scu-1601

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