Technical Data; Stp Pump Specifications - Edwards STP Series Instruction Manual

TECHNICAL DATA

2
2.1

STP pump specifications

The values shown below are typical. They are not guaranteed.
Flange size
*1
Pumping speed
*1
Compression ratio
*1
Ultimate pressure
Maximum backing pressure
Critical operating backing pressure
Flow rate of purge gas <N
Rated speed
Backup rotational speed
Starting time
Stopping time
Noise
Temperature Management System (TMS)
Baking temperature
Rotor blade
temperature warning
*7
sensor
Lubricating oil
Installation position
Cooling method
*10
Mass
Ambient temperature range
Storage temperature range
*1 Pumping speed, compression ratio, ultimate pressure and backing pressures are measured by Edwards Japan method.
(Ultimate pressure is a value after baking.)
STP-iXA4507 series Turbomolecular Pump
Item
Inlet port flange
Outlet port
Purge port
N L/s
2
Ar L/s
H L/s
2
N Ar
2,
H
2
Pa (Torr)
*1,2
Pa (Torr)
*1,*3
Pa (Torr)
*4,5 3
> Pa·m /s(SCCM)
2
rpm
*6
rpm
min
min
dB
°C
*8
Accuracy °C
*9
Safety feature
kg
°C
°C
STP-iXA4507C/CV/CV3/B/BV/BV3
VG300 ISO320F VG350
Flange: KF50, Pipe: 52.2mm (ID)
KF10
3,900 4,100
3,400 3,600
1,800 1,800
8
>10
3
1.0×10
-7 -9
10 (10 ) [after baking]
266 (2.0)
320 (2.4)
-2
-2
8.4×10 ±1.7×10
24,240
Approximately 5,000
≦11
≦16
<55 (at 24,240 rpm)
Available
<120 (Do not use baking heater with TMS unit)
±3
Can be enabled when option is applied
Not necessary
Free
Water cooling
111 111 104
0 to 40
-25 to 55
VG400
4,600
4,000
1,800
(50±10)
111
MT-91E-001-0
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