Tms Heater; Tms Valve; Installation Of The Tms Unit; Connecting Cables To The Tms Unit - Edwards STP Series Instruction Manual

3.2

TMS heater

PAG
The TMS heater heats the base of the STP pump. It's fitted with the STP pump at the factory. The
3
E
overheat prevention device is set on the TMS heater.
16
3.3

TMS valve

The TMS valve controls the cooling water in order to maintain a constant temperature inside the STP
pump. The shape of the TMS valve varies according to specifications.
3.4

Installation of the TMS unit

DO NOT install the TMS unit in places with high temperature, humidity, noise, vibration, or other unstable
DO NOT apply force to the TMS unit and cables during installation and DO NOT bend the cables
3.4.1

Connecting cables to the TMS unit

See the "TMS unit Instruction Manual".
3.4.2

Connecting the pump and TMS valve

Connect the cooling water pipe to the TMS valve. Pay special attention to the port label on the cooling
water valve to connect proper port. Connect the NC side (or OUT side) of the TMS valve to the STP
pump, and COM side (or IN side) of the TMS valve to the equipment.
Use cooling water under the conditions in Section 3.6, "Condition for the TMS unit""
Note: Procure and connect the cooling water pipe and install the electromagnetic cooling water
valve at your site. The diameter of the valve is Rc1/4 (ISO standard).
MT-66E-0A1-E
Page 16

STP-XA2703BV155/XA3203BV155 Turbomolecular Pump

CAUTION
environment.
CAUTION
excessively.