Maximum Gas Flow-Rate - Edwards STP-iS1607 Series Instruction Manual

2.2

Maximum gas flow-rate

Cooling
water
To 25 ºC N
2
Ar
To 25 ºC N
2
Ar
*1
The maximum gas flow-rate is applicable under conditions that N
depending on condition. For example, when the gas is exhausted intermittently, the gas more than the maximum gas flow-
rate can be exhausted. In this case, contact Edwards.
*2
Use the STP pump with purge ports (optional accessory) when introduce a purge gas. Refer to Section 3.6, "Introducing N
gas (for the STP pump equipped with purge port)" for the connection method of purge ports.
STP-iS1607 Series Turbomolecular Pump
*1
Purge gas
Gas
*2
flow rate
3
Pa·m /s
(SCCM)
N/A
Pa·m 3 /s
(SCCM)
3
Pa·m /s
(SCCM) 8.4×10
-2
±1.7×10
(50±10)
3
Pa·m /s
(SCCM)
Back pump
> 1,300 L/min > 10,000 L/min
3.72
(2,200)
1.86
(1,100)
3.72
(2,200)
-2
1.86
(1,100)
or Ar gas is vacuumed continuously. It is changed
2
4.89
(2,900)
1.86
(1,100)
4.89
(2,900)
1.86
(1,100)
2
MT-94E-001-C
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