Operation Principle Of The Stp Pump; Cross Sectional View Of The Stp Pump - Edwards STP Series Instruction Manual

1.7

Operation principle of the STP pump

1
The STP series pump is a series of a magnetically-levitated turbomolecular pumps, each with the
following features:
• Oil free
• Low vibration
• High reliability
March 10
STP Series Turbomolecular Pump
1. Rotor blade
2. Stator blade
3. Radial sensor
4. Radial electromagnet
Figure 8 - Cross sectional view of the STP pump
5. Axial sensor
6. Axial electromagnet
7. Touch down bearing
8 Issue 1-b