Edwards STP Series Instruction Manual
Turbomolecular pump
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Also See for STP Series:
- Instruction manual (167 pages) ,
- Instruction manual (23 pages) ,
- Instruction manual (37 pages)
Table of Contents
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Instruction Manual (B)
STP Series Turbomolecular Pumps
STP-A1603 Series
Pump Specific Information
Model name
STP-1603 series
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
Instruction Manual (B):
(This Instruction Manual)
Instruction Manual (C):
Voltage
200 - 240 Va.c.
STP pump generic Instruction Manual
Supplied with STP pump
STP pump specific information
Supplied with STP pump
STP control unit Instruction Manual
Supplied with STP control unit
Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.
MT-46E-101-A
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Table of Contents
Related Manuals for Edwards STP Series
Summary of Contents for Edwards STP Series
- Page 1 Supplied with STP pump Instruction Manual (B): STP pump specific information (This Instruction Manual) Supplied with STP pump Instruction Manual (C): STP control unit Instruction Manual Supplied with STP control unit Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.
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- Page 3 The description of this product consists of the three-volumed Instruction Manuals. Read through each Instruction Manual before operation. The separate volume contents of each description are as follows: Instruction Manual (A) STP pump generic Instruction Manual: • Introduction • Installation of the STP pump •...
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Page 5: Table Of Contents
STP-A1603 Series Turbomolecular Pump CONTENTS PAGE Section Title Page TECHNICAL DATA Applicable pump specifications 1.1.1 STP pump specifications 1.1.2 Condition for the water-cooling unit External appearance of the STP pump Label affixing positions Accessories HOW TO SECURE THE STP PUMP When securing the inlet port with bolts When securing the inlet port flange with claw clamps When installing the damper in the inlet port flange... - Page 6 STP-A1603 Series Turbomolecular Pump ILLUSTRATIONS PAGE Figure Title Page STP-A1603 series: ISO200F/VG200 STP-A1603 series: ICF253 Label Affixing Positions for the STP Pump Example of securing the STP pump (when securing the inlet port with bolts) Example of securing the STP pump (when securing the inlet port flange with claw clamps) Example of securing the STP pump (when installing the damper in the inlet port flange)
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Page 7: Technical Data
STP-A1603 Series Turbomolecular Pump TECHNICAL DATA Applicable pump specifications Model Name Specification Applicable Control unit STP-A1603 series Advanced high-throughput type SCU-750/SCU-800 Naming convention: • "C" following a pump model name indicates a corrosion resistant type (e.g. STP-A1603C). • "CV" indicates an enhanced corrosion resistant type with TMS (e.g. -
Page 8: Stp Pump Specifications
STP-A1603 Series Turbomolecular Pump 1.1.1 STP pump specifications The values shown below are typical. They are not guaranteed. Item A1603 series Flange size Inlet port flange ISO200F/VG200/ICF253 Outlet port flange KF40 Pumping speed 1600 1200 Compression ratio >10 7×10 Ultimate pressure Pa (Torr) ) order [after baking] Maximum gas flow rate... -
Page 9: Condition For The Water-Cooling Unit
1,300 L/min) is used. When the gas is exhausted intermittently, the gas more than the maximum gas flow rate can be exhausted. Consult Edwards about conditions. A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure. -
Page 10: Stp-A1603 Series: Iso200F/Vg200
STP-A1603 Series Turbomolecular Pump 8-φ15 12-φ11 φ285 φ300 (10) φ270 φ237 (11) ≧ 315 (12) (13) Figure 1 - STP-A1603 series: ISO200F/VG200 Item Description Inlet port flange 200F Inlet port flange Height of the purge port Bending dimension of the STP connection cable Temperature sensor connector Optional accessory... -
Page 11: Stp-A1603 Series: Icf253
STP-A1603 Series Turbomolecular Pump 24-φ8.4 φ253 φ270 φ237 (10) ≧ 315 (11) (12) Figure 2 - STP-A1603 series: ICF253 Item Description Inlet port flange Height of the purge port Bending dimension of the STP connection cable Temperature sensor connector Optional accessory Screw hole of legs depth 20 Screw hole for legs... -
Page 12: Label Affixing Positions
STP-A1603 Series Turbomolecular Pump Label affixing positions Refer to the Instruction Manual (A) for the details of the labels 1 to 7. Figure 3 - Label affixing positions for the STP pump STP pump installation warning label Hot surface warning label Heavy product caution label Connector caution label STP pump/control unit caution label... -
Page 13: Accessories
STP-A1603 Series Turbomolecular Pump Accessories Item Q’ty Remarks Inlet port cover Outlet port cover STP connector cover Blank flange for purge port KF10 or KF16 Clamping ring for purge port KF10 or KF16 O-ring washer for purge port KF10 or KF16 4 legs are attached to the STP pump Rubber foot for leg... - Page 14 STP-A1603 Series Turbomolecular Pump This page intentionally blank. July 08 Issue 1-a...
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Page 15: How To Secure The Stp Pump
Use a material that has a tensile strength of 600N/mm or more. When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more. Note: When using any securing method other than that specified in this manual, contact Edwards. July 08 Issue 1-a... -
Page 16: When Securing The Inlet Port With Bolts
STP-A1603 Series Turbomolecular Pump When securing the inlet port with bolts Refer to Table 2 for maximum predicted torque in any pump abnormality and for the recommended type of securing bolt for inlet port flange. Secure the inlet port flange with the correct size bolts as specified in the Inlet Port Flange Standard. Secure the base with either the 8 screws for legs or the 8 attached legs. -
Page 17: When Securing The Inlet Port Flange With Claw Clamps
STP-A1603 Series Turbomolecular Pump When securing the inlet port flange with claw clamps Refer to Table 2 for rotational torque. When securing the inlet port flange with only the claw clamp, the vacuum equipment cannot withstand the maximum rotational torque generated by the worst-case failure. To make the vacuum equipment withstand abnormal torque, secure the base with either the 8 screws for legs or the 8 attached legs. -
Page 18: When Installing The Damper In The Inlet Port Flange
STP-A1603 Series Turbomolecular Pump When installing the damper in the inlet port flange CAUTION Use a damper only at the vertically upright position. CAUTION DO NOT remove the bolts and nuts attached to reinforce the damper. Refer to Table 2 for rotational torque. When using a damper, secure the base with either the 8 screws for legs or the 8 attached legs. -
Page 19: Temperature Management System (Tms)
STP-A1603 Series Turbomolecular Pump TEMPERATURE MANAGEMENT SYSTEM (TMS) WARNING The STP pump operates at high temperatures while the Temperature Management System (TMS) unit is in operation. NEVER touch the STP pump and its peripheral equipment while TMS unit are in operation. Operators can burn hands. The Temperature Management System (TMS) maintains the temperature of the turbomolecular pump by monitoring the temperature with temperature sensor in the base of the turbomolecular pump, and performing the TMS valve and TMS heater ON/OFF control. -
Page 20: Tms Connection Cable
STP-A1603 Series Turbomolecular Pump TMS connection cable The components of the TMS connection cables are as follows: (see Figure 8) Item Description Function Connector X5A For the STP control unit CON1 HEATER OUT connector For the TMS heater CON2 COOLING VALVE OUT connector For the TMS valve +5 % -0 %... -
Page 21: Installation Of The Tms Unit
STP-A1603 Series Turbomolecular Pump Installation of the TMS unit CAUTION DO NOT install the TMS unit in places with high temperature, humidity, noise, vibration, or other unstable environment. CAUTION DO NOT apply force to the TMS unit and cables during installation and DO NOT bend the cables excessively. -
Page 22: Replacing The Fuses In The Tms Connection Cable
STP-A1603 Series Turbomolecular Pump Replacing the fuses in the TMS connection cable Fuses for the TMS valve and the TMS heater of STP-A1603CV series are set inside the TMS connection cable. Contact the Service office, when replacement is required. Condition for the TMS unit Item Condition Ambient temperature range... - Page 23 For more information, contact the nearest Service Office. Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8822 International +81-47-458-8822 Facsimile: Domestic 047-458-8833 International +81-47-458-8833 Copyright 2008 Edwards Japan Limited. All rights reserved.