Page 1 Read through the Safety Precautions and each section of this Manual carefully before using the STP pump. Keep this Manual in a place where you can quickly access it at any time. Copyright 2017 Edwards Japan Limited. All rights reserved. Printed in Japan.
Page 3: Table Of Contents
STP-iX457/iXU457 Series Turbomolecular Pump CONTENTS PAGE Section Title Page INTRODUCTION Scope and definitions Applied standards Limited warranty 1.3.1 Warranty period 1.3.2 Item warranted 1.3.3 Disclaimer 1.3.4 Spare parts Precautions for safe operation of the STP pump 1.4.1 Usable gases Maintenance and inspection precautions Labels Operation principle of the STP pump STP pump specification...
Page 4 STP-iX457/iXU457 Series Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page 3.10 Attaching a baking heater 3.11 Cooling the STP pump 3.12 Air-cooling unit U1-86 3.12.1 Parts list 3.12.2 Installation procedure 3.12.3 Maintenance 3.13 Connecting to semiconductor equipment 3.13.1 Connecting to power 3.13.2 Emergency off circuit (EMO circuit) OPERATION...
Page 5 STP-iX457/iXU457 Series Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page 5.3.3 Control command (in the RS232/RS485 single point connection) 5.3.4 Query command (in the RS232/RS485 single point connection) 5.3.5 Transmission data format 5.3.6 Frame control (checksum) 5.3.7 Error control 5.3.8 Transmission frame in the RS485 multi-point connection 5.3.9 Control command in the RS485 multi-point connection...
Page 6 STP-iX457/iXU457 Series Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page 7.1.3 Abnormal state of magnetic bearing (Disturbance) 7.1.4 Excessive vibration (Disturbance) 7.1.5 Motor driver overload (DRV Overload) 7.1.6 Overheating inside the STP pump (MOTOR Overheat) 7.1.7 Overheating inside the control unit (CNT Overheat) 7.1.8 Overspeed "WARNING"...
Page 7 STP-iX457/iXU457 Series Turbomolecular Pump ILLUSTRATIONS PAGE Figure Title Page STP pump installation warning label Hot surface warning label Heavy product caution label High voltage device caution label Rotation instruction label Cross sectional view of the STP pump External appearance of STP-iX457 External appearance of STP-iX457C External appearance of STP-iXU457 External appearance of STP-iXU457C...
Page 8 STP-iX457/iXU457 Series Turbomolecular Pump ILLUSTRATIONS (CONTINUED) PAGE Figure Title Page X2 REMOTE output signal pins X2 REMOTE output signal pin which changes according to abnormality notification / warning notification X2 REMOTE output signal pin which changes according to rotation speed Serial port X2 connector (High density D-Sub15) RS485 connections...
Page 9 STP-iX457/iXU457 Series Turbomolecular Pump TABLES PAGE Table Title Page Environmental requirements for installation Eyebolt size Pump functions Control unit front panel functions Tightening torque of bolt Maximum torque predicted and recommended securing bolt for inlet port flange Number of claw clamps for flange size Suitable parts for DC power cable Number of claw clamps for flange size X3 OPTION connector function setting...
Page 10 STP-iX457/iXU457 Series Turbomolecular Pump PAGE viii This page intentionally blank MT-86E-001-F Page viii...
Page 11: Introduction
INTRODUCTION Scope and definitions This manual provides installation, operation and maintenance instructions for the Edwards Turbomolecular Pump (abbreviated to "STP pump" throughout this manual). You must use the STP pump as specified in this manual otherwise the protection provided by the equipment may be impaired.
Page 12: Applied Standards
- in homogeneous materials (subject to the exemptions allowed by the Directive). This information relates only to products sold on or after the date of this certificate. Edwards has taken all reasonable steps to confirm this statement, which is based mainly on information from our suppliers. Whilst the RoHS Directive does not legally apply to this vacuum equipment, we recognize that component compliance is relevant to many of our customers.
Page 13: Limited Warranty
This WARRANTY applies to the customer to whom Edwards has delivered this product. 1.3.1 Warranty period Edwards warrants this product against defects for a period of two (2) years from the date of delivery or during the period specified in the agreement made by and between the customer and Edwards. 1.3.2 Item warranted This warranty applies only to the product delivered from Edwards to the customer.
Page 14: Disclaimer
STP-iX457/iXU457 Series Turbomolecular Pump 1.3.3 Disclaimer Edwards makes no warranty with respect to any damage occurred due to any of the following during the warranty period: Handling, operation or maintenance other than that specified herein. Failure to follow any of the warnings or cautions enumerated in this manual.
Page 15: Precautions For Safe Operation Of The Stp Pump
Precautions for safe operation of the STP pump 1.4.1 Usable gases Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the following gases, contact Edwards. Gases including alkaline metals except Li gas. Gases including Ga, Hg, In, or Sn. HBr gas.
Page 16: Maintenance And Inspection Precautions
STP-iX457/iXU457 Series Turbomolecular Pump Maintenance and inspection precautions Perform any maintenance or inspection of the STP pump under the condition that no power is applied to the STP pump (refer to SEMI S2 Section 13.2 - type 1), following Section 8, "MAINTENANCE AND INSPECTION".
Page 17: Heavy Product Caution Label
STP-iX457/iXU457 Series Turbomolecular Pump Heavy product caution label This label is affixed to the product with a weight of 18 kg or more. Follow the precautions of Section 3.2, "Unpacking and installation" so as not to cause any accident during handling. Figure 3 - Heavy product caution label Prohibition of disassembly label This label prohibits the decomposition of the control unit.
Page 18: Operation Principle Of The Stp Pump
STP-iX457/iXU457 Series Turbomolecular Pump Operation principle of the STP pump Turbomolecular pump (abbreviated to "STP pump" throughout this manual) is used for high vacuum pumping. It is principally used for manufacture and inspection equipment of semiconductor, flat panel, solar battery. The STP pump (Figure 6) is configured so that rotor blade (1) and stator blade (2) are aligned alternately in the axial direction.
Page 19 STP-iX457/iXU457 Series Turbomolecular Pump 1. Oil free Rotor blade (1) is supported by the magnetic bearing without mechanical contact. Therefore, the STP pump requires no lubrication oil unlike conventional turbomolecular pumps using ball bearings. 2. Low vibration The magnetic bearing consists of 5 pairs of active magnetic bearings. The rotor is supported in the radial direction by 4 pairs of radial direction active magnetic bearings that consist of radial sensor (3) and radial electromagnet (4).
Page 20: Stp Pump Specification
STP-iX457/iXU457 Series Turbomolecular Pump STP pump specification External appearance, installation and unpacking method differ depending to the STP pump specification. Refer to the followings: Standard type (Without anticorrosion Corrosion resistant type treatment type) STP-iX457/iXU457 STP-iX457C/iXU457C Naming convention: "C" following a pump model name indicates a corrosion resistant type.
Page 21: Technical Data
STP-iX457/iXU457 Series Turbomolecular Pump TECHNICAL DATA STP pump specifications The values shown below are typical. They are not guaranteed. Item STP-iX457/iX457C STP-iXU457/iXU457C Flange size Inlet port flange ICF152 ICF203 ICF152 ICF203 VG100 VG150 VG100 VG150 ISO100 ISO160 ISO100 ISO160 ISO100F ISO160F ISO100F ISO160F...
Page 22: Control Unit
STP-iX457/iXU457 Series Turbomolecular Pump Installation position Free Cooling method Natural air cooling (Air cooling: At baking and gas pumping) Mass Ambient temperature range °C 0 to 40 Storage temperature range °C -25 to 55 *1 Maximum backing pressure is the pressure when the working pressure rises suddenly without flowing gas. *2 Critical operating backing pressure is the pressure that allows continuous operation without flowing gas.
Page 23: External Appearance Of The Stp Pump
STP-iX457/iXU457 Series Turbomolecular Pump External appearance of the STP pump Item Description Center of gravity Control unit Outlet port flange KF25 Screw hole for securing the 4-M10 base Depth 18 Inlet ISO100 ISO100F ISO160 ISO160F ICF152 ICF203 VG100 VG150 port flange φ...
Page 24: External Appearance Of Stp-Ix457C
STP-iX457/iXU457 Series Turbomolecular Pump Item Description Center of gravity Control unit Outlet port flange KF25 Screw hole for securing the 4-M10 base Depth 18 Purge port KF10 Inlet ISO100 ISO100F ISO160 ISO160F ICF152 ICF203 VG100 VG150 port flange φ A φ...
Page 25: External Appearance Of Stp-Ixu457
STP-iX457/iXU457 Series Turbomolecular Pump Item Description Center of gravity Control unit Outlet port flange KF25 Screw hole for securing the 4-M10 base Depth 18 Inlet ISO100 ISO100F ISO160 ISO160F ICF152 ICF203 VG100 VG150 port flange φ A φ B φ F 130.2 22.5 11.25...
Page 26: External Appearance Of Stp-Ixu457C
STP-iX457/iXU457 Series Turbomolecular Pump Item Description Center of gravity Control unit Outlet port flange KF25 Screw hole for securing the 4-M10 base Depth 18 Purge port KF10 Inlet ISO100 ISO100F ISO160 ISO160F ICF152 ICF203 VG100 VG150 port flange φ A φ...
Page 27: Label Affixing Positions
STP-iX457/iXU457 Series Turbomolecular Pump Label affixing positions Refer to Section 1.6, "Labels" for the details of the labels 1 to 4, and 7. 2, 7 3, 7 STP pump installation warning label Heavy product caution label Prohibition of disassembly label Rotational direction instruction label Name plate Parts number...
Page 28 STP-iX457/iXU457 Series Turbomolecular Pump This page intentionally blank MT-86E-001-F Page 18...
Page 29: Installation Of The Stp Pump
Gases including Ga, Hg, In, or Sn. • HBr gas. Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine system gases. CAUTION If the STP pump is used in an area with radiation, contact Edwards. MT-86E-001-F Page 19...
Page 30: Environmental Requirements For Installation
A place free of exposure to radiation. No discharge of high voltage (more than 500 V) (If more than 500 V is discharged, contact Edwards). Others: An area free of exposure to direct sunlight, high humidity, dust, water drop, salty air, explosive or flammable gas, corrosive gas, excessive vibration and sources of electric noise.
Page 31: Installation Area
STP-iX457/iXU457 Series Turbomolecular Pump 3.1.2 Installation area Leave enough space for the followings in addition to that for the STP pump: (see Figure 12) Space for maintenance and inspection. Space for connecting cables. Space for the radiating fin of the control unit Space for the air-cooling unit (optional accessory) for the control unit CAUTION DO NOT bend the power cable excessively and beware of any obstacles when installing the STP...
Page 32: Bench
The bolt may not be able to be inserted from the lower side of the inlet port according to the shape of the inlet port flange. Note: When the external appearance of the STP pump is not in the manual, contact Edwards. 3.1.4 Insulation test DO NOT perform an insulation test on the control unit.
Page 33: Unpacking And Installation
Unpacking and installation Check outer package for damage and that the delivery note corresponds to the purchase order. If the STP pump is damaged, contact Edwards or their distributor. Note: It is recommended to keep the packaging materials, such as the corrugated fiberboard container and cushioning material for possible reuse.
Page 34: Example Of Lifting The Stp Pump (Horizontal Positioning)
STP-iX457/iXU457 Series Turbomolecular Pump When installing the STP pump horizontally using a crane or other appropriate, support pump casing, pump base, or control unit (see Figure 15). DO NOT apply face on convex parts, such as the outlet port or connectors by ropes. Doing so may the pump to fall, or deform and damage the parts. A crane due to lifting operations should withstand the load of five times or more the weight of the STP pump, and rope should be seven time or more.
Page 35: Jack-Up The Stp Pump
STP-iX457/iXU457 Series Turbomolecular Pump Use lifting devices when installing the STP pump under the equipment (see Figure 16). Moreover, when jacking up the bottom of the control unit, place the STP pump on the table which is larger than base size (see Figure 17). A device due to jacking up the STP pump should withstand the load of five times or more the weight of the STP pump.
Page 36: Stp Pump With Eyebolts
STP-iX457/iXU457 Series Turbomolecular Pump When installing the STP pump to the vacuum equipment in upside-down position, the STP- iX457/iXU457 series can be loft with the eyebolts (M8) attached to the screw holes for securing the base. (see Figure 18) A crane and eyebolts due to lifting operations should withstand the load of five times or more the weight of the STP pump, and rope should be seven time or more.
Page 37: Name And Function Of Each Part
STP-iX457/iXU457 Series Turbomolecular Pump Name and function of each part 3.3.1 Name and function of the pump The STP pump in Figure 19 is a typical pump model. Refer to Section 2, "TECHNICAL DATA". Figure 19 - Configuration of the STP pump Item Description Function...
Page 38: Name And Function Of The Control Unit
STP-iX457/iXU457 Series Turbomolecular Pump 3.3.2 Name and function of the control unit Figure 20 shows the front panel of the control unit. WARNING A hazardous live voltage may exist at the connectors that are marked with the warning sign . DO NOT touch the connecter. Doing so may result in electric shock.
Page 39: Control Unit Front Panel Functions
STP-iX457/iXU457 Series Turbomolecular Pump Item Description Function "STATUS" LED The state of the STP pump is indicated by the flashing pattern of the LED. Refer to Section 4.7, "LED". "X3 OPTION" connector For the vent valve (optional accessory) attached in the purge port or the fan cable for the air-cooling unit (optional accessory).
Page 40: How To Install The Stp Pump
STP-iX457/iXU457 Series Turbomolecular Pump How to install the STP pump Install the STP pump to the inside of the vacuum equipment as shown in Figure 21. WARNING An appropriate enclosure or a barrier which cannot be removed without using a tool should be provided to prevent an operator from accessing the connection cables between the STP pump and its connectors provided.
Page 41: Cleaning The Seal
Foreign materials falling into the STP pump through the splinter shield may result in product damage. Take care not to scratch the flange of the STP pump. Check whether or not there are scratches on the surface, before installing the STP pump. If unsatisfactory, contact Edwards. MT-86E-001-F Page 31...
Page 42: Stp Pump Installation Positions
STP-iX457/iXU457 Series Turbomolecular Pump 3.4.2 STP pump installation positions The STP pump can be installed vertically, horizontally, upside-down and/or slanted. Vacuum equipment 4. Slanted Upside-down 5. Vertical Horizontal Figure 22 - STP pump installation positions When installing the STP pump in a horizontal or slanted position, it is recommended to install it so that the direction of the outlet port is on a vertical or horizontal plane in the direction of the gravity.
Page 43: Secure The Stp Pump
STP-iX457/iXU457 Series Turbomolecular Pump 3.4.3 Secure the STP pump WARNING The STP pump is provided with a high-speed rotor. Any internal abnormality/error may result in a jump in rotational torque leading to personal injury or peripheral equipment damage. The STP pump is provided with a high-speed rotor. The worst-case failure may result in a jump in rotational torque leading to personal injury or peripheral equipment damage.
Page 44: Example Of Securing The Stp Pump (When Securing The Inlet Port With Bolts)
STP-iX457/iXU457 Series Turbomolecular Pump Note: When using any securing method other than that specified in this manual, contact Edwards. When securing the inlet port with bolts Refer to Table 6 for torque in pump abnormality and recommended securing bolts. Secure the inlet port flange with all of the bolt holes of the size specified in the Inlet Port Flange Standard.
Page 45: Example Of Securing The Stp Pump (When Securing The Inlet Port Flange With Claw Clamps)
STP-iX457/iXU457 Series Turbomolecular Pump When securing the inlet port flange with claw clamps When securing the inlet port flange with only the claw clamp, the vacuum equipment cannot withstand the maximum rotational torque generated by the worst-case failure. To make the vacuum equipment withstand abnormal torque, secure the base with either the 4 screws for legs or the 4 attached legs.
Page 46: Example Of Securing The Stp Pump (When Installing The Damper In The Inlet Port Flange)
STP-iX457/iXU457 Series Turbomolecular Pump When installing the damper in the inlet port flange CAUTION Use a damper only at the vertically upright position. CAUTION DO NOT remove the bolts and nuts attached to reinforce the damper. Refer to Table 6 for rotational torque. When using a damper, secure the base with 4 screws for legs.
Page 47: Legs For Securing The Base
STP-iX457/iXU457 Series Turbomolecular Pump 3.4.4 Legs for securing the base CAUTION When making legs to secure the base, make the length of legs 35 mm or less. Use a material that has a tensile strength of 600 N/mm or more. CAUTION When securing the base, use stainless steel securing bolts with a tensile strength class is 70 or more.
Page 48: Rotation Stopper
STP-iX457/iXU457 Series Turbomolecular Pump 3.4.5 Rotation stopper CAUTION Use stainless steel rotation stopper on the base with a tensile strength class 70. Screw depth 18 M10 nut More than twice the plate thickness Figure 29 - Rotation stopper MT-86E-001-F Page 38...
Page 49: External Power Supply Unit
Moreover, an accident caused by water leaks or gas leak may occur. CAUTION Use the power cable that Edwards has specified. The use of other cables may result in product damage. CAUTION Confirm the power voltage on the label. Connect the power cable securely to prevent incorrect wiring.
Page 50 STP-iX457/iXU457 Series Turbomolecular Pump CAUTION Connect each cable securely with caution, avoiding any obstacles. DO NOT place heavy objects on the cables or bend them excessively. If any problem occurs in cables, connectors or terminals, the STP pump may not function normally. DO NOT apply voltage to each connector pin and DO NOT cause any short-circuiting between pins.
Page 51: Dc Power Cable
STP-iX457/iXU457 Series Turbomolecular Pump Cable clamp To external To STP power supply pump X1 Cable bushing Figure 30 - DC power cable Remarks Name Model number Capable of fastening the cable outside- NJC–2410–PF Connector (CN1) (Nanaboshi Electric Mfg.co.,Ltd) diameter φ11.5 to 14 mm by the cable clamp Capable of fastening the cable outside- NJC–24–CB Cable bushing...
Page 52: Vent Valve
STP-iX457/iXU457 Series Turbomolecular Pump connection cable is not included with the power supply unit iPD-240-24V (optional accessory). Contact the distributor when purchasing it. Vent valve 3.7.1 Connecting the vent valve CAUTION Control the amount of the atmosphere or dry N gas at 8.4×10 Pa・m /s (500 SCCM) or less when...
Page 53: Example Of A Control Method
STP-iX457/iXU457 Series Turbomolecular Pump Figure 32 - Example of a control method when introducing the atmosphere (in dashed line) Note: The atmosphere or dry N gas introduction at the vent valve may result in a noise. This is not abnormality/error. MT-86E-001-F Page 43...
Page 54: Vent Valve Output
STP-iX457/iXU457 Series Turbomolecular Pump 3.7.2 Vent valve output Connect the vent valve to the "X3 OPTION" connector for ON/OFF control. The vent valve is an optional accessory. Contact the distributor when purchasing it. When using the vent valve, set the vent valve function to ENABLE. Set the vent valve setting to "ENABLE", and the air-cooling fan setting to "DISABLE"...
Page 55: Precautions Of Vacuum Piping
STP-iX457/iXU457 Series Turbomolecular Pump Precautions of vacuum piping CAUTION DO NOT open the STP pump through the flange to atmospheric air while the STP pump is running. If atmospheric air flows into the STP pump, it may not function normally. Depending upon the type of the backing-pump used, atmospheric air may reverse flow into the STP pump when the backing-pump stops.
Page 56: Vacuum Piping Method
STP-iX457/iXU457 Series Turbomolecular Pump 3.8.1 Vacuum piping method Attach the inlet port to the high vacuum side. (Refer to Section 2.1, "STP pump specification" for maximum working pressure). Attach the outlet port to the inlet port flange of the backing-pump (primary side pump). (Refer to Section 2.1, "STP pump specification"...
Page 57: Attaching A Baking Heater
STP-iX457/iXU457 Series Turbomolecular Pump 3.10 Attaching a baking heater WARNING The surfaces of the STP pump and its peripheral equipment will become extremely hot when performing baking. NEVER touch them with bare hands. CAUTION DO NOT apply excessive force to the cable for the baking heater. CAUTION Wind the baking heater around the surface of the STP pump tightly.
Page 58: Cooling The Stp Pump
STP-iX457/iXU457 Series Turbomolecular Pump 3.11 Cooling the STP pump CAUTION Always turn OFF the primary power, then turn OFF the primary power supply and isolate the electrical energy source (Lockout/Tagout) on the vacuum equipment before performing any maintenance or inspection. CAUTION When installing the air-cooling fan and bracket, use attached screws or screws equivalent to the attached screws.
Page 59: Air-Cooling Unit U1-86
STP-iX457/iXU457 Series Turbomolecular Pump 3.12 Air-cooling unit U3-86 The air cooling unit consists of the following parts. Install them to the pump according to the procedure. 3.12.1 Parts list Item Q’ty Remarks Air-cooling unit U3-86 Air-cooling unit Hexagon socket bolt M10×16 Flat washer M10 Hexagon socket bolt M6×10 Flat washer M6...
Page 60: 3.12.3 Maintenance
STP-iX457/iXU457 Series Turbomolecular Pump Air-cooling fan X3 OPTION connector Plate Fan cable Hexagon socket bolt M6×10 (4 pcs) Flat washer M6 Flat washer M10 Hexagon socket bolt M10×16 (4 pcs) Figure 36 - Installation procedure for air-cooling unit U3-86 Note: Remove the air-cooling fan from the STP pump by reversing the installation steps.
Page 61: Connecting To Semiconductor Equipment
STP-iX457/iXU457 Series Turbomolecular Pump 3.13 Connecting to semiconductor equipment The STP pump is a component system when installing to the semiconductor equipment. Consider the following when designing the semiconductor equipment. 3.13.1 Connecting to power The STP pump receives its power from the semiconductor equipment electrical distribution system via a circuit breaker (Rated current 10 A).
Page 62 STP-iX457/iXU457 Series Turbomolecular Pump This page intentionally blank MT-86E-001-F Page 52...
Page 63: Operation
MSDS to prevent an accident when using toxic, reactive or combustible gases. CAUTION Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the following gases, contact Edwards: • Gases including alkaline metals except Li gas.
Page 64: How To Introduce A Purge Gas
STP-iX457/iXU457 Series Turbomolecular Pump 4.1.2 How to introduce a purge gas CAUTION When pumping reactive or corrosive gas, gas including hydrogen, introduce a purge gas to protect the inside of the STP pump. Not to do so may result in product damage. Connect a needle valve or a similar part to the purge port and introduce a dry N gas or other gas to perform a gas purge (see Section 3.9, "Introducing N...
Page 65: Before Starting The Stp Pump
STP-iX457/iXU457 Series Turbomolecular Pump Before starting the STP pump CAUTION NEVER connect or disconnect any cables while the power is ON. NEVER turn the primary power OFF (turn the MAIN POWER "OFF") while the STP pump is in rotation. DO NOT release the inlet port flange or outlet port flange into the atmosphere while the STP pump is rotating.
Page 66: Powering On
STP-iX457/iXU457 Series Turbomolecular Pump Powering ON Turn "ON" the external power supply unit. If no error is found, the magnetic bearing functions and the rotor levitates (POWER ON state). The "STATUS" LED flashes in green (Levitation state). Pump operation 4.5.1 Input operation port setting Set the hardware which operates the STP pump before the operation.
Page 67: How To Start/Stop The Stp Pump
STP-iX457/iXU457 Series Turbomolecular Pump How to start/stop the STP pump 4.6.1 Starting the STP pump after stopping Perform the start operation shown in Section 4.5.2, "Starting/stopping the STP pump". The STP pump can be reaccelerated even while it is stopping. 4.6.2 Starting the STP pump after a safety function operates A safety function operates when an abnormality/error occurs in the STP pump or peripheral equipment.
Page 68: Led
STP-iX457/iXU457 Series Turbomolecular Pump The STP pump operation status is indicated with the color and flashing pattern of the "STATUS" LED. When flashing pattern other than Figure 38 is indicated, there is a possibility of failure. Contact the Service office. 1 cycle (1.6 seconds) Light on...
Page 69: Parallel Port Input/Output Signal
STP-iX457/iXU457 Series Turbomolecular Pump Parallel port input/output signal The remote input/output signal connector "X2 REMOTE" is used for input/output remote signals (see Figure 39). This connector is of D-Sub (High density 15 pins, socket type) type. The screw for connector is #4-40. Note: The connector (pin type) for remote connection is included.
Page 70: X2 Remote Input Signal Pins
STP-iX457/iXU457 Series Turbomolecular Pump Description Pins for inputting the START signal. Short the circuits between (1)-(6). When the pins (1)-(6) are opened, the STP pump will stop. START IN IN COM Pins for inputting multiple functions signal. (11) One of the following functions is available by changing the setting via the serial port.
Page 71: X2 Remote Input Signal Pins (Contact Input)
STP-iX457/iXU457 Series Turbomolecular Pump Figure 40 - X2 REMOTE input signal pins (contact input) Note: 1 pin (0 V) is isolated from the frame ground. Note: The input current of remote input signal is approx. 3.5 mA. Make sure the minimum applicable load of the relay contact when the remote operation with the relay.
Page 72: Input Operation Port Setting
STP-iX457/iXU457 Series Turbomolecular Pump 「START IN」（X2.pin01） Open (OFF) Close (ON) Open (OFF) STOP request START request Type-A: （STOP request） Undefined 「PROG IN」 (X2.pin11) Close (ON) (Don’t use) RESET request Figure 41 - X2 REMOTE Pin function matrix for input signal (Type-A PROG-IN) 「START IN」（X2.pin01）...
Page 73: Second Speed Option
STP-iX457/iXU457 Series Turbomolecular Pump 4.8.3 Second speed option When the second speed option is enabled, second rating speed can be set independently of the normal rating speed setting. The selection of the second rating speed and normal rating speed are operated from I/O remote input or serial communication port.
Page 74: Output Signal Pins
STP-iX457/iXU457 Series Turbomolecular Pump 4.8.4 Output signal pins Table 14 and Figure 43. The pins function when the input operation port is either in parallel port setting or serial port setting. Three abbreviations are used in Table 14. N.O OUT: Normal Open Output Pin N.C OUT: Normal Close Output Pin...
Page 75: X2 Remote Output Signal Pins (Continued)
STP-iX457/iXU457 Series Turbomolecular Pump Description Pins for outputting multiple functions signal. (15) (10) PROG OUT One of the following functions is available by changing the N.O. OUT setting via the serial port. (refer to Section 5, “SERIAL COMMUNICATION PROTOCOL” in this Instruction Manual, or the Instruction Manual for the STP-Link [optional accessory]) PROG OUT OUT COM...
Page 76: X2 Remote Output Signal Pins
STP-iX457/iXU457 Series Turbomolecular Pump Figure 43 - X2 REMOTE output signal pins Table 18 shows the rated contacts for four photo relays in Figure 43. Resistance Load (COS Ø=1) Maximum voltage 30 V DC Maximum rated current 0.1 A Table 18 - Rated contacts for four photo relays MT-86E-001-F Page 66...
Page 77: X2 Remote Output Signal Pin Which Changes
STP-iX457/iXU457 Series Turbomolecular Pump Figure 44 - X2 REMOTE output signal pin which changes according to abnormality notification / warning notification Figure 45 - X2 REMOTE output signal pin which changes according to rotation speed MT-86E-001-F Page 67...
Page 78 STP-iX457/iXU457 Series Turbomolecular Pump This page intentionally blank MT-86E-001-F Page 68...
Page 79: Serial Communication Protocol
STP-iX457/iXU457 Series Turbomolecular Pump SERIAL COMMUNICATION PROTOCOL Introduction STP-iX457/iXU457 is provided with compliant serial RS232/RS485 interface. Prepare the user application according to this protocol procedure. Operation instructions and information, such as the running state and setting values of the STP pump can be set by the software. The STP pump equips the serial port for connecting the user application, and for connecting the STP-Link (optional accessory) only when using the power supply unit iPD-240-24V (optional accessory).
Page 80: Connection And Setting Up
STP-iX457/iXU457 Series Turbomolecular Pump Connection and setting up 5.2.1 Signal connection 1. Serial Port COM1 (X2 REMOTE connector) The serial port COM1 is available for the serial communication via RS232 or RS485. When using a user application, connect it to this port. Connect the connector X2 (High density D-Sub15 pin, socket type) to the PC according to Table 19.
Page 81 STP-iX457/iXU457 Series Turbomolecular Pump 2. STP-Link The STP-Link is available when connecting the power supply unit iPD-240-24V (optional accessory) to the STP pump. The STP-Link (optional accessory) can be connected to the STP-LINK connector. MT-86E-001-F Page 71...
Page 82: Connecting The Rs485
STP-iX457/iXU457 Series Turbomolecular Pump 5.2.2 Connecting the RS485 Make sure the followings when using the serial port COM1 with RS485. • A connection condition is 1 on 1 (single point connection) or 1 on N (multi-point connection). A maximum number of 32 SIMs are connectable in the multi-point connection. •...
Page 83: Communication Parameter Setting
STP-iX457/iXU457 Series Turbomolecular Pump 5.2.3 Communication parameter setting The factory setting of COM1 is shown in Table 20. To set communication parameters, use the STP-Link (optional accessory) or the power supply unit iPD-240-24V (optional accessory). Communication Factory setting PC setting example parameter Baud rate 9,600 bps...
Page 84: Serial Communication Timeout Setting
STP-iX457/iXU457 Series Turbomolecular Pump 5.2.5 Serial communication timeout setting If the signal to the input operation port of the STP pump is interrupted for a certain period during acceleration or normal operation, the STP pump detects a failure and stops. The time setting of the failure detection is user definable.
Page 85: Recommended Items About Communication Cable Installation
STP-iX457/iXU457 Series Turbomolecular Pump 5.2.6 Recommended items about communication cable installation Noise generated by many factors such as the type or length of cable, communication speed, and different communication devices may cause the communication failure with a serial port. It is very difficult to prevent a communication failure completely.
Page 86: Example Of Ring Ferrite Core Installation
STP-iX457/iXU457 Series Turbomolecular Pump DO NOT bundle a communication line with a protective earth conductor or a power line. Moreover, keep away a communication line from the apparatus used as a noise source as much as possible. As radio frequency noise measure, place a ferrite core on both ends of the communication cable. When electromagnetic interference caused by radio frequency noise in frequency band (150 kHz to 1 GHz) affects communication, attaching ring ferrite cores to the cable is effective to reduce communication failure.
Page 87: Example Of Differential Signal Waveform
STP-iX457/iXU457 Series Turbomolecular Pump DO NOT insert or remove a communication cable while a communication device and a STP pump are turned ON the power. Communication interface circuit may break down if surge voltage caused by such as potential difference of communication interfaces or static electricity is applied to communication line. Communication failure occurs frequently by broken communication interface circuit.
Page 88: Protocol Specifications
STP-iX457/iXU457 Series Turbomolecular Pump Protocol specifications 5.3.1 General description The STP serial communication protocol enables the SIM to receive the communication command transmitted from the PC and sends a response following the communication command (Figure 54-1). Each communication command from the PC transmits a text message (ASCII text) assigned to each function (Figure 54-2).
Page 89: Standard Transmission Frame (In The Rs232/Rs485 Single Point Connection)
STP-iX457/iXU457 Series Turbomolecular Pump Table 23 shows ASCII characters being used in the transmission control, error control and handshake in the application layer. ASCII Function character code Transmission layer Transmission block start character Transmission frame end character Transmission block end character Acknowledgment response Non-acknowledgment response Network frame ID character...
Page 90: Control Command
STP-iX457/iXU457 Series Turbomolecular Pump Transmission frame when a message exceeds 255 characters (n = 255, m<=255, k = the number of transmission blocks): First 5+n+1 5+n+2 Block ASCII Second 5+n+1 5+n+2 Block ASCII Final 5+m+1 5+m+2 Block ASCII "Stx" is used as a start character of each transmission block; "Etb" is used as an end character of the transmission block with a message of 255 characters;...
Page 91: Query Command
STP-iX457/iXU457 Series Turbomolecular Pump Then the preceding SIM->PC character is "Ack", the instructed control command is executed and the SIM returns the following response. PC->SIM Ack or Nak SIM->PC Stx # or ! Etx LRC The PC transmits "Ack" or "Nak"; then transmits the next command if necessary. Transmission frame when data is transmitted to two blocks (message is more than 256 characters and less than 512 characters): Designate the control command (the 1st block) on the PC...
Page 92: Transmission Data Format
STP-iX457/iXU457 Series Turbomolecular Pump Parameter (from C to C ) serves as 16 bits signed hexadecimal value coded ASCII text. When a message (a space character, a function code, and parameter) exceeds 255 characters, input "?" and CHR to the top transmission block only (the first transmission block of the transmission frame). It is not necessary to input them to the 2nd and succeeding transmission blocks.
Page 93: Frame Control (Checksum)
STP-iX457/iXU457 Series Turbomolecular Pump 5.3.6 Frame control (checksum) The transmission frame is controlled by the odd number parity check. First initialize LRC as FF Next calculate LRC by EXCLUSIVE-OR (XOR) of all the frame bytes containing "Stx", "Etb", "Etx" and LRC and transmit the result as LRC.
Page 94 STP-iX457/iXU457 Series Turbomolecular Pump Examples: Network frame ID character and number in the multi-point connection ASCII Network frame No "1" ASCII Network frame No "100" ASCII Network frame No "127" The transmission frame has a single block or multiple transmission blocks. Each transmission block consists of a network frame ID character, a network frame number, a start control character, data block number (3 digits), a message (up to 255 characters), an end control character and a checksum (LRC).
Page 95: Control Command In The Rs485 Multi-Point Connection
STP-iX457/iXU457 Series Turbomolecular Pump 5.3.9 Control command in the RS485 multi-point connection The control command to be used when a pump operation instruction or a setting change instruction is transmitted to the SIM and is arranged in the order specified below. The top is "Sp" (space character, HEX code "20") and ASCII characters corresponding to the respective function code and parameter follow.
Page 96: 5.3.10 Query Command In The Rs485 Multi-Point Connection
STP-iX457/iXU457 Series Turbomolecular Pump Next, the preceding SIM->PC character is "Ack", the PC continues instructing the control command (the 2nd block). PC->SIM @ F Stx 0 Etx LRC SIM->PC Ack or Nak Always assign less than 510 characters (n< 510) to the parameter so that the message is less than 512 characters.
Page 97: 5.3.11 Broadcasting Command In The Rs485 Multi-Point Connection
STP-iX457/iXU457 Series Turbomolecular Pump Always assign less than 254 characters (n< 254) to the parameter so that the message is less than 256 characters. Next, the preceding SIM->PC character is "Ack", the instructed query command is executed and the SIM returns the following response (1st block). PC->SIM Ack or Nak SIM->PC @ F...
Page 98: 5.3.12 Application Note
STP-iX457/iXU457 Series Turbomolecular Pump 5.3.12 Application note Noise generated by many factors such as the type or length of cable, communication speed, and different communication devices may cause the communication failure with a serial port. It is very difficult to prevent a communication failure completely. The followings are the methods to create the tool application with redundancy to a noise etc.
Page 99: Example Of Answer Resending Process
STP-iX457/iXU457 Series Turbomolecular Pump Always check the LRC checksum of answer data. When LRC checksum is incorrect, do not use the data. When the incorrect data caused by noise is accepted, parameters might be set unexpected values. In this case, the processing of the tool application may determine to be a communication failure.
Page 100: Example Of Communication Cycle Process
STP-iX457/iXU457 Series Turbomolecular Pump This procedure is not necessary Communication cycle start if TMP connection number = 1. RS485 multipoint connection? Address selection: First TMP Command sending process Succeeded? Answer receiving process Succeeded? Decode process Error process RS485 multipoint connection? Address selection: Next TMP Address check:...
Page 101: Example Of Command Sending Process
STP-iX457/iXU457 Series Turbomolecular Pump This procedure is not necessary if total block N = 1. Send command (N blocks) *1 When using RS485 to communicate, switch the PC side from sending state to receiving state within 5 sec. *2 When using RS485 multipoint connection, Block number: k = 1 also an address is incorrect.
Page 102: Command Specifications
STP-iX457/iXU457 Series Turbomolecular Pump Command specifications 5.4.1 Command list Function Command/Query Name Function code ReadMeas Reads the measured rotational speed. Command Sends commands START, STOP, RESET (These commands are valid only when being sent to the serial port which is set as the input operation port.) ReadFailMess Reads the errors being detected.
Page 103: Readmeas
STP-iX457/iXU457 Series Turbomolecular Pump 5.4.2 ReadMeas Function: Reads the measured rotational speed. Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx D Parameter 1 to 2 Etx LRC Parameter Item Data format Remarks [System reservation] 56-bits hexadecimal coded ASCII Measured rotational speed 16-bits hexadecimal (Unit: Hz)
Page 104: Readfailmess
STP-iX457/iXU457 Series Turbomolecular Pump Parameter Item Data format Remark Pump operation command 8-bits hexadecimal coded Refer to Table 26 ASCII Pump operation command Value START STOP RESET Table 26 - Pump operation commands Example: Pump operation command: RESET operation = 4 = 04 Parameter ASCII 30 34...
Page 105 STP-iX457/iXU457 Series Turbomolecular Pump Parameter Item Data format Remarks The number of error 8-bits hexadecimal Up to 80 errors coded ASCII 2 to 81 Error 1 8-bits hexadecimal coded ASCII … … Error 80 8-bits hexadecimal coded ASCII *1 The maximum number of errors may differ depending upon the software version of the STP pump. It is recommended that an application be designed as variable-length data.
Page 106: Error Message Values
STP-iX457/iXU457 Series Turbomolecular Pump Error message Value Error message Value [System reservation] AMB Com. Failure [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] Power Failure [System reservation] Power Supply Fail [System reservation] Overspeed 1 [System reservation] DRV Overvoltage...
Page 107: Error Message Values (Continued)
STP-iX457/iXU457 Series Turbomolecular Pump Error message Value Error message Value [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] Aberrant Brake [System reservation] Aberrant Accel Overspeed 4 [System reservation] [System reservation]...
Page 108: Readmodfonct
STP-iX457/iXU457 Series Turbomolecular Pump 5.4.5 ReadModFonct Function: Reads the pump operation mode and the errors being detected. The data of errors being detected reads the same data as that of "ReadFailMess". Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx Parameter 1 to 82 Etx LRC Parameter...
Page 109: Pump Operation Mode
STP-iX457/iXU457 Series Turbomolecular Pump Pump operation mode Value Levitation No Levitation Acceleration Normal Deceleration (Brake) Autotest [System Reservation] [System Reservation] [System Reservation] [System Reservation] [System Reservation] Table 29 - Pump operation mode Example: Pump operation mode : 01 = 1 = Levitation The number of error : 02 = 2 errors...
Page 110: Readversion
STP-iX457/iXU457 Series Turbomolecular Pump 5.4.6 ReadVersion Function: Read the software version. Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx Parameter 1 to 24 Etx LRC Parameter Item Data format Remarks 1 to 16 Control unit software version 8-bits hexadecimal coded ASCII 17 to 20 Motor driver software version...
Page 111: Readcounters
STP-iX457/iXU457 Series Turbomolecular Pump 5.4.7 ReadCounters Function: Reads serial number, running time and start counter. Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx Parameter 1 to 23 Etx LRC Parameter Item Data format Remarks 1 to 10 Control unit serial number ASCII character 11 to 20 Pump serial number...
Page 112: Readsetpoint
STP-iX457/iXU457 Series Turbomolecular Pump 5.4.8 ReadSetPoint Function: Reads the setting value of the "Speed Set Point" and TMS temperature. The "Speed Set Point" data is the same data as that of "ReadSpeedSetPoint". Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx Parameter 1 to 2 Etx LRC...
Page 113: 5.4.10 Readstatus
STP-iX457/iXU457 Series Turbomolecular Pump Parameter Item Data format Remark Motor temperature 16-bits hexadecimal (Unit: ºC) coded ASCII Example: Motor temperature : 0014 = 20 ºC (68 ºF) Parameter ASCII 30 30 31 34 5.4.10 ReadStatus Function: Reads various settings (Remote mode, TMS function, Emergency vent valve). Transmission frame: PC->SIM Stx Etx LRC...
Page 114: 5.4.11 Readevents
STP-iX457/iXU457 Series Turbomolecular Pump Remote mode Value I/O Remote (X2) COM1 (X2) COM3 (STP-LINK) [System reservation] 3, 4, 5 Table 30 - Remote mode Example: Remote mode setting : 01 = I/O Remote TMS function setting : 00 = ENABLE Emergency vent valve setting : FF = DISABLE...
Page 115: Setspeedsetpoint
STP-iX457/iXU457 Series Turbomolecular Pump Parameter Item Data format Remarks The number of 8-bits hexadecimal Up to 10 errors "Error Record" coded ASCII 2 to 11 Error Record 1 to 8-bits hexadecimal Error Record 10 coded ASCII *1 Value corresponding to the error message is transmitted (refer to Table 27 and Table 28). The most recent error has the smallest parameter number.
Page 116: 5.4.13 Readspeedsetpoint
STP-iX457/iXU457 Series Turbomolecular Pump Parameter Items Data format Remark Speed Set Point 16-bits hexadecimal (Unit: Hz) coded ASCII *1 When the value set to the parameter is larger than the upper limit, it is automatically set to the upper limit. When the value set to the parameter is smaller than the lower limit, it is automatically set to the lower limit.
Page 117: 5.4.14 Readmodfonctwithwarning
STP-iX457/iXU457 Series Turbomolecular Pump 5.4.14 ReadModFonctWithWarning Function: Reads the pump operation mode, errors and warnings being detected. Transmission Frame: PC→SIM Stx Etx LRC SIM→PC PC→SIM SIM→PC Stx Parameter 1 to 82 Etx LRC Parameter Item Data format Remark Pump operation mode 8-bits hexadecimal See Table 29 coded ASCII...
Page 118: Warning Value Bit Assign
STP-iX457/iXU457 Series Turbomolecular Pump Warning message 16-bits hex value 0001 [System reservation] WARNING: Second Damage Limit 0002 WARNING: First Damage Limit 0004 WARNING: Imbalance X_H 0008 WARNING: Imbalance X_B 0010 WARNING: Imbalance Z 0020 WARNING: Pump Run Time Over 0040 WARNING: Pump Overload 0080 [System reservation]...
Page 119 STP-iX457/iXU457 Series Turbomolecular Pump Example: Pump operation mode : 01 = 1 = Levitation WARNING being detected : 000C = 0004 OR 0080 "WARNING: First Damage Limit" and "WARNING: Imbalance X_H" The number of error : 02 = 2 errors Error 1 : 0D = 13 = Disturbance Xh...
Page 120: 5.4.15 Readmeasvalue
STP-iX457/iXU457 Series Turbomolecular Pump 5.4.15 ReadMeasValue Function: Reads the TMS temperature, motor temperature, motor current, measured rotational speed, and control unit temperature. The motor temperature value is the same temperature as "ReadMotorTemp". The measured rotational speed value is the same as "ReadMeas" parameter 2 (Measured rotational speed).
Page 121 STP-iX457/iXU457 Series Turbomolecular Pump Example: TMS temperature: 0046 = 70 ºC (158ºF) Motor temperature: 0014C = 20 ºC (68ºF) Motor current: = 2.5A Measured rotational speed: 01C2 = 450 Hz = 27,000 rpm Control unit temperature : 0032 = 50 °C Parameter ASCII Parameter...
Page 122: 5.4.16 Readoptionfunc
STP-iX457/iXU457 Series Turbomolecular Pump 5.4.16 ReadOptionFunc Function: Reads the setting value of the input operation port, warning function, and serial communication time out. Transmission frame: PC→SIM Stx Etx LRC SIM→PC PC→SIM SIM→PC Stx Parameter 1 to 19 Etx LRC *1 The HEX code of ASCII character ' = ' is "3D". MT-86E-001-F Page 112...
Page 123 STP-iX457/iXU457 Series Turbomolecular Pump Parameter Item Data format Remarks Input operation port setting 8-bits hexadecimal coded ASCII TMS Option 8-bits hexadecimal Enable/Disable setting coded ASCII [System reservation] 8-bits hexadecimal coded ASCII Vent valve 8-bits hexadecimal Enable/Disable setting coded ASCII Vent valve starting speed setting 8-bits hexadecimal 1 % step coded ASCII...
Page 124: Parameter Setting Value
STP-iX457/iXU457 Series Turbomolecular Pump Parameter Item Setting range Input operation port setting I/O REMOTE (X2): COM1 (X2): COM3 (STP-LINK): TMS Option : ENABLE Enable/Disable setting :DISABLE Vent valve : ENABLE Enable/Disable setting :DISABLE Vent valve starting speed setting 10 to 80 % to 50 Vent valve running time setting 5 to 600 sec.
Page 125 STP-iX457/iXU457 Series Turbomolecular Pump Example: Input operation port: = I/O REMOTE TMS Option: = DISABLE Vent valve: = ENABLE Vent valve starting speed: = 50 % Vent valve running time: 003C = 60 sec. Air-cooling fan: = DISABLE Second Damage Limit Option: = ENABLE First Damage Limit Warning: = ENABLE...
Page 126: 5.4.17 Setoptionfunc
STP-iX457/iXU457 Series Turbomolecular Pump 5.4.17 SetOptionFunc Function: Changes the setting value of the input operation port, warning function, and serial communication time out. CAUTION There is an endurance limit of setting changes (no more than 24 times per day for about ten years). If this limit is exceeded, it not only may become impossible to change the setting but can also cause pump failure.
Page 127 STP-iX457/iXU457 Series Turbomolecular Pump Parameter Item Data format Remarks Input operation port setting 8-bits hexadecimal coded Default 01 ASCII (I/O REMOTE) TMS Option 8-bits hexadecimal coded Default FF Enable/Disable setting ASCII (DISABLE) [System reservation] 8-bits hexadecimal coded ASCII Vent valve 8-bits hexadecimal Default FF Enable/Disable setting...
Page 128 STP-iX457/iXU457 Series Turbomolecular Pump Refer to Table 32, "Parameter setting value" for each parameter setting value. The value is not reflected when a parameter is out of a setting range. Example: Input operation port: = I/O REMOTE TMS Option: = DISABLE Vent valve: = ENABLE Vent valve starting speed:...
Page 129: 5.4.18 Readcondition
STP-iX457/iXU457 Series Turbomolecular Pump 5.4.18 ReadCondition Function: Reads the pump model and damage point. Transmission frame: PC→SIM Stx Etx LRC SIM→PC PC→SIM SIM→PC Stx Parameter 1 to 4 Etx LRC *1 The HEX code of ASCII character ' { ' is "7B". Parameter Item Data format...
Page 130 STP-iX457/iXU457 Series Turbomolecular Pump Example: Pump model: 5354502D69533232303720202020202020202020hex = STP-iX457/iXU457 Damage point: = 50 Parameter "S" "T" "P" "–" "i" "S" "2" "2" "0" "7" ASCII 35 33 35 34 35 30 32 44 36 39 35 33 35 32 33 32 33 30 33 37 Parameter "...
Page 131: 5.4.19 Readeventswithtime
STP-iX457/iXU457 Series Turbomolecular Pump 5.4.19 ReadEventsWithTime Function: Reads the "Error Record" with detection time. Transmission frame: PC→SIM Stx Etx LRC SIM→PC PC→SIM SIM→PC Stx Parameter 1 to 15 Etx LRC PC→SIM SIM→PC Stx Parameter 15 to 22 Etx LRC *1 The HEX code of ASCII character ' } ' is "7D". Parameter Item Data format...
Page 132 STP-iX457/iXU457 Series Turbomolecular Pump 1. In case of time flag = 0 Parameter Item Data format Remarks Error Code 8-bits hexadecimal coded ASCII Time flag 8-bits hexadecimal coded ASCII Pump running time 32-bits hexadecimal Unit: minute coded ASCII Control unit running time 32-bits hexadecimal Unit: minute coded ASCII...
Page 133 STP-iX457/iXU457 Series Turbomolecular Pump Example: In case of Disturbance X_H detection at September 13, 2007 12: 34 Parameter ASCII 30 44 30 31 30 37 30 39 31 33 31 32 33 34 *3 System reservation Example: When 3 errors have been detected in the past; The number of "Error Record": = 3 errors The maximum number of "Error Record":...
Page 134 STP-iX457/iXU457 Series Turbomolecular Pump Parameter ASCII 46 46 30 30 30 30 30 30 30 30 30 30 30 30 Parameter ASCII 46 46 30 30 30 30 Parameter ASCII 46 46 30 30 30 30 30 30 30 30 30 30 30 30 *1 System reservation MT-86E-001-F Page 124...
Page 135: 5.4.20 Setoptions
STP-iX457/iXU457 Series Turbomolecular Pump 5.4.20 SetOptions Function: Changes the setting value of optional function. The parameter n depends on the optional function. Transmission frame: PC->SIM Stx Parameter 1 to n Etx LRC SIM->PC PC->SIM SIM->PC Stx Etx LRC *1 The HEX code of ASCII character ' 0 ' is "30". Parameter Item Data format...
Page 136: 5.4.20.2 Second Speed Selection
STP-iX457/iXU457 Series Turbomolecular Pump Parameter Item Data format Remark Optional function 16-bits hexadecimal 0014 hex number coded ASCII Second speed setting 16-bits hexadecimal (Unit: Hz) coded ASCII Second speed option 16-bits hexadecimal 0000 hex：DISABLE setting coded ASCII 00FF hex：ENABLE This value can be changed in the range from half of the rated rotational speed to the rated rotational speed. When the parameter value is larger than the rated rotational speed, it is automatically set to the rated rotational speed.
Page 137: 5.4.21 Readoptions
STP-iX457/iXU457 Series Turbomolecular Pump 5.4.21 ReadOptions Function: Reads the setting value of optional function. The parameter n depends on the optional function. Transmission frame: PC->SIM Parameter 1 Etx LRC SIM->PC PC→SIM SIM→PC Stx Parameter 1 to n Etx LRC *1 The HEX code of ASCII character ' 0 ' is "30". Parameter Item Data format...
Page 138: 5.4.21.2 Second Speed Select
STP-iX457/iXU457 Series Turbomolecular Pump Example: Second speed setting : 0190hex = 400 Hz = 24000 rpm Second speed option setting : 0000 = DISABLE Selected speed value : 0260hex = 608 Hz ≒ 36500 rpm (Normal rating speed setting) Parameter ASCII 30 30 31 34 30 31 39 30 30 30 30 30 30 32 36 30 5.4.21.2 Second speed select...
Page 139: Stp-Link And Power Supply Unit
STP-iX457/iXU457 Series Turbomolecular Pump STP-LINK and POWER SUPPLY UNIT The STP-Link (optional accessory) and the power supply unit iPD-240-24V (optional accessory) are available with the STP pump. STP-Link The "STP-Link" is a Windows application for operating the STP pump, confirming the pump status or setting various settings.
Page 140: Power Supply Unit
STP-iX457/iXU457 Series Turbomolecular Pump Power supply unit The "power supply unit iPD-240-24V" operates the STP pump, confirms the pump status or sets various settings, as well as the conventional "Display Unit". The power supply unit iPD-240-24V is equipped with an LCD and flat panel switches. See the Instruction Manual of the "Power supply unit iPD-240-24V"...
Page 141: Safety Functions
STP-iX457/iXU457 Series Turbomolecular Pump SAFETY FUNCTIONS The STP pump is provided with safety functions for various abnormalities/errors. A safety function operates when an abnormality/error occurs. The "STATUS" LED flashes in red or orange. Also, the warning signal is output from the "X2 REMOTE" connector. If an abnormality/error is found when using the STP pump, check it and take measures in accordance with the following procedures.
Page 142: Operation After A Power Recovery
STP-iX457/iXU457 Series Turbomolecular Pump Table 36 shows the states of LED output and the "X2 REMOTE" output signals at a power failure. REMOTE output signal (X2 REMOTE) Duration of Rotational speed STATUS LED ALARM power failure N.O. N.C. Approx. 2 sec. Flash in red Close Open...
Page 143: Abnormal State Of Magnetic Bearing (Disturbance)
STP-iX457/iXU457 Series Turbomolecular Pump 7.1.3 Abnormal state of magnetic bearing (Disturbance) CAUTION When an abnormality/error occurs in the magnetic bearing, check the STP pump. If "FAILURE" cannot be released after reset operation, contact Service office. When the magnetic bearing does not function normally due to a breakage of the STP connection cable, disconnection of connectors or any abnormality/error of the STP control circuit, the rotor lands on the touch down bearing and stops.
Page 144: Overspeed
STP-iX457/iXU457 Series Turbomolecular Pump 7.1.8 Overspeed When the rotational speed of the STP pump exceeds 58,000 rpm due to a failure in the motor driver, the STP pump decelerates and stops. When the rotational speed increases and exceeds 59,000 rpm, the STP pump changes into free-running and stops.
Page 145: Contents Of Warning Function
STP-iX457/iXU457 Series Turbomolecular Pump Contents of WARNING function 7.3.1 First Damage limit Impact of the STP pump rotor onto the touch-down bearing, such as by an unexpected in-rush of air from outside or in the event of power failure, can damage the touch-down bearings. The STP pump monitors these impacts and assigns damage points to the event of "Disturbance"...
Page 146: Pump Overload
STP-iX457/iXU457 Series Turbomolecular Pump 7.3.4 Pump Overload "Pump Overload" is displayed when the state that the motor current exceeding the setting value continues during the fixed time or the state that the STP pump rotational speed drops below the setting value continues during the fixed time. However, the motor current and the rotational speed are monitored only in the NORMAL state.
Page 147: Warning Function Setting
STP-iX457/iXU457 Series Turbomolecular Pump WARNING function setting The WARNING functions can be set to Enable or Disable. Set to "ENABLE" when using the WARNING function. Set to "DISABLE" to release each WARNING function after the WARNING is detected. A setting value of the "Pump Run Time Over" and "Pump Overload" are adjustable. The WARNING detection can be released by setting the value larger than pump running hours after "Pump Run Time Over"...
Page 148: Troubleshooting Immediately After Failure Occurs
STP-iX457/iXU457 Series Turbomolecular Pump Troubleshooting immediately after failure occurs The STP pump is provided with safety functions for various abnormities/errors. A safety function operates when an abnormality/error occurs. The "STATUS" LED flashes in red. Also, the failure signal is output from the "X2 REMOTE" connector. If an abnormality/error is found when using the STP pump, check it and take measures in accordance with the following procedures.
Page 149: Troubleshooting
STP-iX457/iXU457 Series Turbomolecular Pump Troubleshooting 7.6.1 Indication of "STATUS" LED (red flash) A safety function operates and "STATUS" LED flashes in red when an abnormality/error occurs while the STP pump is in operation. Also, the failure signal is output from the "X2 REMOTE" connector. If an abnormality/error is found, take measures in accordance with Table 40 to Table 44.
Page 150 STP-iX457/iXU457 Series Turbomolecular Pump MT-86E-001-F Page 140...
Page 151 STP-iX457/iXU457 Series Turbomolecular Pump MT-86E-001-F Page 141...
Page 152 STP-iX457/iXU457 Series Turbomolecular Pump MT-86E-001-F Page 142...
Page 153: Maintenance And Inspection
STP-iX457/iXU457 Series Turbomolecular Pump MT-86E-001-F Page 143...
Page 154: Cleaning
STP-iX457/iXU457 Series Turbomolecular Pump MT-86E-001-F Page 144...
Page 155: Indication Of "Status" Led (Green And Red Alternately)
STP-iX457/iXU457 Series Turbomolecular Pump 7.6.2 Indication of "STATUS" LED (green and red alternately) If an abnormality/error is detected by self test during the power ON operation, "STATUS" LED illuminates in green and red alternately. This is the indication of STP pump or control unit failure. Contact Service Office.
Page 156 STP-iX457/iXU457 Series Turbomolecular Pump This page intentionally blank. MT-86E-001-F Page 146...
Page 157: Maintenance And Inspection
NEVER open any panel because it could cause shock, malfunction, or short circuit. Power OFF the peripheral equipments before performing maintenance and inspections. Only Edwards will replace the maintenance parts, and will execute repair and overhaul. Contact Service office.
Page 158: Inspecting The Deposit
Clean the outside of the control unit with a dry wipe as required. If the label of the STP pump has been damaged, contact Edwards. The decontamination (overhaul) in the STP pump is executed in Service office. When an overhaul is needed, contact Service office.
Page 159: Maintenance
5 years No gases used (only vacuum pumping) Other use 2 years Dependent on application, contact Edwards. "Etching" includes semiconductor etching and LCD etching. Note: When "First Damage Limit" warning or "Second Damage Limit" warning is detected, it is essential to have the touch down bearings replaced regardless of the recommended overhaul intervals.
Page 160: Recommended Maintenance Intervals For Main Parts
STP-iX457/iXU457 Series Turbomolecular Pump 8.4.3 Recommended maintenance intervals for main parts Internal components of the STP pump will be damaged from gas load, heat, and corrosion when used long-term. Deterioration or abrasion of the internal parts of the STP pump will cause unexpected failures.
Page 161 Procedure". CAUTION When returning the STP pump to Edwards, be sure to pack it well to prevent external damage. If the "Return Procedure" has not been satisfied, Edwards will not be responsible for any troubles. Always contact Service office before returning the STP pump for repairs, overhaul, or other purposes.
Page 162 STP-iX457/iXU457 Series Turbomolecular Pump This page intentionally blank. MT-86E-001-F Page 152...
Page 163: Storage And Disposal
STP-iX457/iXU457 Series Turbomolecular Pump STORAGE AND DISPOSAL Storage of the STP pump When planning not to use the STP pump over a long period (more than a few months), follow the precautions below: 1. Store the STP pump in a vertical position. 2.
Page 164: Disposal
Material Safety Data Sheet (MSDS) you obtain from the gas supplier. Dispose of the STP pump as industrial waste in accordance with all local and national safety and environmental standards. Note: Edwards will not be responsible for problems during or after disposal. MT-86E-001-F Page 154...
Page 165: Service, Spares And Accessories
A majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, state for each part required:...
Page 166: Accessories
STP-iX457/iXU457 Series Turbomolecular Pump 10.4 Accessories The following is a list of accessories that can be purchased by contacting Edwards. Items Application purpose Remarks Instruction Manual STP Pump Instruction Manual This manual Supplied with STP pump Connector for A connector for cable to connect to Model: “X1 DC POWER”...
Page 167 For more information, contact the nearest Service Office. (http://www.edwardsvacuum.com/) Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8853 International +81-47-458-8853 Facsimile: Domestic 047-458-8048 International +81-47-458-8048 Copyright 2018 Edwards Japan Limited. All rights reserved.

This manual is also suitable for:

Stp-ix457 series Stp-ixu457 series

Edwards STP Series Instruction Manual

Quick Links

Troubleshooting

Related Manuals for Edwards STP Series

Summary of Contents for Edwards STP Series

This manual is also suitable for:

Table of Contents