Technical Data; Applicable Pump Specifications - Edwards STP Series Instruction Manual

STP-XA2703BV155/XA3203BV155 Turbomolecular Pump
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TECHNICAL DATA

1.1

Applicable pump specifications

Model Name
STP-XA2703BV155
STP-XA3203BV155
*1
Corrosion resistant: STP pump with anti-corrosive treatment.
*2
High-emissivity coating: STP pump with rotor covered with high-emissivity coating.
*3
Temperature Management System: TMS maintains the temperature of the turbomolecular pump by monitoring the
temperature with the thermistor in the turbomolecular pump, and performing the TMS heater ON/OFF control in order to
maintain a constant temperature of the STP pump.
*4
The dedicated control unit for STP-XA2703BV155/XA3203BV155.
Specification
Extreme Advanced throughput type
*1
Corrosion resistant type
*2
High-emissivity coating type
*3
TMS unit
Applicable Control unit
4
SCU-1600/1601 *
MT-66E-0A1-E
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