Installation Area - Edwards STP Series Instruction Manual

The STP pump should be installed in an area which meets the following requirements:
2
Ambient temperature
Ambient relative humidity
Environment
STP pump installation
equipment conditions
2.1.2

Installation area

Leave enough space for the following in addition to that for the STP pump:
• Space for maintenance and inspection.
• Space for connecting cables.
The minimum bending radius of the STP connection cable is 100 mm (see the STP Pump
Instruction Manual (B), "External Appearance of the STP pump" [bending dimensions of the
DO NOT bend the cables excessively and beware of any obstacles when installing the STP pump.
In addition, leave enough space to install other cables without bending them excessively.
Note: The L-type STP connection cable is also offered. Contact Edwards if necessary.
March 10
STP Series Turbomolecular Pump
0 to 40 °C (32 to 104 °F)
30 to 95% (no dew condensing)
• An area free of externally applied mechanical shock.
• A place free of a heat source (Keep clear of the heat
source or attach a thermal shield plate).
• A place free of a strong magnetic field (Range: up to 15
mT (150 G) in the axial direction, and up to 3 mT (30 G)
in the radial direction with respect to the rotational axis
of the STP pump).
• A place free of a strong electric field.
• A place free of exposure to radiation.
• No discharge of high voltage (more than 500 V) (If more
than 500V is discharged, contact Edwards).
Install the STP pump securely so that foreign materials
cannot fall into the STP pump (Ex.: Si wafers or samples
are positioned above the STP pump) (To prevent foreign
materials from falling into the STP pump, design a shield
plate with large conductance).
CAUTION
connection cable]).
14 Issue 1-b